Method of forming a pattern for interconnection lines in an integrated circuit wherein the pattern includes gamma and beta block mask portions

Patent metadata

Field	Value
Publication number	US-9691626-B1
Application number	US-201615077384-A
Country	US
Kind code	B1
Filing date	Mar 22, 2016
Priority date	Mar 22, 2016
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

A method of forming a pattern includes providing a structure having an etch mask layer disposed over a pattern layer disposed over a dielectric layer. Disposing first and second trench plugs having different material compositions in the etch mask layer, the first and second trench plugs overlaying gamma and beta block mask portions respectively of the pattern layer. Forming an array of self-aligned spacers disposed on sidewalls of mandrels, the spacers and mandrels defining alternating beta and gamma regions extending normally to the dielectric layer, the gamma region and beta regions extending though portions of the first and second trench plug respectively. Selectively etching the structure to remove any portion of the first trench plug within the beta region and any portion of the second trench plug within the gamma region. Selectively etching the structure to form a pattern in the pattern layer including the block mask portions.

First claim

What is claimed is:

1. A method comprising:
providing a structure, the structure having an etch mask layer disposed over a pattern layer and the pattern layer disposed over a dielectric layer;
disposing a first and a second trench plug in the etch mask layer, the first and second trench plugs having different material compositions;
utilizing a self-aligned double patterning process to form an array of self-aligned spacers disposed on sidewalls of mandrels, the spacers and mandrels defining alternating beta and gamma regions extending normally through the dielectric layer, a gamma region extending through a portion of the first trench plug, a beta region extending through a portion of the second trench plug;
selectively etching the structure to remove any portion of the first trench plug from the beta regions and any portion of the second trench plug from the gamma regions;
selectively etching the structure to form a pattern in the pattern layer, the pattern including:
a gamma block mask portion disposed in a gamma region, wherein a portion of the first trench plug overlays the gamma block mask portion, and
a beta block mask portion disposed in a beta region, wherein a portion of the second trench plug overlays the beta block mask portion.

2. The method of claim 1 wherein utilizing lithographic processes comprises:
patterning the etch mask layer to form a first trench and a second trench within the etch mask layer, the first trench overlaying a gamma block mask portion of the pattern layer and the second trench overlaying a beta block mask portion of the pattern layer; and
disposing a first trench plug in the first trench and a second trench plug in the second trench, the first and second trench plugs having different material compositions.

3. The method of claim 1 wherein utilizing a self-aligned double patterning process comprises:
disposing a lithographic stack of layers over the etch mask layer;
patterning the lithographic stack to form an array of mandrels having sidewalls extending normally upwards from an etch mask surface of the etch mask layer, the mandrels having a mandrel width and a mandrel height;
conformal coating the mandrels and etch mask surface with a thin film; and
anisotropically etching the film to expose a portion of the etch mask surface and to form an array of self-aligned spacers disposed on the sidewalls of the mandrels, the spacers having a spacer width and spacer height less than the mandrel height.

4. The method of claim 3 wherein:
the mandrels define a beta region having a width equal to the mandrel width and extending normally through the dielectric layer, the beta region also extending through a portion of the second trench plug and the beta block mask portion; and
the exposed portion of the etch mask surface, absent any spacers and mandrels, defines a gamma region having a width equal to the distance between the mandrels minus twice the spacer width, the gamma region extending normally through the dielectric layer, the gamma region also extending through a portion of the first trench plug and the gamma block mask portion.

5. The method of claim 1 wherein:
the pattern defines locations of gamma interconnect lines disposed in the gamma region of the dielectric layer and beta interconnect lines disposed in the beta region of the dielectric layer;
the gamma block mask portion of the pattern defines locations of gamma blocks in the dielectric layer, which block electrical continuity of gamma interconnect lines, the gamma blocks extending across the entire width of the gamma region but not extending into the beta region; and
the beta block mask portion of the pattern defines location of beta blocks in the dielectric layer, which block electrical continuity of beta interconnect lines; the beta blocks extending across the entire width of the beta region but not extending into the gamma region.

6. A method comprising:
disposing a pattern layer over a dielectric layer;
disposing an etch mask layer over the pattern layer;
patterning the etch mask layer to form a first trench and a second trench within the etch mask layer;
disposing a first trench plug in the first trench and a second trench plug in the second trench, the first and second trench plugs having different material compositions;
disposing a lithographic stack of layers over the etch mask layer;
patterning the lithographic stack to form an array of mandrels having sidewalls extending normally upwards from an etch mask surface of the etch mask layer, the mandrels having a mandrel width and a mandrel height;
conformal coating the mandrels and etch mask surface with a thin film; and
anisotropically etching the film to expose a portion of the etch mask surface and to form an array of self-aligned spacers disposed on the sidewalls of the mandrels, the spacers having a spacer width and spacer height less than the mandrel height; and
selectively etching the etch mask layer, first trench plug, second trench plug and pattern layer to form a pattern in the pattern layer, the pattern including:
a gamma block mask portion, wherein a portion of the first trench plug overlays the gamma block mask portion, and
a beta block mask portion, wherein a portion of the second trench plug overlays the beta block mask portion;

wherein the pattern defines locations of interconnect lines disposed in the dielectric layer and
wherein the gamma and beta block mask portions define locations of continuity blocks in the dielectric layer.

7. The method of claim 6 wherein:
the mandrels define a beta region having a width equal to the mandrel width and extending normally through the dielectric layer, the beta region also extending through a portion of the second trench plug and the beta block mask portion; and
the exposed portion of the etch mask surface, absent any spacers and mandrels, defines a gamma region having a width equal to the distance between the mandrels minus twice the spacer width, the gamma region extending normally through the dielectric layer, the gamma region also extending through a portion of the first trench plug and the gamma block mask portion.

8. The method of claim 7 comprising:
selectively etching any portions of the etch mask layer and second trench plug which extend into the gamma region, to remove such portions from the gamma region; and
selectively partially etching any portions of the first trench plug which extends into the gamma region, to form a recessed first trench plug portion overlaying the gamma block mask portion of the pattern layer in the gamma region.

9. The method of claim 8 comprising:
selectively etching the mandrels to remove the mandrels from the beta region and to expose any portion of the first trench plug extending into the beta region to form an unrecessed first trench plug portion within the beta region and to preserve the second trench plug portion within the beta region; and
selectively etching any exposed portions of the pattern layer which extend into the gamma region to remove all such exposed portions from the gamma region and to preserve the recessed first trench plug portion within the gamma region.

10. The method of claim 9 comprising:
disposing a second mask layer to cover the recessed first trench plug portion within the gamma region and the unrecessed first trench plug portion within the beta region;
etching back the second mask layer to expose the unrecessed first trench plug portion within the beta region, but not the recessed first trench plug portion within the gamma region; and
selectively etching the exposed unrecessed first trench plug portion to remove the unrecessed first trench plug portion from the beta region and to preserve the sec

Assignees

• Globalfoundries Inc

Inventors

• Bouche Guillaume
• Stephens Jason Eugene

Classifications

• H10P76/4085

  characterised by the processes involved to create the masks · CPC title

• H10W20/43

  Layouts of interconnections · CPC title

• H10W20/089

  using processes for implementing desired shapes or dispositions of the openings, e.g. double patterning · CPC title

• H10P50/73 Primary

  using masks for insulating materials · CPC title

• H01L21/02164

  Electricity · mapped topic