Plasma processing method and plasma processing apparatus

Patent metadata

Field	Value
Publication number	US-9660182-B2
Application number	US-201314387655-A
Country	US
Kind code	B2
Filing date	Apr 22, 2013
Priority date	Apr 26, 2012
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

A plasma processing method of etching a multilayered material having a structure where a first magnetic layer 105 and a second magnetic layer 103 are stacked with an insulating layer 104 therebetween is performed by a plasma processing apparatus 10 including a processing chamber 12 where a processing space S is formed; and a gas supply unit 44 of supplying a processing gas into the processing space, and includes a first etching process where the first magnetic layer is etched by supplying a first processing gas and generating plasma, and the first etching process is stopped on a surface of the insulating layer; and a second etching process where a residue Z is removed by supplying a second processing gas and generating plasma. The first magnetic layer and the second magnetic layer contain CoFeB, the first processing gas contains Cl 2 , and the second processing gas contains H 2 .

First claim

We claim:

1. A plasma processing method of etching a multilayered material having a structure in which a first magnetic layer and a second magnetic layer are stacked with an insulating layer interposed therebetween, by using a plasma processing apparatus including a processing chamber in which a processing space for plasma generation is partitioned and formed; and a gas supply unit of supplying a processing gas into the processing space, the plasma processing method comprising:
a first etching process in which the first magnetic layer is etched by supplying a first processing gas into the processing chamber and generating plasma, and the first etching process is stopped on a surface of the insulating layer;
a second etching process in which a residue produced in the first etching process is removed by supplying a second processing gas into the processing chamber and generating plasma;
a coating process in which a surface of the multilayered material is coated with an insulating film after the second etching process; and
a third etching process in which the insulating layer and the second magnetic layer are etched by supplying a third processing gas into the processing chamber and generating plasma, after the coating process,
wherein the first magnetic layer and the second magnetic layer contain CoFeB,
the first processing gas contains Cl 2 ,
the second processing gas contains H 2 ,
the third processing gas contains CH 4 , and
the insulating layer contains MgO.

2. The plasma processing method of claim 1 ,
wherein the second processing gas further contains at least one of N 2 , Ar, and He.

3. The plasma processing method of claim 1 ,
wherein the plasma processing apparatus further includes a first electrode provided within the processing chamber; a second electrode provided to face the first electrode; a first power supply unit configured to apply a power having a first frequency to the first electrode; and a second power supply unit configured to apply a power having a second frequency to the second electrode, and
the plasma of the first processing gas and the plasma of the second processing gas are generated within the processing chamber by applying the second power having 1 MHz or less as the second frequency from the second power supply unit to the second electrode.

4. The plasma processing method of claim 3 ,
wherein the plasma of the first processing gas and the plasma of the second processing gas are generated within the processing chamber by applying the second power having 400 kHz or less as the second frequency from the second power supply unit to the second electrode.

5. The plasma processing method of claim 1 ,
wherein the plasma of the first processing gas and the plasma of the second processing gas are generated within the processing chamber by applying the first power of 100 W to 300 W from the first power supply unit to the first electrode.

6. The plasma processing method of claim 1 ,
wherein the plasma processing apparatus further includes an exhaust unit configured to depressurize the processing space to a predetermined pressure level; and a control unit configured to control the exhaust unit, and
the control unit is configured to control the exhaust unit to set a pressure inside the processing space to be in a range of 10 mTorr to 30 mTorr (1.33 Pa to 4.00 Pa).

7. The plasma processing method of claim 1 ,
wherein the processing space has a gap of 20 mm to 30 mm.

8. The plasma processing method of claim 1 ,
wherein the plasma processing apparatus further includes a first electrode provided within the processing chamber; a second electrode provided to face the first electrode; a first power supply unit configured to apply a first power having a first frequency to the first electrode; and a second power supply unit configured to apply a second power having a second frequency to the second electrode, and
the second etching process includes: a first process in which only the first power is applied; and a second process in which both of the first power and the second power are applied.

Assignees

• Tokyo Electron Ltd

Inventors

• Sone Takashi
• Urayama Daisuke
• Kushibiki Masato
• Koizumi Nao
• KUME Wataru
• Nishimura Eiichi
• Yamashita Fumiko

Classifications

• H01J37/32807

  Construction (includes replacing parts of the apparatus) · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• H01J2237/3341

  Reactive etching · CPC title

• H01J37/32908

  Utilities · CPC title

• H01J37/32165

  Plural frequencies · CPC title