Semiconductor device for simultaneous operation at two temperature ranges

Patent metadata

Field	Value
Publication number	US-9748241-B2
Application number	US-201514632013-A
Country	US
Kind code	B2
Filing date	Feb 26, 2015
Priority date	Feb 26, 2015
Publication date	Aug 29, 2017
Grant date	Aug 29, 2017

Abstract

A semiconductor device for simultaneous operation at two temperature ranges includes a substrate, a first transistor, and a second transistor. The substrate has a first active region and a second active region. The first transistor includes a plurality of gate stacks disposed in the first active region. The second transistor includes a plurality of gate stacks disposed in the second active region. A ratio of the number of the gate stacks of the second transistor to an area size of the second active region is less than a ratio of the number of the gate stacks of the first transistor to an area size of the first active region.

First claim

What is claimed is:

1. A semiconductor device for simultaneous operation at two temperature ranges, the semiconductor device comprising:
a substrate having a first active region and a second active region;
a first transistor including a plurality of gate stacks disposed in the first active region; and
a second transistor including a plurality of gate stacks disposed in the second active region, wherein a ratio of the number of the gate stacks of the second transistor to an area size of the second active region is less than a ratio of the number of the gate stacks of the first transistor to an area size of the first active region;
wherein the number of the gate stacks of the second transistor is less than the number of the gate stacks of the first transistor.

2. The semiconductor device of claim 1 , wherein the gate stacks of the second transistor have a pitch substantially equal to a pitch of the gate stacks of the first transistor.

3. The semiconductor device of claim 1 , wherein the gate stacks of the second transistor have a pitch greater than a pitch of the gate stacks of the first transistor.

4. The semiconductor device of claim 1 , wherein the area size of the second active region is larger than the area size of the first active region.

5. The semiconductor device of claim 1 , wherein the first and second transistors have different conductivity types.

6. The semiconductor device of claim 5 , wherein the number of first semiconductor devices disposed proximate to the first transistor and distal from the second transistor is greater than the number of second semiconductor devices disposed proximate to the second transistor and distal from the first transistor.

7. The semiconductor device of claim 1 , wherein at least one of the first and second transistors is one of a fin field-effect transistor (FinFET), a vertical gate-all-around FET (VGAA FET), and a planar FET.

8. The semiconductor device of claim 1 , wherein the number of the gate stacks of the second transistor is equal to the number of the gate stacks of the first transistor.

9. The semiconductor device of claim 1 , wherein i heat sinks are disposed above the first transistor, and j heat sinks are disposed above the second transistor, and i>j and j≧0.

10. The semiconductor device of claim 1 , further comprising:
a third active region of the substrate that is adjacent the first active region; and
a fourth active region of the substrate that is adjacent the fourth active region;
wherein a distance between the first and third active regions is greater than a distance between the second and fourth active regions.

11. A semiconductor device for simultaneous operation at two temperature ranges, the semiconductor device comprising:
a substrate having a first active region and a second active region, wherein the second active region has an area size greater than an area size of the first active region;
a first transistor including a plurality of gate stacks disposed in the first active region; and
a second transistor including a plurality of gate stacks disposed in the second active region, wherein the number of the gate stacks of the second transistor is less than the number of the gate stacks of the first transistor.

12. The semiconductor device of claim 11 , wherein the gate stacks of the second transistor have a pitch substantially equal to a pitch of the gate stacks of the first transistor.

13. The semiconductor device of claim 11 , wherein the gate stacks of the second transistor have a pitch greater than a pitch of the gate stacks of the first transistor.

14. The semiconductor device of claim 11 , wherein the first and second transistors have different conductivity types.

15. The semiconductor device of claim 14 , wherein the number of first semiconductor devices disposed proximate to the first transistor and distal from the second transistor is greater than the number of second semiconductor devices disposed proximate to the second transistor and distal from the first transistor.

16. The semiconductor device of claim 15 , wherein the first and second transistors have different conductivity types.

17. The semiconductor device of claim 15 , wherein at least one of the first and second transistors is one of a FinFET, a VGAA FET, and a planar FET.

18. The semiconductor device of claim 11 , wherein at least one of the first and second transistors is one of a FinFET, a VGAA FET, and a planar FET.

19. The semiconductor device of claim 11 , wherein i heat sinks are disposed above the first transistor, and j heat sinks are disposed above the second transistor, and i>j and j≧0.

20. The semiconductor device of claim 11 , further comprising:
a third active region of the substrate that is adjacent the first active region; and
a fourth active region of the substrate that is adjacent the fourth active region;
wherein a distance between the first and third active regions is greater than a distance between the second and fourth active regions.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Sheen Ruey-Bin
• Li Chao-Chieh
• Hsu Ying-Yu

Classifications

• H10W40/228

  the projecting parts being wire-shaped or pin-shaped · CPC title

• H10W40/22

  characterised by their shape, e.g. having conical or cylindrical projections · CPC title

• H03K3/0315

  Ring oscillators · CPC title

• H01L27/092

  Electricity · mapped topic

• H01L27/0207

  Electricity · mapped topic