Frequency addressable microactuators

Patent metadata

Field	Value
Publication number	US-9685291-B2
Application number	US-201213415840-A
Country	US
Kind code	B2
Filing date	Mar 8, 2012
Priority date	Mar 8, 2011
Publication date	Jun 20, 2017
Grant date	Jun 20, 2017

Abstract

Frequency addressable micro-actuators having one or more movable resonating elements actuators, such as cantilevers, can be forced into oscillation by, e.g., electromagnetic actuation. The movable structure is designed to latch at a certain amplitude using one of several latching techniques, such as a near-field magnetic field. In operation, the movable element is driven into resonance, producing a large amplitude, which results in the structure latching. Through resonance, a small force applied in a repeating manner can result in the latching of the actuator, an operation which would normally require a large force. If two or more units, each with different harmonic frequencies, are placed under the same influence, only the one with a harmonic response to the driving force will latch. A single influencing signal may be used to latch more than one device on demand by tuning the frequency to match the natural frequency of the device of interest.

First claim

What is claimed is:

1. A system of actuators comprising
a control bus for delivering a time varying signal, and
a plurality of actuators coupled to the control bus, wherein one or more actuators of the plurality of actuators having a harmonic frequency that differs from one or more of the other actuators of the plurality of actuators, wherein individual actuators of the plurality of actuators are selectively actuatable in response to a single time varying actuating signal applied simultaneously to each actuator of the plurality of actuators,
wherein each actuator of the plurality of actuators is a resonating cantilever switch, and
wherein each cantilever switch comprises
a body,
a cantilever extending from the body at a first end of the cantilever and having a magnet on a second end, and
a dedicated coil positioned on the body in spaced relation with the magnet and the second end of the cantilever.

2. The system of claim 1 wherein the control bus is a single wire.

3. The system of claim 1 wherein separate ones of the plurality of actuators having a unique response to a time varying actuating signal.

4. The system of claim 3 wherein the plurality of actuators are configured in a series topology.

5. The system of claim 3 wherein the plurality of actuators are configured in a parallel topology.

6. The system of claim 3 wherein the plurality of actuators are configured in a branched topology.

7. The system of claim 6 wherein the branched topology includes a plurality of actuation lines comprising with one or more actuators and a plurality of addressable switches with separate ones of the plurality of addressable switches coupled to the separate ones of the plurality of actuation lines.

8. The system of claim 1 further comprising one or more inline filters coupled to the control bus.

9. The system of claim 1 wherein separate ones of the plurality of actuators having differing time based response to a time varying actuating signal.

10. The system of claim 1 wherein the plurality of actuators include one or more movable structures configured to latch at a certain amplitude.

11. The system of claim 1 wherein the plurality of actuators is configured to provide electrical switching.

12. The system of claim 1 wherein the plurality of actuators is configured to provide one of optical switching and optical reflecting.

13. The system of claim 1 wherein each of the plurality of actuators is a resonating cantilever mirror.

14. The system of claim 1 wherein each of the plurality of actuators is a resonating cantilever waveguide switch.

15. The system of claim 14 wherein the waveguide switch includes an input waveguide and a plurality of output waveguides.

16. The system of claim 1 wherein the cantilever switch further comprises a latching component positioned within the body in spaced relation with the coil, wherein the cantilever is drivable to a latched “on” state by application of a pulsed or oscillating electromagnetic force applied to the coil.

17. The system of claim 16 wherein the electromagnetic force is an alternating current.

18. The system of claim 16 further comprising a RF transmission line.

Assignees

• Bachman Mark
• Li Guann-Pyng
• Wang Minfeng
• Zhang Yang
• Lin Brent Puohan
• Univ California

Inventors

• Bachman Mark
• Li Guann-Pyng
• Wang Minfeng
• Zhang Yang
• Lin Brent Puohan

Classifications

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• H01H2001/0084

  with perpendicular movement of the movable contact relative to the substrate · CPC title

• H01H2001/0042

  Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet · CPC title

• H01H50/005 Primary

  using micromechanics · CPC title

• H01H2059/0036

  Movable armature with higher resonant frequency for faster switching · CPC title