One-dimensional titanium nanostructure and method for fabricating the same

Patent metadata

Field	Value
Publication number	US-9725825-B2
Application number	US-201715412805-A
Country	US
Kind code	B2
Filing date	Jan 23, 2017
Priority date	Jan 4, 2013
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

A one-dimensional titanium nanostructure and a method for fabricating the same are provided. A titanium metal reacts with titanium tetrachloride to form the one-dimensional titanium nanostructure on a heat-resistant substrate in a CVD method and under a reaction condition of a reaction temperature of 300-900° C., a deposition temperature of 200-850° C., a flow rate of the carrier gas of 0.1-50 sccm and a reaction time of 5-60 hours. The titanium nanostructure includes titanium nanowires, titanium nanobelts, flower-shaped titanium nanowires, titanium nanorods, titanium nanotubes, and titanium-titanium dioxide core-shell structures. The titanium nanostructure can be densely and uniformly grown on the heat-resistant substrate. The present invention neither uses a template nor uses the complicated photolithographic process, solution preparation process, and mixing-coating process. Therefore, the process scale-up, cost down, and the simplified production process are achieved.

First claim

What is claimed is:

1. A method for fabricating a one-dimensional titanium nanostructure, comprising steps:
placing a heat-resistant substrate and a titanium metal in a CVD (Chemical Vapor Deposition) reaction chamber; and
using a carrier gas to transport titanium tetrachloride into said CVD reaction chamber, undertaking a reaction of said titanium metal and said titanium tetrachloride to generate titanium subchloride, and letting said titanium subchloride thermolyze to form a one-dimensional titanium nanostructure on said heat-resistant substrate, under a reaction condition of a reaction temperature of 500-900° C., a deposition temperature of 500-850° C., a flow rate of a carrier gas of 0.1-10 sccm and a reaction time of 8-30 hours,
wherein said heat-resistant substrate is made of graphite, and said carrier gas is nitrogen, and wherein said one-dimensional titanium nanostructure is a titanium nanowire having a diameter of 20-50 nm and a length of 2-50 μm, and wherein said titanium nanowire is a monocrystalline titanium nanowire or a polycrystalline titanium nanowire.

2. The method for fabricating a one-dimensional titanium nanostructure according to claim 1 , wherein said one-dimensional titanium nanostructure deposits on said heat-resistant substrate at a deposition temperature of 800-850° C.

3. The method for fabricating a one-dimensional titanium nanostructure according to claim 1 , wherein said monocrystalline titanium nanowire has an FCC lattice structure.

Assignees

• Univ Nat Chiao Tung

Inventors

• Chen Tze-Lung
• Chiu Hsin-Tien
• Lee Chi-Young

Classifications

• B22F1/0547

  Nanofibres or nanotubes · CPC title

• C23C16/46

  characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence) · CPC title

• C30B29/602

  Nanotubes · CPC title

• C23C16/08

  from metal halides · CPC title

• C30B29/60

  characterised by shape · CPC title