Hydrophobization treatment apparatus, hydrophobization treatment method, and hydrophobization treatment recording medium

Patent metadata

Field	Value
Publication number	US-9695513-B2
Application number	US-201514837719-A
Country	US
Kind code	B2
Filing date	Aug 27, 2015
Priority date	Mar 1, 2013
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

A hydrophobization treatment apparatus includes a cooling device which cools a substrate, a light irradiation device which irradiates thermal radiation light from light sources onto front surface of the substrate, a gas supply device which supplies hydrophobization-treatment gas to the substrate, an exhaust device which exhausts the gas, a lifting device which moves the substrate such that the lifting device raises and lowers the substrate between the cooling device and light sources, and a control device which has circuitry to control the light irradiation device, the gas supply device, the exhaust device and the lifting device. The circuitry of the control device executes first gas supply control to discharge and exhaust the gas into and from the space between the gas container and substrate, and after the first control, second gas supply control to discharge and exhaust the gas into and from the space between the gas container and substrate.

First claim

What is claimed is:

1. A hydrophobization treatment apparatus, comprising:
a cooling device configured to cool a substrate and comprising a cooling plate positioned to face a back surface of a substrate;
a light irradiation device comprising a plurality of light sources and configured to irradiate thermal radiation light emitted from the plurality of light sources onto a front surface of the substrate, the plurality of light sources being positioned to face the front surface of the substrate such that a space is formed between the plurality of light sources and the front surface of the substrate;
a gas supply device configured to supply a hydrophobization-treatment gas to the substrate and comprising a gas container and a plurality of gas discharge ports, the gas container covering a lower side of the light sources and positioned to face the front surface of the substrate such that a space is formed between the gas container and the front surface of the substrate, the gas container comprising a material through which the thermal radiation light emitted from the light sources is permeated, the plurality of gas discharge ports being positioned on a lower side of the gas container and configured to open toward the substrate;
an exhaust device configured to exhaust the hydrophobization-treatment gas and comprising a gas exhaust outlet formed around a periphery of the substrate;
a lifting device configured to move the substrate such that the lifting device raises and lowers the substrate between the cooling plate and the light sources; and
a control device comprising circuitry configured to control the light irradiation device, the gas supply device, the exhaust device and the lifting device,
wherein the circuitry of the control device is configured to execute a first gas supply control in which the lifting device, the gas supply device and the exhaust device are controlled such that in a position that the substrate is lowered to the cooling plate, a hydrophobization-treatment gas of a first gas supply process is discharged into the space between the gas container and the substrate and exhausted from the space between the gas container and the substrate, and after the first gas supply control, execute a second gas supply control in which the light irradiation device, the lifting device, the gas supply device and the exhaust device are controlled such that in a position that the substrate is raised to the light sources, the light sources emit the thermal radiation light upon the substrate, a hydrophobization-treatment gas of a second gas supply process is discharged into the space between the gas container and the substrate and exhausted from the space between the gas container and the substrate.

2. The hydrophobization treatment apparatus according to claim 1 , wherein the circuitry of the control device is configured to control the exhaust device such that an exhaust ratio of the hydrophobization-treatment gas in the second gas supply control is smaller than an exhaust ratio of the hydrophobization-treatment gas in the first gas supply control.

3. The hydrophobization treatment apparatus according to claim 2 , wherein t the circuitry of the control device is configured to control the light irradiation device such that in the second gas supply control, a light irradiation amount of the light sources facing a center portion of the substrate is greater than a light irradiation amount of the light sources facing a peripheral portion of the substrate.

4. The hydrophobization treatment apparatus according to claim 2 , wherein the circuitry of the control device is configured to execute a gas exchange control in which the gas supply device and the exhaust device are controlled such that after supplying the hydrophobization-treatment gas in the second gas supply control, an inert gas is discharged into the space between the gas container and the substrate in the position that the substrate is raised to the light sources, and the inert gas and the hydrophobization-treatment gas in the second gas supply control are exhausted from the space between the gas container and the substrate.

5. The hydrophobization treatment apparatus according to claim 2 , wherein the gas container has a buffer space formed inside the gas container and communicated to the gas exhaust outlet such that t buffer space accommodates gas.

6. The hydrophobization treatment apparatus according to claim 2 , wherein the lifting device comprises a lift body having an annular shape corresponding with a peripheral portion of the substrate such that the lifting device is configured to raise and lower the substrate by supporting the substrate with the lift body.

7. The hydrophobization treatment apparatus according to claim 1 , wherein the circuitry of the control device is configured to control the light irradiation device such that in the second gas supply control, a light irradiation amount of the light sources facing a center portion of the substrate is greater than a light irradiation amount of the light sources facing a peripheral portion of the substrate.

8. The hydrophobization treatment apparatus according to claim 7 , wherein the circuitry of the control device is configured to execute a gas exchange control in which the gas supply device and the exhaust device are controlled such that after supplying the hydrophobization-treatment gas in the second gas supply control, an inert gas is discharged into the space between the gas container and the substrate in the position that the substrate is raised to the light sources, and the inert gas and the hydrophobization-treatment gas in the second gas supply control are exhausted from the space between the gas container and the substrate.

9. The hydrophobization treatment apparatus according to claim 3 , wherein the gas container has a buffer space formed inside the gas container and communicated to the gas exhaust outlet such that t buffer space accommodates gas.

10. The hydrophobization treatment apparatus according to claim 1 , wherein the circuitry of the control device is configured to execute a gas exchange control in which the gas supply device and the exhaust device are controlled such that after supplying the hydrophobization-treatment gas in the second gas supply control, an inert gas is discharged into the space between the gas container and the substrate in the position that the substrate is raised to the light sources, and the inert gas and the hydrophobization-treatment gas in the second gas supply control are exhausted from the space between the gas container and the substrate.

11. The hydrophobization treatment apparatus according to claim 1 , wherein the gas container has a buffer space formed inside the gas container and communicated to the gas exhaust outlet such that t buffer space accommodates gas.

12. The hydrophobization treatment apparatus according to claim 1 , wherein the lifting device comprises a lift body having an annular shape corresponding with a peripheral portion of the substrate such that the lifting device is configured to raise and lower the substrate by supporting the substrate with the lift body.

13. A method for applying hydrophobization treatment on a substrate, comprising:
discharging a hydrophobization-treatment gas of a first gas supply process into a space formed between a gas container facing a front surface of a substrate and the substrate in a position that the substrate is lowered to a cooling plate;
exhausting the hydrophobization-treatment gas of the first gas supply process from the space between the gas container and the substrate;
discharging a hydrophobization-treatment gas of a second gas supply process into the sp

Assignees

• Tokyo Electron Ltd

Inventors

• Ueda Kenichi

Classifications

• H10P76/2043

  using an anti-reflective coating · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P14/6509

  by exposure to electromagnetic radiation, e.g. UV light · CPC title

• H10P14/6506

  Formation of intermediate materials · CPC title