Thermal flow sensor, gas sensor comprising at least one such sensor and Pirani gauge comprising at least one such sensor

Patent metadata

Field	Value
Publication number	US-9709536-B2
Application number	US-201314429676-A
Country	US
Kind code	B2
Filing date	Sep 17, 2013
Priority date	Sep 19, 2012
Publication date	Jul 18, 2017
Grant date	Jul 18, 2017

Abstract

A thermal flow sensor comprising at least one first element ( 2 ) suspended with respect to a support, said first suspended element ( 2 ) being of an electrically conductive material, first means ( 6 ) for biasing said suspended element ( 2 ) and first means ( 8 ) for measuring the variation of the electric voltage at the terminals of the suspended element ( 2 ), said first suspended element ( 2 ) being formed by a nanowire and said first biasing means ( 6 ) are formed by an alternating current source the intensity of which provides heating of the first suspended element ( 2 ) by Joule effect.

First claim

The invention claimed is:

1. A thermal flow sensor comprising:
at least two elements suspended with respect to a support, said at least two suspended elements comprising n first suspended elements, n being a positive integer higher than 1, each first suspended element being of an electrically conductive material and each first suspended element comprising at least one nanowire, and m second suspended elements, m being a positive integer higher than 0, each second suspended element being of an electrically conductive material;
first means for biasing each first suspended element comprising an alternating current source an intensity of which provides heating of each first suspended element by Joule effect;
a first sensor for measuring variation amplitude of an electric voltage at terminals of each first suspended element;
second means for biasing each second suspended element, comprising an alternating current source of a frequency different from that of the first biasing means or by a direct current source; and
a second sensor for measuring variation amplitude of an electric voltage at terminals of each second suspended element, the variation amplitude of the electric voltage being based on a temperature variation of each second suspended element caused by the heating of each first suspended element.

2. The thermal flow sensor according to claim 1 , wherein each second element is formed by at least one nanowire, substantially parallel to the first suspended element and away from the first suspended element by a given distance, and wherein the second sensor enables a quantity of heat transferred from a first suspended element to a second suspended element to be deduced.

3. The thermal flow sensor according to claim 1 , wherein the n first suspended elements are provided substantially parallel to each other.

4. The thermal flow sensor according to claim 3 , wherein the first suspended element is surrounded with m second suspended elements and/or the second suspended element is surrounded between n first suspended elements.

5. The thermal flow sensor according to claim 1 , wherein the m second suspended elements are substantially parallel to each other.

6. The thermal flow sensor according to claim 5 , wherein the n first suspended elements are provided substantially parallel to each other and wherein the first means for biasing the n first suspended elements, respectively the second means for biasing the m second suspended elements are common.

7. The thermal flow sensor according to claim 6 , wherein the n first suspended elements and m second suspended elements are distributed in a plane or several parallel planes.

8. The thermal flow sensor according to claim 5 , wherein the first suspended element is surrounded with m second suspended elements and/or the second suspended element is surrounded between n first suspended elements.

9. The thermal flow sensor according to claim 5 , wherein the n first suspended elements are provided substantially parallel to each other and wherein the n first suspended elements and m second suspended elements are distributed in a plane or several parallel planes.

10. The thermal flow sensor according to claim 1 , comprising at least two thermal masses linked to the support, the thermal masses being provided on either side of the first suspended element.

11. The thermal flow sensor according to claim 10 , comprising n first suspended elements and n+1 thermal masses, n being higher than or equal to 2, said n+1 thermal masses being disposed such that each first element is surrounded by two masses.

12. The thermal flow sensor according to claim 1 , wherein the first or second suspended elements have respectively a width between 10 nm and 1 μm, a length between 1 μm and 100 μm, a thickness between 10 nm and 1 μm.

13. The thermal flow sensor according to claim 1 , wherein the n first suspended elements are provided substantially parallel to each other and wherein a distance separating two suspended elements is between 50 nm and 10 μm.

14. The thermal flow sensor according to claim 1 , wherein the n first suspended elements are provided substantially parallel to each other and wherein a distance separating two suspended elements is between 50 nm and 10 μm.

15. The thermal flow sensor according to claim 2 , wherein said thermal flow sensor comprising a first suspended element surrounded by m second suspended elements, is configured to be disposed in a channel, said suspended elements being disposed parallel to an axis of the channel so as to determine transverse heat exchanges in a gas inside the channel.

16. A system for determining the concentration of a gas environment comprising:
at least one thermal flow sensor according to claim 1 ; and
electronics for processing electric voltage values delivered by the thermal flow sensor.

17. A device for analysing a gas or gas mixture comprising:
a gas chromatography column; and
at least one system for determining the concentration according to claim 16 , said determining system being disposed in a channel connected to an output of the gas chromatography column.

18. A system for determining pressure in a gas environment comprising:
at least one thermal flow sensor according to claim 1 ; and
electronics for processing electric voltage values delivered by the thermal flow sensor.

Assignees

• Commissariat Energie Atomique
• Commissariat L Energie Atomique Et Aux Energies Alternatives

Inventors

• Ruellan Jeremie
• Duraffourg Laurent
• Arcamone Julien
• Andreucci Philippe
• Colinet Eric

Classifications

• G01K2211/00

  Thermometers based on nanotechnology · CPC title

• G01K17/00

  Measuring quantity of heat (measuring temperature by calorimetry G01K3/00 - G01K11/00; specially adapted for measuring thermal properties of materials, e.g. specific heat, heat of combustion G01N) · CPC title

• G01N30/66 Primary

  Thermal conductivity detectors · CPC title

• G01N2011/0093

  thermal properties · CPC title

• G01N27/18

  caused by changes in the thermal conductivity of a surrounding material to be tested (G01N27/20 takes precedence) · CPC title