Method of manufacturing semiconductor wafers and method of manufacturing a semiconductor device

Patent metadata

Field	Value
Publication number	US-9779931-B2
Application number	US-201514878362-A
Country	US
Kind code	B2
Filing date	Oct 8, 2015
Priority date	Oct 8, 2015
Publication date	Oct 3, 2017
Grant date	Oct 3, 2017

Abstract

An embodiment of a method of manufacturing semiconductor wafers comprises determining at least one material characteristic for at least two positions of a semiconductor ingot. A notch or a flat is formed in a semiconductor ingot extending along an axial direction. A plurality of markings is formed in the semiconductor ingot. At least some of the plurality of markings at different positions along the axial direction are distinguishable from each other by a characteristic feature set depending on the at least one material characteristic. The semiconductor ingot is then sliced into semiconductor wafers.

First claim

What is claimed is:

1. A method of manufacturing semiconductor wafers, the method comprising:
determining at least one material characteristic for at least two positions of a semiconductor ingot;
forming a notch or a flat in the semiconductor ingot extending along an axial direction;
forming a plurality of markings in a circumference of the semiconductor ingot, wherein at least some of the plurality of markings at different positions along the axial direction are distinguishable from each other by a characteristic feature set depending on the at least one material characteristic; and thereafter
slicing the semiconductor ingot into semiconductor wafers.

2. The method of claim 1 , wherein the at least some of the plurality of markings at different positions along the axial direction are distinguishable from each other by an angular position relative to the notch or flat.

3. The method of claim 1 , wherein the at least some of the plurality of markings at different positions along the axial direction are distinguishable from each other by marking shape.

4. The method of claim 1 , wherein the at least some of the plurality of markings at different positions along the axial direction are distinguishable from each other by a radial extension toward a center of the semiconductor ingot.

5. The method of claim 1 , wherein the at least some of the plurality of markings at different positions along the axial direction are distinguishable from each other by an angular extension.

6. The method of claim 5 , wherein the at least some of the plurality of markings at different positions along the axial direction are positioned at a same angular position.

7. The method of claim 1 , wherein the plurality of markings are formed by at least one of laser marking and machining.

8. The method of claim 1 , wherein the notch or flat and the plurality of markings are formed in a same process equipment.

9. The method of claim 1 , wherein the plurality of markings are formed in the semiconductor ingot by rotating the semiconductor ingot between 0° and 360° around the axial direction while moving a marking position along the axial direction from a first axial position to a second axial position, thereby increasing an angular distance of the markings with increasing distance from the first axial position.

10. The method of claim 9 , wherein the marking position is moved along the axial direction by moving the semiconductor ingot relative to a marking process equipment or by moving the marking process equipment relative to the silicon ingot.

11. The method of claim 1 , wherein the semiconductor ingot is rotated between 0° and 180° around the axial direction while moving the marking position along the axial direction.

12. The method of claim 1 , wherein at least two of the plurality of markings are formed at different angular positions with respect to at least one axial position.

13. The method of claim 1 , wherein the at least one material characteristic is one or more of a resistivity, an oxygen concentration and a carbon concentration level.

14. The method of claim 1 , wherein the at least one material characteristic is determined at opposite ends of the semiconductor ingot.

15. The method of claim 1 , wherein the at least one material characteristic is determined at the circumference of the semiconductor ingot.

16. A method of manufacturing a semiconductor device, the method comprising:
determining a material characteristic of a semiconductor wafer by analyzing a marking at a circumference of the semiconductor wafer, the marking being different from a flat;
adjusting at least one of proton irradiation and annealing parameters based on the material characteristic;
irradiating the semiconductor wafer with protons; and thereafter
annealing the semiconductor wafer based on the at least one of the adjusted proton irradiation and annealing parameters.

17. The method of claim 16 , wherein the marking is analyzed by measuring one or more of an angular position of the marking relative to a flat, a shape of the marking, a radial extension toward a center of the semiconductor wafer, and an angular extension of the marking.

18. The method of claim 16 , wherein the semiconductor wafer is annealed at a temperature range of 350° C. to 550° C. for a duration between 30 minutes and 10 hours.

19. The method of claim 16 , wherein the semiconductor wafer is irradiated with the protons at an implantation dose range of 1×10 13 cm −2 to 4×10 14 cm 2 .

20. The method of claim 16 , further comprising, after proton irradiation and annealing, forming semiconductor device elements in the semiconductor wafer.

21. The method of claim 16 , wherein the semiconductor wafer is irradiated with the protons at an implantation energy range of 200 keV to 6 MeV.

22. The method of claim 16 , wherein the semiconductor wafer is irradiated with the protons at an implantation energy range of 1.5 MeV to 5.5 MeV, thereby forming a drift zone.

23. The method of claim 16 , wherein the semiconductor wafer is irradiated with the protons at an implantation energy range of 200 keV to 2 MeV, thereby forming a field stop zone.

Assignees

• Infineon Technologies Ag

Inventors

• Freund Johannes
• Oefner Helmut
• Schulze Hans-Joachim

Classifications

• H10P95/90

  Thermal treatments, e.g. annealing or sintering · CPC title

• H10P74/203 Primary

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• H10P34/40

  with high-energy radiation · CPC title

• H10P30/209

  in silicon to make buried insulating layers · CPC title