Thermally decomposable polymer compositions for forming microelectronic assemblies
US-9505948-B2 · Nov 29, 2016 · US
US9757818B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9757818-B2 |
| Application number | US-201615298824-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 20, 2016 |
| Priority date | Dec 17, 2012 |
| Publication date | Sep 12, 2017 |
| Grant date | Sep 12, 2017 |
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A thermally decomposable polymer composition comprising a polyester of a dicarboxylic acid and a tertiary cyclohexanediols of Formulae V and VI are disclosed, which are useful in the forming of microelectronic assemblies: a representative example of a dicarboxylic acid is an oxalic acid and representative example of thermally decomposable polyester is the polyester of the formula: wherein m is at least about 100.
Opening claim text (preview).
The invention claimed is: 1. A sacrificial polymer composition comprising: a thermally decomposable polymer comprising repeating units derived from an ester of a dicarboxylic acid selected from the group consisting of oxalic acid, malonic acid, succinic acid, glutaric acid and adipic acid and a difunctional tertiary alcohol selected from the group consisting of a compound of formula V and a compound of formula VI: a thermally activated base generator, said thermally activated base generator comprising a cation selected from formula 1, 2, or 3: where each R e is independently selected from hydrogen, a methyl or ethyl group, a linear, branched or cyclic C 3 -C 12 alkyl group; a linear, branched or cyclic C 3 -C 12 heteroalkyl group having from 1 to 4 heteroatoms independently selected from nitrogen, oxygen or sulfur; a C 6 -C 10 aryl group; a C 5 -C 10 heteroaryl group having from 1 to 4 heteroatoms independently selected from nitrogen, oxygen or sulfur; or where two R 1 groups are taken together with any intervening atoms to form one or more cyclic alkyl or heteroalkyl groups as previously defined, and where for formula 1, at least one R 1 is hydrogen; and a carrier solvent selected from acetophenone, α-angelicalactone, γ-butyrolactone, n-butyl acetate, diethylene glycol dimethyl ether, ethyl 3-ethoxypropionate, ethyl lactate, 2-heptanone, methyl isobutyl ketone, γ-octanoic lactone and combinations thereof. 2. The composition according to claim 1 , wherein said difunctional tertiary alcohol is: 3. The composition according to claim 1 , wherein said difunctional tertiary alcohol is: 4. The composition according to claim 1 , wherein said polymer is of the formula: wherein m is at least about 100. 5. The composition of claim 1 , which comprises one or more additives of the formula 1, 2 or 3 selected from tetrabutylammonium acetate (Bu 4 N OAc), tetraethylammonium tosylate (Et 4 N OTs), pyridinium triflate (PyH OTf) or a compound of the formula:
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