Defect detection using thermal laser stimulation and atomic force microscopy
US-2024069095-A1 · Feb 29, 2024 · US
US9766267B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9766267-B2 |
| Application number | US-201414221462-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 21, 2014 |
| Priority date | Mar 28, 2013 |
| Publication date | Sep 19, 2017 |
| Grant date | Sep 19, 2017 |
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A device for calculating a position of an actuator, the actuator including a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, and the device includes a position calculation unit configured to calculating a position SA of the movement mechanism at a target position from the control signal at a time point T1, at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS), where m is a natural number of 1 or more, the control signal at the target position of the movement mechanism is denoted by M0, and the sensor signal is denoted by S0.
Opening claim text (preview).
What is claimed is: 1. A device for calculating a position of an actuator, the actuator comprising: a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM; and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, the device comprising: a processor; and a memory storing instructions, the instructions, when executed by the processor, causing the device to perform: generating the control signal for a driving power source to drive the movement mechanism each minimum movement amount ΔM; acquiring the control signal for each ΔM and a sensor signal generated by the movement amount detection sensor having the minimum resolution ΔS; calculating a position SA of the movement mechanism at a target position from: a value of (S0+m×ΔS) or (S0−m×ΔS); a number n of generated control signals from a control signal M0 to a control signal at a time point T1 or to a control signal generated right before T1; and a value of A=ΔS/ΔM, where the time point at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS) is denoted by T1, where m is a natural number of 1 or more and 1≦n≦m×A, and the control signal at the target position of the movement mechanism is denoted by M0 and the sensor signal is denoted by S0; and controlling movement of the movement mechanism based on the calculated position SA. 2. The device according to claim 1 , wherein, when the sensor signal changes at (S0+m×ΔS) and m=1, the calculating of the position comprises calculating the position SA by using the following Equation 1, SA =( S 0+4 S/ 2)−Δ S ×(2 n− 1)/2 A. Equation 1: 3. A method of calculating a position of an actuator, the actuator comprising: a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM; and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, the method comprising: generating the control signal for a driving power source to drive the movement mechanism each minimum movement amount ΔM; acquiring the control signal for each ΔM and also acquiring a sensor signal generated by the movement amount detection sensor having the minimum resolution ΔS; calculating a position SA of the movement mechanism at a target position from: a value of (S0+m×ΔS) or (S0−m×ΔS); a number n of generated control signals from a control signal M0 to a control signal at a time point T1 or to a control signal generated right before T1; and a value of A=ΔS/ΔM, where the time point at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS) is denoted by T1, m is a natural number of 1 or more and 1≦n≦m×A, and the control signal at the target position of the movement mechanism is denoted by M0 and the sensor signal is denoted by S0; and controlling movement of the movement mechanism based on the calculated position SA. 4. The method according to claim 3 , wherein when the sensor signal changes at (S0+m×ΔS) and m=1, the calculating of the position includes calculating the position SA by using the following Equation 1, SA =( S 0+4 S/ 2)−Δ S ×(2 n− 1)/2 A. Equation 1: 5. A non-transitory computer-readable medium having a computer program for calculating a position of an actuator stored thereon and readable by a computer, the actuator comprising: a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM; and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, the computer program, when executed by the computer, causes the computer to perform operations comprising: generating the control signal for a driving power source to drive the movement mechanism each minimum movement amount ΔM; acquiring the control signal for each ΔM and a sensor signal generated by the movement amount detection sensor having the minimum resolution ΔS; calculating a position SA of the movement mechanism at a target position from: a value of (S0+m×ΔS) or (S0−m×ΔS); a number n of generated control signals from a control signal M0 to a control signal at a time point T1 or to a control signal generated right before T1; and a value of A=ΔS/ΔM, where the time point at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS) is denoted by T1, m is a natural number of 1 or more and 1≦n≦m×A, and the control signal at the target position of the movement mechanism is denoted by M0 and the sensor signal is denoted by S0; and controlling movement of the movement mechanism based on the calculated position SA. 6. The non-transitory computer-readable medium according to claim 5 , wherein when the sensor signal changes at (S0+m×ΔS) and m=1, the calculating of the position comprises calculating the position SA by using the following Equation 1, SA =( S 0+Δ S/ 2)−Δ S ×(2 n− 1)/2 A. Equation 1:
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