Vertical field effect transistor with biaxial stressor layer

Patent metadata

Field	Value
Publication number	US-9773904-B2
Application number	US-201615132960-A
Country	US
Kind code	B2
Filing date	Apr 19, 2016
Priority date	Sep 11, 2015
Publication date	Sep 26, 2017
Grant date	Sep 26, 2017

Abstract

A vertical field effect device includes a substrate and a vertical channel including In x Ga 1-x As on the substrate. The vertical channel includes a pillar that extends from the substrate and includes opposing vertical surfaces. The device further includes a stressor layer on the opposing vertical surfaces of the vertical channel. The stressor layer includes a layer of epitaxial crystalline material that is epitaxially formed on the vertical channel and that has lattice constant in a vertical plane corresponding to one of the opposing vertical surfaces of the vertical channel that is greater than a corresponding lattice constant of the vertical channel.

First claim

What is claimed is:

1. A vertical field effect device, comprising:
a substrate;
a vertical channel comprising In x Ga 1-x As, wherein the vertical channel comprises a pillar that extends vertically from the substrate and includes opposing vertical surfaces;
a stressor layer on the opposing vertical surfaces of the vertical channel, wherein the stressor layer comprises a layer of epitaxial crystalline material that is epitaxially formed on the vertical channel and that has lattice constant in a vertical plane corresponding to one of the opposing vertical surfaces of the vertical channel that is greater than a corresponding lattice constant of the vertical channel;
a dielectric layer on the stressor layer; and
a gate electrode on the dielectric layer,
wherein a vertical thickness of the stressor layer is the same as a vertical thickness of the gate electrode.

2. The vertical field effect device of claim 1 , wherein the stressor layer imparts a biaxial tensile strain to the vertical channel in the vertical plane corresponding to the opposing vertical surfaces of the vertical channel.

3. The vertical field effect device of claim 2 , wherein the stressor layer comprises a III-V compound semiconductor material.

4. The vertical field effect device of claim 3 , wherein the stressor layer comprises InP, AlSb, or GaSb.

5. The vertical field effect device of claim 2 , wherein the stressor layer comprises a II-VI compound semiconductor material.

6. The vertical field effect device of claim 5 , wherein the stressor layer comprises CdSe or ZnTe.

7. The vertical field effect device of claim 2 , wherein the stressor layer imparts a biaxial strain of about 0.5 to about 1.5 GPa to the vertical channel.

8. The vertical field effect device of claim 1 ,
wherein the opposing vertical surfaces of the vertical channel comprise a first pair of opposing vertical surfaces and the vertical plane comprises a first vertical plane,
wherein the vertical channel comprises a second pair of opposing vertical surfaces that extend in parallel, to a second vertical plane that is perpendicular to the first vertical plane, and
wherein the stressor layer is formed on the second pair of opposing vertical surfaces and has a second lattice constant in the second vertical plane that is greater than a second lattice constant of the vertical channel in the second vertical plane.

9. The vertical field effect device of claim 1 , wherein the stressor layer completely envelops the vertical channel.

10. The vertical field effect device of claim 1 , wherein 0.1<x<0.3.

11. The vertical field effect device of claim 7 , wherein 0.15<x<0.25.

12. The vertical field effect device of claim 1 , wherein the lattice constant of the stressor layer is about 1% to about 3% larger than the lattice constant of the vertical channel.

13. The vertical field effect device of claim 1 , wherein the stressor layer has a thickness of about 0.5 to 2 times a thickness of the vertical channel.

14. The vertical field effect device of claim 1 , wherein the stressor layer has a conduction band offset of at least about 200 meV relative to the vertical channel-layer.

15. The vertical field effect device of claim 1 , wherein a Gamma-L energy separation in the vertical channel is greater than about 350 meV.

16. The vertical field effect device of claim 1 , wherein the vertical channel has a bandgap greater than 1 eV.

17. The vertical Field effect device of claim 1 , wherein the vertical channel has a gate length of between 20 inn and 40 nm.

18. The vertical field effect device of claim 1 , wherein the vertical channel has a channel width greater than 10 nm.

19. The vertical field effect device of claim 1 , wherein the vertical channel has a thickness of between 3 nm and 10 nm.

20. The vertical field effect device of claim 1 , wherein the vertical channel has a second vertical surface that is non-parallel to the opposing vertical surfaces, and wherein the stressor layer imparts biaxial strain to both the opposing vertical surfaces of the vertical channel and the second vertical surface of the vertical channel.

21. The vertical field effect device of claim 20 , wherein the second vertical surface is perpendicular to the opposing vertical surfaces and extends between the opposing vertical surfaces.

22. A vertical field effect device, comprising;
a substrate;
a vertical channel comprising In x Ga 1-x As, wherein the vertical channel comprises a pillar that extends vertically from the substrate and includes opposing vertical surfaces;
a first spacer layer and a second spacer layer on the opposing vertical surfaces of the vertical channel, wherein the first and second spacer layers are vertically spaced apart from each other;
a stressor layer on the opposing vertical surfaces of the vertical channel between the first and second spacer layers, wherein the stressor layer comprises a layer of epitaxial crystalline material that is epitaxially formed on the vertical channel and that has lattice, constant in a vertical plane corresponding to one of the opposing vertical surfaces of the vertical channel that is greater than a corresponding lattice constant of the vertical channel;
a dielectric layer on the stressor layer between the first and second spacer layers; and
a gate electrode on the dielectric layer between the first and second spacer layers.

23. The vertical field effect device of claim 22 , wherein an upper surface of the stressor layer is coplanar with an upper surface of the gate electrode.

24. The vertical field effect device of claim 22 , wherein upper surfaces of the stressor layer, the dielectric layer, and the gate electrode are coplanar with a lower surface of the first spacer layer.

25. The vertical field effect device of claim 22 , wherein an upper surface of the stressor layer is closer to the substrate than an upper surface of the vertical channel.

26. A vertical field effect device, comprising:
a substrate;
a pillar that extends vertically from the substrate and includes opposing vertical surfaces, the pillar comprising a vertical channel between first and second source/drain regions, the vertical channel comprising In x Ga 1-x As;
a first source/drain layer on the opposing vertical surfaces of the pillar adjacent the first source/drain region;
a second source/drain layer on the opposing vertical surfaces of the pillar adjacent the second source/drain region;
a stressor layer on the opposing vertical surfaces of the pillar adjacent the vertical channel, wherein the stressor layer comprises a layer of epitaxial crystalline material that is epitaxially formed on the vertical channel and that has lattice constant in a vertical plane corresponding to one of the opposing vertical surfaces of the vertical channel that is greater than a corresponding lattice constant of the vertical channel;
a dielectric layer on the stressor layer; and
a gate electrode on the dielectric layer.

27. The vertical field effect device of claim 26 , wherein the stressor layer is between the first and second source/drain layers.

28. The vertical field effect device of claim 27 , wherein the dielectric layer and the gate electrode are between the first and second source/drain layers.

29. The vertical field effect device of claim 26 , wherein the first and second source/drain regions comprise In y Ga 1-y As, where y

Assignees

• Samsung Electronics Co Ltd

Inventors

• Obradovic Borna
• Bowen Chris
• Rakshit Titash
• Dharmendar Palle
• Rodder Mark

Classifications

• H10D64/01354 Primary

  passivation or protection of the electrode, e.g. using re-oxidation · CPC title

• H01L21/823487

  Electricity · mapped topic

• H01L29/78696

  Electricity · mapped topic

• H01L29/78642

  Electricity · mapped topic

• H01L29/66666

  Electricity · mapped topic