Field-effect transistor

Patent metadata

Field	Value
Publication number	US-9698235-B2
Application number	US-201415031110-A
Country	US
Kind code	B2
Filing date	Aug 12, 2014
Priority date	Oct 22, 2013
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

The present invention provides a field-effect transistor having an accumulation-layer-operation type field-effect transistor that includes a semiconductor layer in which a source region, a channel region, and a drain region that have either an N-type or P-type conductivity in common are formed, and a gate electrode disposed adjacent to the channel region via a gate insulating film, wherein the gate insulating film is made of a dielectric having a change gradient of a relative dielectric constant in which the relative dielectric constant changes to decrease according to the magnitude of a gate voltage applied to the gate electrode.

First claim

The invention claimed is:

1. A field-effect transistor of an accumulation-layer-operation type, comprising:
a semiconductor layer in which a source region, a channel region, and a drain region that have either an N-type or P-type conductivity in common are formed; and
a gate electrode disposed adjacent to the channel region via a gate insulating film,
wherein the gate insulating film is made of a dielectric having a change gradient of a relative dielectric constant in which the relative dielectric constant changes to decrease according to a magnitude of a gate voltage applied to the gate electrode; and
wherein the dielectric has the change gradient of the relative dielectric constant in which when the gate voltage is modulated by 0.5 V, the relative dielectric constant becomes lower than or equal to a 0.5-times of the relative dielectric constant before modulation.

2. The field-effect transistor according to claim 1 ,
wherein when an origin is defined as an electric field intensity of 0 where the electric field intensity is an intensity of an electric field applied to the dielectric, the dielectric has a local maximum value of the relative dielectric constant in a range of the electric field intensity that does not overlap the origin.

3. The field-effect transistor according to claim 1 ,
wherein the dielectric is constituted by any one of: a superlattice structure formed by laminating layers of a metal oxide having a perovskite-type crystalline structure, a metal oxide having a fluorite-type crystalline structure, and a metal oxide having the perovskite-type crystalline structure of a different kind; a superlattice structure formed by laminating layers of metal oxides having the fluorite-type crystalline structure of different kinds; and a superlattice structure formed by laminating layers of a metal oxide having the perovskite-type crystalline structure and a metal oxide having the fluorite-type crystalline structure.

4. The field-effect transistor according to claim 1 ,
wherein the semiconductor layer has a thickness of from 6 nm through 10 nm.

5. The field-effect transistor according to claim 1 ,
wherein the channel region has an impurity concentration of from 4×10 18 /cm 3 through 7×10 18 cm 3 .

6. The field-effect transistor according to claim 1 , further comprising:
an interfacial layer disposed between the channel region and the gate insulating film.

7. The field-effect transistor according to claim 1 ,
wherein the semiconductor layer is made of a material which is any one of silicon, germanium, tin, a mixed crystal of silicon and germanium, a mixed crystal of germanium and tin, and a group III-V compound.

8. The field-effect transistor according to claim 1 ,
wherein the field-effect transistor has a transistor structure of any one of a bulk type, a SOI type, a fin type, and a nanowire-type.

Assignees

• Nat Inst Advanced Ind Science & Tech

Inventors

• Migita Shinji
• Ota Hiroyuki
• Fukuda Koichi

Classifications

• H10P14/69398

  the material having a perovskite structure, e.g. BaTiO3 · CPC title

• H10P14/6329

  using physical ablation of a target, e.g. physical vapour deposition or pulsed laser deposition · CPC title

• H01L29/161

  Electricity · mapped topic

• H01L29/78

  Electricity · mapped topic

• H01L29/513 Primary

  Electricity · mapped topic