Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus

Patent metadata

Field	Value
Publication number	US-9773634-B2
Application number	US-201715416686-A
Country	US
Kind code	B2
Filing date	Jan 26, 2017
Priority date	Aug 9, 2013
Publication date	Sep 26, 2017
Grant date	Sep 26, 2017

Abstract

There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with <210> orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron microscope, an electron beam applied analysis apparatus, an ion-electron multi-beam apparatus, a scanning probe microscope or a mask repair apparatus.

First claim

What is claimed is:

1. A gas field ion source comprising:
an iridium tip comprising a pyramid structure, wherein an apex portion of the pyramid structure has an apex with <210> orientation surrounded by one {100} crystal plane and two {111} crystal planes,
wherein the pyramid structure includes a first layer composed of a single iridium atom constituting the apex of the pyramid structure, a second layer immediately below the first layer and composed of three iridium atoms located at vertices of a triangle, and a third layer immediately below the second layer and composed of six iridium atoms located at vertices and sides of a triangle,
wherein the crystal planes of the pyramid structure are defined by the iridium atoms of the first, second, and third layer, and
wherein the iridium tip is an emitter which is configured to emit an ion beam;
an ion source chamber which accommodates the emitter;
a gas supply section which is configured to supply a gas to be ionized, to the ion source chamber;
an extraction electrode which is configured to ionize the gas to generate ions of the gas and apply a voltage for extracting the ions of the gas from the emitter; and
a temperature control section which is configured to cool the emitter.

2. The gas field ion source according to claim 1 ,
wherein a main component of the gas is at least any one of hydrogen, nitrogen, oxygen, helium, neon, argon, krypton, and xenon, or a mixture of at least any of these gases.

3. The gas field ion source according to claim 1 ,
wherein a main component of the gas is nitrogen.

4. The gas field ion source according to claim 3 ,
wherein a purity of nitrogen which is the main component of the gas is 99% or more.

5. A focused ion beam apparatus comprising:
the gas field ion source according to claim 1 ; and
a control section which is configured to form a focused ion beam with the ions of the gas generated in the gas field ion source and irradiate a sample with the focused ion beam so as to perform at least one of observation, processing and analysis on an irradiated region of the sample.

6. An ion-electron multi-beam apparatus comprising:
the gas field ion source according to claim 1 ; and
a control section which is configured to irradiate substantially same position on a sample with a focused ion beam and an electron beam,
wherein the focused ion beam is obtained from the gas field ion source.

7. An ion-electron multi-beam apparatus comprising:
an electron source having:
an iridium tip as a tip which is configured to emit electrons, the iridium tip comprising a pyramid structure wherein an apex portion of the pyramid structure has an apex with <210> orientation surrounded by one {100} crystal plane and two {111} crystal planes,
wherein the pyramid structure includes a first layer composed of a single iridium atom constituting the apex of the pyramid structure, a second layer immediately below the first layer and composed of three iridium atoms located at vertices of a triangle, and a third layer immediately below the second layer and composed of six iridium atoms located at vertices and sides of a triangle, and
wherein the crystal planes of the pyramid structure are defined by the iridium atoms of the first, second, and third layer; and
an extraction electrode which is configured to generate the electrons and apply a voltage for extracting the electrons from the iridium tip; and

a control section which is configured to irradiate substantially same position on a sample with a focused ion beam and an electron beam,
wherein the electron beam is obtained from the electron source.

8. A scanning probe microscope comprising:
an iridium tip as a probe, the iridium tip comprising a pyramid structure wherein an apex portion of the pyramid structure has an apex with <210> orientation surrounded by one {100} crystal plane and two {111} crystal planes,
wherein the pyramid structure includes a first layer composed of a single iridium atom constituting the apex of the pyramid structure, a second layer immediately below the first layer and composed of three iridium atoms located at vertices of a triangle, and a third layer immediately below the second layer and composed of six iridium atoms located at vertices and sides of a triangle, and
wherein the crystal planes of the pyramid structure are defined by the iridium atoms of the first, second, and third layer; and
a control section which is configured to measure a shape and a state at an atomic level of a surface of a sample by scanning the probe in a state where the probe is brought close to the surface of the sample.

9. The scanning probe microscope according to claim 8 ,
wherein the scanning probe microscope is at least one of a scanning tunneling microscope and a scanning atomic force microscope.

10. A mask repair apparatus comprising:
the gas field ion source according to claim 1 ; and
a control section which is configured to form a focused ion beam with the ions of the gas generated in the gas field ion source so as to repair a defective part of a photomask by the focused ion beam.

11. The mask repair apparatus according to claim 10 ,
wherein the focused ion beam is a nitrogen ion beam.

Assignees

• Hitachi High-Tech Science Corp

Inventors

• Kozakai Tomokazu
• Matsuda Osamu
• Sugiyama Yasuhiko
• Aita Kazuo
• Aramaki Fumio
• Yasaka Anto
• Oba Hiroshi

Classifications

• H01J2237/002

  Cooling arrangements · CPC title

• H01J37/21

  Means for adjusting the focus · CPC title

• G01Q70/16

  Probe manufacture · CPC title

• G01Q60/16

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• H01J2237/006

  Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece, (H01J37/3244 takes precedence; environmental cells for electron microscopes H01J2237/2003; microscopes with environmental specimen chamber H01J2237/2608) · CPC title