Semiconductor structure with integrated passive structures

Patent metadata

Field	Value
Publication number	US-9698159-B2
Application number	US-201514864091-A
Country	US
Kind code	B2
Filing date	Sep 24, 2015
Priority date	Sep 26, 2012
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

A metal-oxide-semiconductor field-effect transistor (MOSFET) with integrated passive structures and methods of manufacturing the same is disclosed. The method includes forming a stacked structure in an active region and at least one shallow trench isolation (STI) structure adjacent to the stacked structure. The method further includes forming a semiconductor layer directly in contact with the at least one STI structure and the stacked structure. The method further includes patterning the semiconductor layer and the stacked structure to form an active device in the active region and a passive structure of the semiconductor layer directly on the at least one STI structure.

First claim

What is claimed:

1. A structure comprising:
an active device comprising:
a high-k dielectric material on a substrate;
a metal material on the high-k dielectric material; and
a semiconductor material over the metal material; and
a passive structure comprising semiconductor directly in contact with shallow trench isolation structures, adjacent to the active device; and
an insulating layer formed between and over the active device and passive structure,
wherein the active device is formed with a height greater than the passive structure, and the metal material is in direct contact with the high-k dielectric material and the high-k dielectric material is in direct contact with the substrate, the high-k dielectric material comprising only a single layer of a single material.

2. The structure of claim 1 , wherein the shallow trench isolation structure is on a lining material.

3. The structure of claim 1 , wherein the shallow trench isolation structure is formed on adjacent to the active device.

4. The structure of claim 3 , wherein the shallow trench isolation structure is formed below the passive device.

5. The structure of claim 1 , wherein ion implanting dopant impurities penetrate into a substrate to form wells in the substrate of the active device.

6. The structure of claim 1 , wherein the semiconductor layer is provided directly on the shallow trench isolation structures.

7. The structure of claim 1 , wherein the semiconductor material is recessed in the active region.

8. The structure of claim 1 , wherein the semiconductor material is protruding in the active region.

9. The structure of claim 1 , further comprising a liner on side surfaces of a stacked structure in the active region, comprising the high-k dielectric material, the metal material, and the semiconductor material.

10. The structure of claim 1 , wherein the metal material is a gate metal.

11. The structure of claim 1 , wherein the gate metal is one of TiN, TaN, Al, and W deposited to a thickness ranging from about 1 nm to about 200 nm.

12. The structure of claim 1 , wherein the metal material is in direct contact with the high-k dielectric material.

13. The structure of claim 12 , wherein the insulating layer contacts an upper surface of the active device.

14. The structure of claim 13 , wherein the insulating layer contacts an upper surface of the passive structure.

15. The structure of claim 14 , wherein the high-k dielectric material is provided on a silicon-on-insulator layer and the insulating layer includes stepped features on an uppermost surface of the insulating layer.

Assignees

• IBM

Inventors

• Chou Anthony I
• Kumar Arvind
• Mo Renee T
• Narasimha Shreesh

Classifications

• H10P95/90

  Thermal treatments, e.g. annealing or sintering · CPC title

• H10P95/064

  the removal being chemical etching · CPC title

• H10P95/062

  involving a dielectric removal step · CPC title

• H10P70/237

  the processing being a planarisation of insulating layers · CPC title

• H10P50/694

  characterised by their behaviour during the process, e.g. soluble masks or redeposited masks · CPC title