Memory cells having a number of conductive diffusion barrier materials and manufacturing methods

US9711717B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9711717-B2
Application numberUS-201514824128-A
CountryUS
Kind codeB2
Filing dateAug 12, 2015
Priority dateJul 26, 2013
Publication dateJul 18, 2017
Grant dateJul 18, 2017

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  2. Abstract

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Abstract

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Memory cells having a select device material located between a first electrode and a second electrode, a memory element located between the second electrode and a third electrode, and a number of conductive diffusion barrier materials located between a first portion of the memory element and a second portion of the memory element. Memory cells having a select device comprising a select device material located between a first electrode and a second electrode, a memory element located between the second electrode and a third electrode, and a number of conductive diffusion barrier materials located between a first portion of the select device and a second portion of the select device. Manufacturing methods are also described.

First claim

Opening claim text (preview).

What is claimed is: 1. A method of forming a memory cell, the method comprising: forming a number of select device materials and a number of memory element materials between a first electrode and a second electrode; interleaving a number of conductive diffusion barrier materials with at least one of: the number of select device materials; and the number of memory element materials; and separating a first of the number of conductive diffusion barrier materials from a second of the number of conductive diffusion barrier materials by at least one of a second select device material and a second memory element material. 2. The method of claim 1 , wherein each of the number of conductive diffusion barrier materials have a thickness in a range from 1 angstrom to 50 angstroms. 3. The method of claim 1 , wherein the number of conductive diffusion barrier materials comprises carbon, carbon nitride, or a combination thereof. 4. The method of claim 1 , wherein interleaving the number of conductive diffusion barrier materials comprises interleaving the number of conductive diffusion barrier materials with the number of select device materials to form a select device. 5. The method of claim 4 , wherein the number of select device materials form an ovonic threshold switch. 6. The method of claim 1 , wherein interleaving the number of conductive diffusion barrier materials comprises interleaving the number of conductive diffusion barrier materials with the number of memory element materials to form a programmable memory device. 7. The method of claim 1 , wherein a first portion of the number of conductive diffusion barrier materials have a first thickness and a second portion of the number of conductive diffusion barrier materials have a second thickness that is different than the first thickness. 8. The method of claim 1 , wherein each the number of conductive diffusion barrier materials have a different thickness. 9. The method of claim 1 , wherein each the number of conductive diffusion barrier materials have a same thickness. 10. The method of claim 1 , wherein the number of memory elements comprises a chalcogenide material. 11. The method of claim 1 , wherein each of the number of conductive diffusion barrier materials is parallel to the first electrode and the second electrode.

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What does patent US9711717B2 cover?
Memory cells having a select device material located between a first electrode and a second electrode, a memory element located between the second electrode and a third electrode, and a number of conductive diffusion barrier materials located between a first portion of the memory element and a second portion of the memory element. Memory cells having a select device comprising a select device m…
Who is the assignee on this patent?
Micron Technology Inc
What technology area does this patent fall under?
Primary CPC classification H01L45/12. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Jul 18 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).