Cover for component of polishing apparatus, component of polishing apparatus, and polishing apparatus

Patent metadata

Field	Value
Publication number	US-9724798-B2
Application number	US-201514787424-A
Country	US
Kind code	B2
Filing date	Mar 27, 2015
Priority date	Mar 31, 2014
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

There is provided a cover to which a polishing liquid is less likely to stick and solidify. The cover for a component of a polishing apparatus for polishing substrates is provided with a locking mechanism disposed inside the cover and configured to latch together a main body of the component and the cover. An external surface of the cover exposed to the outside has no recessed portion, and has no horizontal plane, except on the top portion of the cover.

First claim

The invention claimed is:

1. A cover for a component of a polishing apparatus for polishing substrates, the cover comprising a locking mechanism disposed inside the cover and configured to latch together a main body of the component and the cover,
wherein an external surface of the cover exposed to the outside has no recessed portion, and has no horizontal plane, except on a top portion of the cover.

2. The cover according to claim 1 , wherein the locking mechanism comprises a ball catch mechanism or a magnet.

3. The cover according to claim 1 , wherein the external surface of the cover exposed to the outside has water repellency.

4. The cover according to claim 1 , wherein the thickness of the cover in an abutment portion thereof between an outer edge of the main body of the component and an outer edge of the cover is smaller than the thicknesses of the cover in portions thereof other than the abutment portion.

5. A component of a polishing apparatus, comprising:
a main body of the component; and
the cover according to claim 1 .

6. The component according to claim 5 , wherein a protruding part projecting toward an inner side of the cover is formed in an internal surface of the cover over the entire range of the cover along the horizontal direction thereof, and
the component comprises a foamable sealing member disposed between the main body of the component and the protruding part.

7. The component according to claim 5 , comprising an auxiliary cover disposed on the cover and configured to cover a partial area of the cover,
wherein the cover includes, in an area to be covered with the auxiliary cover, a horizontal plane in which a bolt-hole used to fix together the cover and the main body of the component is formed.

8. A polishing apparatus comprising the component according to claim 5 .

Assignees

• Ebara Corp

Inventors

• Shinkai Kenji
• Sone Tadakazu
• Aizawa Hideo
• Aono Hiroshi

Classifications

• B24B53/017

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B37/34 Primary

  Accessories · CPC title

• B23Q11/08

  Protective coverings for parts of machine tools; Splash guards · CPC title

• B24B55/06

  Dust extraction equipment on grinding or polishing machines (B24B31/12 takes precedence) · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title