Method of manufacturing graphene substrate, and graphene substrate
US-8980217-B2 · Mar 17, 2015 · US
US9206509B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9206509-B2 |
| Application number | US-200913124413-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 16, 2009 |
| Priority date | Oct 17, 2008 |
| Publication date | Dec 8, 2015 |
| Grant date | Dec 8, 2015 |
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The invention includes a controlled graphene film growth process including the production on the surface of a substrate of a layer of a metal having with carbon a phase diagram such that, above a molar concentration threshold ratio C M /C M +C C , where C M is the molar metal concentration in a metal/carbon mixture and C C is the molar carbon concentration in the mixture, a homogeneous solid solution is obtained. The metal layer is exposed to a controlled flux of carbon atoms or carbon-containing radicals or carbon-containing ions at a temperature such that the molar concentration ratio obtained is greater than the threshold ratio to obtain a solid solution of carbon in the metal. The process further includes an operation for modifying the phase of the mixture into two phases, a metal phase and a graphite phase, leading to the formation of at least a lower graphene film at the metal layer incorporating carbon atoms-substrate interface and an upper graphene film at the surface of the metal layer.
Opening claim text (preview).
The invention claimed is: 1. A controlled graphene film growth process comprising: depositing a layer of metal on a surface of a substrate, wherein the metal of the metal layer is selected in response to the solubility of carbon in the metal; exposing the layer of metal to a controlled flux of carbon atoms or carbon-containing radicals or carbon-containing ions at a first temperature disposed along a phase diagram of the metal in order to raise the concentration of carbon in t…
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
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