Mems vibrator and mems oscillator
US-2020399120-A1 · Dec 24, 2020 · US
US2016308507A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016308507-A1 |
| Application number | US-201514686509-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 14, 2015 |
| Priority date | Apr 14, 2015 |
| Publication date | Oct 20, 2016 |
| Grant date | — |
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A mechanical resonator includes a spring-mass system, wherein the spring-mass system comprises a phase-change material. The mechanical resonator typically comprises an electrical circuit portion, coupled to the phase-change material to alter a phase configuration within the phase-change material. Methods of operation are also disclosed.
Opening claim text (preview).
What is claimed is: 1 . A mechanical resonator, comprising a spring-mass system, wherein the spring-mass system comprises a phase-change material. 2 . The mechanical resonator of claim 1 , wherein the mechanical resonator further comprises an electrical circuit portion, coupled to the phase-change material to alter a phase configuration within the phase-change material. 3 . The mechanical resonator of claim 2 , wherein the electrical circuit portion electrically connects to the phase-change material, such that the phase configuration of the phase-change material can be altered by Joule heating, by supplying electric current to the phase-change material. 4 . The mechanical resonator of claim 2 , wherein the electrical circuit portion comprises a heating element, arranged in thermal communication with the phase-change material, such that the phase configuration of the phase-change material can be altered by supplying electric current to the heating element, via the electric circuit portion, to heat the phase-change material. 5 . The mechanical resonator of claim 1 , wherein the spring-mass system comprises: a movable mass; and a spring part, the latter comprising the phase-change material, wherein the movable mass is connected to a fixed part of the resonator, via the spring part. 6 . The mechanical resonator of claim 1 , wherein the spring-mass system comprises: a spring-mass part which comprises the phase-change material, wherein the spring-mass part is connected to a fixed part of the resonator. 7 . The mechanical resonator of claim 1 , wherein the phase-change material comprises at least one of: Ge2Sb2Te5; GeTe; AgInSbTe; SnTe; and Sb. 8 . The mechanical resonator of claim 7 , wherein the phase-change material is such that a phase configuration thereof can be altered to change a resonance frequency of the spring-mass system by at least 10%. 9 . The mechanical resonator of claim 1 , wherein the spring-mass system comprises a composite beam, the latter comprising the phase-change material and another material. 10 . An apparatus, comprising: a mechanical resonator, in turn comprising a spring-mass system, wherein the spring-mass system comprises a phase-change material; and a laser, the latter configured in the apparatus for altering a phase configuration of the phase-change material of the mechanical resonator. 11 . An electronic device, comprising: a mechanical resonator, in turn comprising a spring-mass system, wherein the spring-mass system comprises a phase-change material; and means for altering a phase configuration of the phase-change material, said means for altering the phase configuration of the phase-change material comprising a power supply to supply electric energy to an electrical circuit portion coupled to the phase-change material to electrically alter the phase configuration of the phase-change material. 12 . The electronic device of claim 11 , wherein said device further comprises a fine-tuning mechanism, which can be operated distinctly from said means for altering the phase configuration of the phase-change material, for fine tuning a resonance frequency of the spring. 13 . The electronic device of claim 11 , wherein said device is a clock generator. 14 . The electronic device of claim 11 , wherein said device is an electronic filter. 15 . A method for tuning a resonance frequency of a spring-mass system of a mechanical resonator comprising a spring-mass system, wherein the spring-mass system comprises a phase-change material, the method comprising: altering a phase configuration of the phase-change material to tune the resonance frequency to a desired value. 16 . The method of claim 15 , wherein altering the phase configuration of the phase-change material comprises electrically altering the phase configuration of the phase-change material. 17 . The method of claim 16 , wherein the phase configuration of the phase-change material is electrically altered by Joule heating. 18 . The method of claim 16 , wherein the phase configuration of the phase-change material is electrically altered by electrically heating a heating element in thermal communication with the phase-change material. 19 . The method of claim 15 , wherein altering the phase configuration of the phase-change material is performed by applying one or more laser pulses to the phase-change material. 20 . The method of claim 15 , wherein altering the phase configuration of the phase-change material is performed so as to change the resonance frequency of the spring-mass system by at least 10%. 1 .- 14 . (canceled) 15 . A method for tuning a resonance frequency of a spring-mass system of a mechanical resonator comprising a spring-mass system, wherein the spring-mass system comprises a phase-change material, the method comprising: altering a phase configuration of the phase-change material to tune the resonance frequency to a desired value. 16 . The method of claim 15 , wherein altering the phase configuration of the phase-change material comprises electrically altering the phase configuration of the phase-change material. 17 . The method of claim 16 , wherein the phase configuration of the phase-change material is electrically altered by Joule heating. 18 . The method of claim 16 , wherein the phase configuration of the phase-change material is electrically altered by electrically heating a heating element in thermal communication with the phase-change material. 19 . The method of claim 15 , wherein altering the phase configuration of the phase-change material is performed by applying one or more laser pulses to the phase-change material. 20 . The method of claim 15 , wherein altering the phase configuration of the phase-change material is performed so as to change the resonance frequency of the spring-mass system by at least 10%.
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