In-situ temperature control during chemical mechanical polishing with a condensed gas
US-2017232572-A1 · Aug 17, 2017 · US
US9757840B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9757840-B2 |
| Application number | US-201614991525-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 8, 2016 |
| Priority date | Jan 13, 2015 |
| Publication date | Sep 12, 2017 |
| Grant date | Sep 12, 2017 |
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Method for compensating temperature-induced deviations in a grinding machine includes controlling the movements of the dressing tool relative to the grinding tool in order to relatively move the dressing tool towards the grinding tool; checking whether a first-cut detection signalizes a contact of the grinding tool and the dressing tool; repeating the controlling and checking steps until a contact between the grinding tool and the dressing tool is detected, and when the contact is detected, then (i) recording the Current Position, and (ii) carrying out a compensation calculation using the Current Position and a reference position.
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What is claimed is: 1. A method comprising: compensating temperature-induced deviations in a grinding machine comprising a tool spindle with a grinding tool which can be driven so as to rotate, a dresser with a dressing tool which can be driven so as to rotate, a control configured to control movements of the dressing tool relative to the grinding tool, and a first-cut detection module configured to signal a contact of the grinding tool with another part of the grinding machine, the compensating step comprising: a. controlling movements of the dressing tool relative to the grinding tool so as to move the dressing tool towards the grinding tool, b. checking whether the first-cut detection module signals a contact of the grinding tool with the dressing tool, c. repeating the controlling and checking steps until a contact between the grinding tool and the dressing tool is signaled, and d. when a contact between the grinding tool and the dressing tool is signaled, then (i) recording a current position of the grinding tool relative to the dressing tool, and (ii) performing a compensation calculation based on the current position and a reference position. 2. The method according to claim 1 , further comprising the first-cut detection module monitoring an electric current or voltage of one or more of a drive of the grinding tool or a drive of the dressing tool, and signaling a contact between the dressing tool and the grinding tool when the first cut detection detects a change of the electric current or voltage resulting from an increased power intake of one or more of the drive of the grinding tool or the drive of the dressing tool. 3. The method according to claim 1 , further comprising the first-cut detection module monitoring an output signal of a vibration sensor and signaling a contact between the dressing tool and the grinding tool when a monitored vibration exceeds a threshold value. 4. The method according to claim 1 , further comprising the first-cut detection module monitoring an output signal of an acoustic sensor and signaling a contact between the dressing tool and the grinding tool when a monitored sound intensity exceeds a threshold value. 5. The method according to claim 1 , including performing the controlling and checking steps after one or more of: the grinding machine is not used in production for a pre-defined period of time, the grinding machine is reconfigured, or an environment sensor signals an environment change. 6. The method according to claim 5 , wherein the environment sensor comprises a temperature sensor. 7. The method according to claim 1 , including performing the controlling and checking steps prior to carrying out a dressing process. 8. The method according to claim 1 , wherein the step of performing a compensation calculation further comprises automatically increasing a distance between the dressing tool and the grinding tool in order to adjust a relative distance between the grinding tool and the dressing tool after the grinding tool contacts the dressing tool. 9. The method according to claim 8 , wherein an absolute value of the relative distance between the grinding tool and the dressing tool is pre-defined. 10. A grinding machine comprising: a tool spindle with a grinding tool which can be driven so as to rotate, a dresser with a dressing tool which can be driven so as to rotate, a control configured to control movements of the dressing tool relative to the grinding tool, and a first-cut detection module configured to signal a contact of the grinding tool with another part of the grinding machine, wherein the grinding machine is adapted and programmed to perform the following steps: a. controlling movements of the dressing tool relative to the grinding tool so as to move the dressing tool towards the grinding tool, b. checking whether the first-cut detection module signals a contact of the grinding tool with the dressing tool, c. repeating the controlling and checking steps until a contact between the grinding tool and the dressing tool is signaled, and d. when a contact between the grinding tool and the dressing tool is signaled, then (i) recording a current position of the grinding tool relative to the dressing tool in a memory of the grinding machine, and (ii) performing a compensation calculation based on the current position and a reference position. 11. The grinding machine of claim 10 , further comprising means for triggering the controlling and checking steps after one or more of: the grinding machine is not used in production for a pre-defined period of time, the grinding machine is reconfigured, or an environment sensor signals an environment change. 12. The grinding machine of claim 11 , wherein the triggering means includes one or more of a CNC-control or the first-cut detection module. 13. The grinding machine of claim 11 , wherein the environment sensor comprises a temperature sensor.
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