Actuator position calculation device, actuator position calculation method, and actuator position calculation program

US9766267B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9766267-B2
Application numberUS-201414221462-A
CountryUS
Kind codeB2
Filing dateMar 21, 2014
Priority dateMar 28, 2013
Publication dateSep 19, 2017
Grant dateSep 19, 2017

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Abstract

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A device for calculating a position of an actuator, the actuator including a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, and the device includes a position calculation unit configured to calculating a position SA of the movement mechanism at a target position from the control signal at a time point T1, at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS), where m is a natural number of 1 or more, the control signal at the target position of the movement mechanism is denoted by M0, and the sensor signal is denoted by S0.

First claim

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What is claimed is: 1. A device for calculating a position of an actuator, the actuator comprising: a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM; and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, the device comprising: a processor; and a memory storing instructions, the instructions, when executed by the processor, causing the device to perform: generating the control signal for a driving power source to drive the movement mechanism each minimum movement amount ΔM; acquiring the control signal for each ΔM and a sensor signal generated by the movement amount detection sensor having the minimum resolution ΔS; calculating a position SA of the movement mechanism at a target position from: a value of (S0+m×ΔS) or (S0−m×ΔS); a number n of generated control signals from a control signal M0 to a control signal at a time point T1 or to a control signal generated right before T1; and a value of A=ΔS/ΔM, where the time point at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS) is denoted by T1, where m is a natural number of 1 or more and 1≦n≦m×A, and the control signal at the target position of the movement mechanism is denoted by M0 and the sensor signal is denoted by S0; and controlling movement of the movement mechanism based on the calculated position SA. 2. The device according to claim 1 , wherein, when the sensor signal changes at (S0+m×ΔS) and m=1, the calculating of the position comprises calculating the position SA by using the following Equation 1, SA =( S 0+4 S/ 2)−Δ S ×(2 n− 1)/2 A.   Equation 1: 3. A method of calculating a position of an actuator, the actuator comprising: a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM; and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, the method comprising: generating the control signal for a driving power source to drive the movement mechanism each minimum movement amount ΔM; acquiring the control signal for each ΔM and also acquiring a sensor signal generated by the movement amount detection sensor having the minimum resolution ΔS; calculating a position SA of the movement mechanism at a target position from: a value of (S0+m×ΔS) or (S0−m×ΔS); a number n of generated control signals from a control signal M0 to a control signal at a time point T1 or to a control signal generated right before T1; and a value of A=ΔS/ΔM, where the time point at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS) is denoted by T1, m is a natural number of 1 or more and 1≦n≦m×A, and the control signal at the target position of the movement mechanism is denoted by M0 and the sensor signal is denoted by S0; and controlling movement of the movement mechanism based on the calculated position SA. 4. The method according to claim 3 , wherein when the sensor signal changes at (S0+m×ΔS) and m=1, the calculating of the position includes calculating the position SA by using the following Equation 1, SA =( S 0+4 S/ 2)−Δ S ×(2 n− 1)/2 A.   Equation 1: 5. A non-transitory computer-readable medium having a computer program for calculating a position of an actuator stored thereon and readable by a computer, the actuator comprising: a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM; and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, the computer program, when executed by the computer, causes the computer to perform operations comprising: generating the control signal for a driving power source to drive the movement mechanism each minimum movement amount ΔM; acquiring the control signal for each ΔM and a sensor signal generated by the movement amount detection sensor having the minimum resolution ΔS; calculating a position SA of the movement mechanism at a target position from: a value of (S0+m×ΔS) or (S0−m×ΔS); a number n of generated control signals from a control signal M0 to a control signal at a time point T1 or to a control signal generated right before T1; and a value of A=ΔS/ΔM, where the time point at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS) is denoted by T1, m is a natural number of 1 or more and 1≦n≦m×A, and the control signal at the target position of the movement mechanism is denoted by M0 and the sensor signal is denoted by S0; and controlling movement of the movement mechanism based on the calculated position SA. 6. The non-transitory computer-readable medium according to claim 5 , wherein when the sensor signal changes at (S0+m×ΔS) and m=1, the calculating of the position comprises calculating the position SA by using the following Equation 1, SA =( S 0+Δ S/ 2)−Δ S ×(2 n− 1)/2 A.   Equation 1:

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Classifications

  • G01Q20/02Primary

    by optical means · CPC title

  • Methods or apparatus for measurement or analysis of nanostructures · CPC title

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What does patent US9766267B2 cover?
A device for calculating a position of an actuator, the actuator including a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, and the device includes a position c…
Who is the assignee on this patent?
Hitachi High-Tech Science Corp
What technology area does this patent fall under?
Primary CPC classification G01Q20/02. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Sep 19 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).