Tandem source activation for CVD of films

Patent metadata

Field	Value
Publication number	US-9738972-B2
Application number	US-201514837612-A
Country	US
Kind code	B2
Filing date	Aug 27, 2015
Priority date	Oct 22, 2013
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

A method for processing a substrate in a substrate processing system includes flowing reactant gases into a process chamber including a substrate, supplying a first power level sufficient to promote rearrangement of molecules on a surface of the substrate, waiting a first predetermined period, and, after the first predetermined period, performing plasma-enhanced, pulsed chemical vapor deposition of film on the substrate by supplying one or more precursors while supplying a second power level for a second predetermined period. The second power level is greater than the first power level. The method further includes removing reactants from the process chamber.

First claim

What is claimed is:

1. A method for processing a substrate in a substrate processing system, comprising:
a) flowing reactant gases into a process chamber including a substrate;
b) supplying, to the process chamber, a first power level sufficient to promote rearrangement of molecules adsorbed from the reactant gases onto a surface of the substrate, wherein the first power level is supplied in a first predetermined period where (i) the reactant gases are flowing into the process chamber and (ii) a second power level is not supplied to the process chamber;
c) waiting a second predetermined period subsequent to flowing the reactant gases and supplying the first power level and prior to supplying the second power level to the process chamber;
d) after the second predetermined period, performing plasma-enhanced, pulsed chemical vapor deposition of film on the substrate by supplying one or more precursors while supplying the second power level to the process chamber for a third predetermined period, wherein performing the pulsed chemical vapor deposition includes providing a pulse train including a sequence of pulses supplying the one or more precursors while the second power level is continuously supplied, and wherein the second power level is greater than the first power level; and
e) removing reactants from the process chamber,
wherein the first power level is supplied from (b) to (e).

2. The method of claim 1 , wherein (b) is performed using at least one of an ultraviolet source, an inductively coupled plasma source, a capacitively coupled plasma source and a remote plasma source, and wherein (d) is performed using at least one of the inductively coupled plasma source, the capacitively coupled plasma source and the remote plasma source.

3. The method of claim 1 , wherein the removal in (e) comprises at least one of purging and evacuating the process chamber.

4. The method of claim 1 , wherein (c) to (e) are repeated to perform a cyclical deposition process.

5. The method of claim 2 , wherein the first power level is supplied by the inductively coupled plasma source and the second power level is supplied by the capacitively coupled plasma source.

6. The method of claim 1 , wherein the first power level permits low energy activation on a surface of the substrate.

7. The method of claim 1 , wherein the second power level is above a predetermined threshold, wherein the predetermined threshold corresponds to a threshold energy of activation.

Assignees

• Lam Res Corp

Inventors

• Lavoie Adrien
• Kang Hu
• Leeser Karl

Classifications

• C23C16/45536 Primary

  Use of plasma, radiation or electromagnetic fields · CPC title

• C23C16/507

  using external electrodes, e.g. in tunnel type reactors · CPC title

• C23C16/509

  using internal electrodes · CPC title

• C23C16/45538

  Plasma being used continuously during the ALD cycle · CPC title

• C23C16/401

  containing silicon · CPC title