Multicathode deposition system and methods
US-12051576-B2 · Jul 30, 2024 · US
US9105849B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105849-B2 |
| Application number | US-201414295983-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 4, 2014 |
| Priority date | Jan 28, 2010 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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A deposition mask assembly having a plurality of deposition masks consecutively arranged in parallel is discussed. The deposition mask has a frame coupled with the plurality of deposition masks, wherein cross section of one end of each deposition mask having first and second sectors which are asymmetric and meet each other at a first contact point, wherein the first sector has a first radius and a first center angle, and connected to an upper surface of the deposition mask, the second sector has a second radius different from the first radius and a second center angle different from the first center angle, and connected to a lower surface of the deposition mask, and the contact point is asymmetric, pointed and protruded horn-shaped or arrow-shaped.
Opening claim text (preview).
What is claimed is: 1. A mask assembly comprising: a plurality of deposition masks consecutively arranged in parallel; and a frame coupled with the plurality of deposition masks, wherein the plurality of deposition masks include a first deposition mask and a second deposition mask being adjacent to the first deposition mask, one end of the first deposition mask and one end of the second deposition mask facing the one end of the first deposition mask are formed in an asymmetr…
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