Electrodeposition systems and methods that minimize anode and/or plating solution degradation

Patent metadata

Field	Value
Publication number	US-9689084-B2
Application number	US-201414284932-A
Country	US
Kind code	B2
Filing date	May 22, 2014
Priority date	May 22, 2014
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

Disclosed are electrodeposition systems and methods wherein at least three electrodes are placed in a container containing a plating solution. The electrodes are connected to a polarity-switching unit and include a first electrode, a second electrode and a third electrode. The polarity-switching unit establishes a constant polarity state between the first and second electrodes in the solution during an active plating mode, wherein the first electrode has a negative polarity and the second electrode has a positive polarity, thereby allowing a plated layer to form on a workpiece at the first electrode. The polarity-switching unit further establishes an oscillating polarity state between the second and third electrodes during a non-plating mode (i.e., when the first electrode is removed from the plating solution), wherein the second electrode and the third electrode have opposite polarities that switch at regular, relatively fast, intervals, thereby limiting degradation of the second electrode and/or the plating solution.

First claim

What is claimed is:

1. An electrodeposition system comprising:
a container containing a plating solution;
three electrodes in said container and comprising:
a first electrode removeably placed in said plating solution;
a second electrode in said plating solution; and,
a third electrode;

a signal generator generating a polarity-switching signal having a frequency; and
a polarity-switching unit receiving said polarity-switching signal and being electrically connected to said first electrode, said second electrode and said third electrode,
said polarity-switching unit being selectively operated in one of an active plating mode and a non-plating mode,
during said active plating mode, said polarity-switching unit establishing a constant polarity state between said first electrode and said second electrode in said plating solution such that said first electrode has a negative polarity and said second electrode has a positive polarity,
during said non-plating mode, said polarity-switching unit establishing an oscillating polarity state between said second electrode and said third electrode such that said second electrode and said third electrode have opposite polarities and such that said opposite polarities switch at regular intervals defined by said frequency,
said third electrode being in said plating solution and said electrodeposition system further comprising a fourth electrode in said plating solution in said container and connected to said second electrode by a switch and further electrically connected to said polarity-switching unit,
said third electrode and said fourth electrode comprising insoluble electrodes,
said switch electrically disconnecting said fourth electrode from said second electrode in said active plating mode and electrically connecting said fourth electrode to said second electrode in said non-plating mode, and
said polarity-switching unit establishing another oscillating polarity state between said fourth electrode and said third electrode during said plating mode.

2. The electrodeposition system of claim 1 , said second electrode being any one of a soluble electrode and an insoluble electrode.

3. The electrodeposition system of claim 1 , further comprising:
a controller generating an operating mode select signal to selectively operating said polarity-switching unit in said one of said active plating mode and said non-plating mode; and,
a power source comprising a negative terminal and a positive terminal,
said polarity-switching unit comprising:
a first multiplexer electrically connected to said negative terminal and receiving said operating mode select signal and said polarity-switching signal; and
a second multiplexer electrically connected to said positive terminal and receiving said operating mode select signal and said polarity-switching signal,

when said operating mode select signal indicates said active plating mode, said first multiplexer electrically connecting said negative terminal to said first electrode and said second multiplexer electrically connecting said positive terminal to said second electrode such that said constant polarity state between said first electrode and said second electrode is established, and
when said operating mode select signal indicates said non-plating mode, said first multiplexer alternatingly electrically connecting said negative terminal to said second electrode and said third electrode at said regular intervals and said second multiplexer alternatingly electrically connecting said positive terminal to said third electrode and said second electrode at said regular intervals such that said second electrode and said third electrode have said opposite polarities and such that said oscillating polarity state between said second electrode and said third electrode is established.

4. The electrodeposition system of claim 3 , said frequency being predetermined to limit transfer of electrons at a surface of said second electrode.

5. An electrodeposition system comprising:
a container containing a plating solution, said plating solution comprising water and, dissolved in said water, tin ions, silver ions and methyl sulfonic acid (MSA);
three electrodes in said container and comprising:
a first electrode removeably placed in said plating solution in said container;
a second electrode in said plating solution; and,
a third electrode;

a polarity-switching unit electrically connected to said first electrode, said second electrode and said third electrode,
said polarity-switching unit being selectively operated in one of an active plating mode and a non-plating mode,
during said active plating mode, said polarity-switching unit establishing a constant polarity state between said first electrode and said second electrode in said plating solution such that said first electrode has a negative polarity and said second electrode has a positive polarity, said constant polarity state allowing a tin-silver plated layer to form on a workpiece at said first electrode, and
during said non-plating mode, said polarity-switching unit establishing an oscillating polarity state between said second electrode and said third electrode during said non-plating mode such that said second electrode and said third electrode have opposite polarities and such that said opposite polarities switch at regular intervals;

a controller generating an operating mode select signal to selectively operating said polarity-switching unit in said one of said active plating mode and said non-plating mode;
a signal generator generating a polarity-switching signal; and,
a power source comprising a negative terminal and a positive terminal,
said polarity-switching unit comprising:
a first multiplexer electrically connected to said negative terminal and receiving said operating mode select signal and said polarity-switching signal; and
a second multiplexer electrically connected to said positive terminal and receiving said operating mode select signal and said polarity-switching signal,

when said operating mode select signal indicates said active plating mode, said first multiplexer electrically connecting said negative terminal to said first electrode and said second multiplexer electrically connecting said positive terminal to said second electrode such that said constant polarity state between said first electrode and said second electrode is established, and
when said operating mode select signal indicates said non-plating mode, said first multiplexer alternatingly electrically connecting said negative terminal to said second electrode and said third electrode at said regular intervals and said second multiplexer alternatingly electrically connecting said positive terminal to said third electrode and said second electrode at said regular intervals such that said second electrode and said third electrode have said opposite polarities and such that said oscillating polarity state between said second electrode and said third electrode is established,
said polarity-switching signal having a frequency that defines said regular intervals.

6. The electrodeposition system of claim 5 , said third electrode being in said plating solution and being a corrosion-resistant electrode.

7. The electrodeposition system of claim 5 , said second electrode being any one of a tin (Sn) electrode and a platinum (Pt) catalyst-coated titanium (Ti) electrode.

8. The electrodeposition system of claim 5 , said plating solution further comprising organic additives dissolved in said water and said system further comprising: a membrane dividing said container into a first compartment and a second compartment,
said first compartment containing said plating solution,
said second compartment containing an additional solution and

Assignees

• Globalfoundries Inc
• Globalfounries Inc

Inventors

• Arvin Charles L
• Cox Harry D
• Perfecto Eric D

Classifications

• C25D17/10

  Electrodes {, e.g. composition, counter electrode} · CPC title

• C25D21/12 Primary

  Process control or regulation (controlling or regulating in general G05) · CPC title

• C25D5/18 Primary

  Electroplating using modulated, pulsed or reversing current · CPC title