Thermal flow sensor with vibrating element and gas sensor comprising at least one such sensor

Patent metadata

Field	Value
Publication number	US-9599495-B2
Application number	US-201314030205-A
Country	US
Kind code	B2
Filing date	Sep 18, 2013
Priority date	Sep 19, 2012
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

The invention relates to a thermal flow sensor comprising:
a support, at least one element intended to be vibrated relative to the support, suspension means for said vibrating element relative to the vibrating element, means for heating the vibrating element, means for electrostatic excitation of the vibrating element so as to vibrate it at its resonance frequency, piezoelectric gauges for detecting the resonance frequency variation of the vibrating element, the gauges forming means for heating the vibrating element by Joule effect and the suspension means comprising two beams formed by nanowires so as to reduce the heat losses from the vibrating element toward the support.

First claim

The invention claimed is:

1. A thermal flow sensor comprising:
a support,
at least one vibrating element capable of being vibrated relative to the support,
suspension and thermal insulation elements for insulating the at least one vibrating element relative to the support,
a heater for heating the at least one vibrating element,
an electric field excitation device which excites by an applied electric field the at least one vibrating element so as to vibrate the at least one vibrating element at a resonance frequency of the at least one vibrating element, and
a detector for detecting a resonance frequency variation of the at least one vibrating element caused by a temperature variation of the at least one vibrating element due to heat exchanges with a surrounding gas.

2. The thermal flow sensor according to claim 1 , wherein the suspension and thermal insulation elements comprise at least one beam extending primarily in one dimension.

3. The thermal flow sensor according to claim 1 , wherein the suspension and thermal insulation elements comprise at least two beams aligned on either side of the at least one vibrating element or inclined relative to one another and having a common link to the at least one vibrating element.

4. The thermal flow sensor according to claim 2 , wherein the at least one beam has a section comprised between 10×10 nm 2 and 250×250 nm 2 .

5. The thermal flow sensor according to claim 2 , wherein the at least one beam has a nonlinear shape.

6. The thermal flow sensor according to claim 2 , wherein the at least one beam is made from a thermally insulating material.

7. The thermal flow sensor according to claim 1 , wherein the suspension and thermal insulation elements comprise a zone for anchoring to the support, formed by a nanostructured material.

8. The thermal flow sensor according to claim 1 , wherein the heater heats the at least one vibrating element by Joule effect.

9. The thermal flow sensor according to claim 8 , wherein the heater is in direct contact with the at least one vibrating element.

10. The thermal flow sensor according to claim 9 , wherein the heater is formed by at least one electrically conducting element connected to a polarization source and the at least one vibrating element.

11. The thermal flow sensor according to claim 1 , wherein the detector is formed by at least one piezoresistive gauge mechanically connected to the at least one vibrating element.

12. The thermal flow sensor according to claim 11 , wherein the heater is formed by at least one electrically conducting element connected to a polarization source and the at least one vibrating element and wherein said at least one piezoresistive gauge forms a Joule effect heater.

13. The thermal flow sensor according to claim 1 , wherein the heater is situated separated from the at least one vibrating element, the heating being obtained by conduction through a gaseous environment between the heater and the at least one vibrating element.

14. The thermal flow sensor according to claim 13 , wherein the heater is formed by a suspended wire.

15. The thermal flow sensor according to claim 13 , comprising two vibrating elements positioned on either side of the heater so as to perform a differential measurement.

16. The thermal flow sensor according to claim 1 , wherein the at least one vibrating element has volume deformation modes won excitation.

17. The thermal flow sensor according to claim 1 , wherein the at least one vibrating element is at least one rotational vibrating element.

18. The thermal flow sensor according to claim 1 , wherein the detector comprises two piezoresistive gauges providing a differential measurement.

19. The thermal flow sensor according to claim 1 , wherein the detector is a capacitive detector.

20. The thermal flow sensor according to claim 1 , wherein the electric field excitation device comprises an electrostatic excitation device.

21. A thermal flow measuring system comprising a plurality of sensors according to claim 1 .

22. A system for determining the concentration of a gaseous environment comprising at least one thermal flow sensor according to claim 1 or a system according to claim 21 , and electronics for processing electrical voltage values delivered by the thermal flow sensor.

23. The determination system according to claim 22 , wherein the at least one thermal flow sensor is placed in an electronic oscillating and frequency- or phase-measuring loop.

24. A device for analyzing a gas or mixture of gases comprising a gas chromatography column and at least one system for determining the concentration according to claim 23 , said determination system being positioned in a channel connected to an outlet of the gas chromatography column.

25. A method for measuring thermal flow, comprising:
measuring in a single measurement a resonance frequency variation of at least one vibrating element caused by a temperature variation of the at least one vibrating element due to heat exchanges with a surrounding gas, the at least one vibrating element belonging to a thermal flow sensor which comprises:
a support of the at least one vibrating element which is capable of being vibrated relative to the support,
suspension and insulation elements for insulating the at least one vibrating element relative to the support,
a heater for heating the at least one vibrating element,
an electric field excitation device which excites by an applied electric field the at least one vibrating element so as to vibrate the at least one vibrating element at a resonance frequency thereof,
a detector for detecting the resonance frequency variation of the at least one vibrating element caused by a temperature variation of the at least one vibrating element due to the heat exchanges with the surrounding gas.

26. The thermal flow sensor according to claim 3 , wherein the at least two beams have a section comprised between 10×10 nm 2 and 250×250 nm 2 .

27. The thermal flow sensor according to claim 3 , wherein the at least two beams have a nonlinear shape, a serpentine shape, or a shape with at least one rectangle that is hollow between two segments.

28. The thermal flow sensor according to claim 3 , wherein the at least two beams are made from a thermally insulating material.

29. The thermal flow sensor according to claim 2 , wherein the at least one beam has a serpentine shape.

30. The thermal flow sensor according to claim 2 , wherein the at least one beam has a shape with at least one rectangle that is hollow between two segments.

Assignees

• Commissariat A L'Energie Atomique Et Aux Ene Alt
• Commissariat L Energie Atomique Et Aux Energies Alternatives

Inventors

• Duraffourg Laurent
• Andreucci Philippe
• Colinet Eric
• Jourdan Guillaume
• Arcamone Julien

Classifications

• G01N33/0027 Primary

  concerning the detector · CPC title

• G01N25/18

  by investigating thermal conductivity (by calorimetry G01N25/20; by measuring change of resistance of an electrically-heated body G01N27/18) · CPC title

• G01N30/66

  Thermal conductivity detectors · CPC title

• G01F1/662 Primary

  Constructional details · CPC title

• G01N29/022

  Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices (microdevices per se B81B) · CPC title