Nano- and micro-electromechanical resonators

Patent metadata

Field	Value
Publication number	US-9705469-B2
Application number	US-201615240356-A
Country	US
Kind code	B2
Filing date	Aug 18, 2016
Priority date	Apr 22, 2013
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

A resonator including a piezoelectric plate and an interdigital electrode is provided. A ratio between a thickness of the plate and a pitch of the interdigital electrode may be from about 0.5 to about 1.5. A radiation detector including a resonator and an absorber layer capable of absorbing at least one of infrared and terahertz radiation is provided. A resonator including a piezoelectric plate and a two-dimensional electrically conductive material is provided.

First claim

What is claimed is:

1. A radiation detector comprising:
a resonator comprising:
a piezoelectric plate, and
an interdigital electrode disposed on a first surface of the piezoelectric plate, and

an absorber layer disposed above a second surface of the piezoelectric plate opposing the first surface, wherein the absorber layer is capable of absorbing at least one of infrared and terahertz radiation.

2. The detector of claim 1 , wherein the detector is capable of room temperature operation.

3. The detector of claim 1 , wherein a contour-mode of vibration is excited in the piezoelectric plate in response to an alternating current (AC) applied through the electrode.

4. The detector of claim 1 , wherein the absorber layer comprises at least one of a single wall carbon nanotube forest, silicon nitride, graphene, and photonic meta-materials.

5. The detector of claim 1 , wherein a temperature coefficient of frequency of the resonator is less than about −30 ppm/K.

6. The detector of claim 1 , wherein the absorber layer contacts the second surface of the piezoelectric plate.

7. The detector of claim 1 , wherein the absorber layer and the second surface of the piezoelectric late are separated by an air gap.

8. The detector of claim 1 , further comprising a complementary metal-oxide-semiconductor circuit configured to provide an electronic readout of a resonance frequency of the resonator.

9. The detector of claim 1 , wherein the piezoelectric plate comprises at least one of aluminum nitride, lithium niobate, lithium tantalite, zinc oxide, gallium nitride and quartz.

Assignees

• Univ Northeastern

Inventors

• Rinaldi Matteo
• Qian Zhenyun
• Hui Yu

Classifications

• H03H2009/241

  Bulk-mode MEMS resonators · CPC title

• H03H9/15

  Constructional features of resonators consisting of piezoelectric or electrostrictive material (H03H9/25 takes precedence) · CPC title

• H01L41/18

  Electricity · mapped topic

• H03H9/02244 Primary

  of microelectro-mechanical resonators · CPC title

• H03H9/17

  having a single resonator (crystal tuning forks H03H9/21) · CPC title