Carrier device and ceramic member

Patent metadata

Field	Value
Publication number	US-9691652-B2
Application number	US-201314383282-A
Country	US
Kind code	B2
Filing date	Feb 28, 2013
Priority date	Mar 7, 2012
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

A ceramic member, in a carrier device, including: a plurality of ceramic layers; a clamping electrode formed on a first ceramic layer among the plurality of ceramic layers and inside of the plurality of ceramic layers, and configured to attract a dielectric material by electrostatic force; an electric heating element formed on a second ceramic layer, which is more distant from a side holding a carried object than the first ceramic layer among the plurality of ceramic layers, and configured to generate heat using electric power; a power feed port; a land formed on a third ceramic layer among the plurality of ceramic layers, and configured to receive electric power through the power feed port; and a via arranged to pass through at least one of the plurality of ceramic layers and provided as a conductive material to electrically connect the electric heating element with the land.

First claim

What is claimed is:

1. A ceramic member configured to be movable along with a carried object in a state of holding the carried object, in a carrier device, the ceramic member comprising:
a plurality of ceramic layers that have insulating properties and are integrally sintered;
a clamping electrode formed on a first ceramic layer among the plurality of ceramic layers and inside of the plurality of ceramic layers, and configured to attract a dielectric material by electrostatic force;
an electric heating element formed on a second ceramic layer, which is more distant from a side holding the carried object than the first ceramic layer among the plurality of ceramic layers, and configured to generate heat using electric power;
a power feed port configured to receive a supply of electric power to the electric heating element from outside of the ceramic member;
a land formed on a third ceramic layer, which is different from the first ceramic layer and the second ceramic layer among the plurality of ceramic layers, and configured to receive electric power through the power feed port;
a via arranged to pass through at least one of the plurality of ceramic layers and provided as a conductive material to electrically connect the electric heating element with the land;
an opposed surface configured to oppose the carried object in the state of holding the carried object, the opposed surface being a plane aligned with a layer surface direction of the plurality of ceramic layers;
a base end upper surface formed at an outer circumferential side of the opposed surface, the base end upper surface facing the same direction as the opposed surface;
a bottom surface located at an opposed side of the base end upper surface; and
a base end surface connected with the base end upper surface and the bottom surface;
wherein the land is formed on the third ceramic layer from a position directly below the opposed surface to a position directly below the base end upper surface; and
the opposed surface comprises a first opposed surface and a second opposed surface, the first opposed surface and the second opposed surface being aligned on separate planes in the direction of the ceramic layers, and the second opposed surface is located closer to the side holding the carried object than the first opposed surface.

2. The ceramic member according to claim 1 , wherein:
the bottom surface is provided as a surface along the layer surface direction and located on an opposite side to the opposed surface,
wherein the electric heating element is located closer to the bottom surface than the opposed surface.

3. The ceramic member according to claim 1 , further comprising a negative pressure communication passage formed inside of the plurality of ceramic layers, provided as a flow path along a layer surface direction of the plurality of ceramic layers and configured to supply a negative pressure,
wherein the electric heating element is located closer to the side holding the carried object than the negative pressure communication passage.

4. The ceramic member according to claim 1 ,
wherein the electric heating element comprises:
a first electric heating element arranged on an outer peripheral side of the second ceramic layer; and
a second electric heating element arranged on an inner side of the first electric heating element,
wherein the first electric heating element have a higher amount of heat generation per unit area than an amount of heat generation per unit area of the second electric heating element.

5. A carrier device configured to carry the carried object using the ceramic member according to claim 1 .

6. The ceramic member according to claim 1 , further comprising:
a second power feed port configured to receive a supply of electric power to the clamping electrode from outside of the ceramic member;
a second land formed on the third ceramic layer configured to receive electric power through the second power feed port; and
a second via arranged to pass through at least one of the plurality of ceramic layers and provided as a conductive material to electrically connect the clamping electrode with the second land.

7. The ceramic member according to claim 1 , wherein a suction hole is defined by the opposed surface, the suction hole having a substantially U-shaped cross-section in the direction of the plurality of ceramic layers.

8. The ceramic member according to claim 7 , wherein a gas release hole is defined by the opposed surface, the gas release being different from the suction hole, and the gas-release hole having a substantially U-shaped cross-section in the direction of the plurality of ceramic layers.

9. The ceramic member according to claim 1 , wherein the ceramic member has a substantially U-shaped cross-section in the direction of the plurality of ceramic layers.

Assignees

• Ngk Spark Plug Co

Inventors

• Miwa Kaname
• Niwa Tomonori
• Kurano Jun

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H02N13/00

  Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect · CPC title

• H01L21/67742

  Electricity · mapped topic