Apparatus for flipping semiconductor device for transferring the semiconductor device between substrates

Patent metadata

Field	Value
Publication number	US-9754808-B2
Application number	US-201514960819-A
Country	US
Kind code	B2
Filing date	Dec 7, 2015
Priority date	Jan 10, 2013
Publication date	Sep 5, 2017
Grant date	Sep 5, 2017

Abstract

A method for automatically transferring multiple semiconductor devices from a first substrate to a second substrate comprises steps of providing a first substrate on which the semiconductor device is formed, providing a second substrate directly under the first substrate, automatically moving the first substrate toward the second substrate such that the semiconductor devices are close to the second substrate; connecting the semiconductor devices to the second substrate by exerting force to the second substrate, and taking out the semiconductor devices simultaneously from the first substrate.

First claim

What is claimed is:

1. A method for transferring a plurality of semiconductor devices from a first substrate to a second substrate, the method comprising steps of:
providing the first substrate on which the plurality of semiconductor devices are fixed, wherein the first substrate is an adhesive film applied to a ring and the plurality of semiconductor devices are provided within the ring by directly connecting their bottom surfaces to the adhesive film;
providing a positioning unit having a circular opening;
fixing the ring in the circular opening of the positioning unit such that top surfaces of the plurality of semiconductor devices face downwardly;
providing the second substrate directly under the first substrate;
moving the first substrate toward the second substrate by setting the positioning unit to a predetermined position such that the plurality of semiconductor devices are close to the second substrate;
moving a movable heater above the adhesive film and turning on the movable heater to heat the adhesive film;
connecting the top surfaces of the plurality of semiconductor devices to the second substrate by exerting force on the first substrate, wherein exerting force on the first substrate is carried out by a first device in accordance with an instruction from a programmable controller; and
after the connecting step, taking out the plurality of semiconductor devices simultaneously from the first substrate.

2. The method according to claim 1 , further comprising a step of providing a fixture and fixing the second substrate on the fixture.

3. The method according to claim 2 , wherein a distance between the fixture and the first substrate is less than or equal to 0.2 cm before the connecting step.

4. The method according to claim 1 , further comprising a step of heating the second substrate before the step of connecting step.

5. The method according to claim 1 , further comprising a step of decreasing a stickiness between the semiconductor devices and a first surface of the first substrate.

6. The method according to claim 5 , further comprising a step of thermal treating the first substrate for decreasing the stickiness between the semiconductor devices and the first surface.

7. The method according to claim 1 , further comprising a step of providing the positioning unit for moving the first substrate from a the starting position to the predetermined position for making the semiconductor devices close to the second substrate.

8. The method according to claim 7 , further comprising a step of fixing the first substrate on the positioning unit by the ring in the step of providing the positioning unit for moving the first substrate.

9. The method according to claim 8 , wherein the step of fixing the first substrate on the positioning unit further comprises attaching the first substrate to the ring and fixing the ring on the positioning unit.

10. The method according to claim 1 , wherein the first device comprises a roller.

Assignees

• Epistar Corp

Inventors

• Wei Chih-Wei
• Hsu Chia-Liang

Classifications

• H10P72/0434

  mainly by convection · CPC title

• H10P72/50 Primary

  for positioning, orientation or alignment · CPC title

• B29C48/9135

  of flat articles, e.g. using specially adapted supporting means · CPC title

• B29C35/10

  for articles of indefinite length · CPC title

• B29C48/91

  Heating, e.g. for cross linking · CPC title