Pre-treatment method for plating and storage medium

Patent metadata

Field	Value
Publication number	US-9653350-B2
Application number	US-201414548794-A
Country	US
Kind code	B2
Filing date	Nov 20, 2014
Priority date	Nov 21, 2013
Publication date	May 16, 2017
Grant date	May 16, 2017

Abstract

Catalytic metal nanoparticles can be attached on a base. A pre-treatment method for plating includes a catalytic particle-containing film forming process of forming a catalytic particle-containing film on a surface of a substrate by supplying, onto the substrate, a catalytic particle solution which is prepared by dispersing the catalytic metal nanoparticles and a dispersing agent in a solvent containing water; a first heating process of removing moisture contained at least in the catalytic particle-containing film by heating the substrate to a first temperature; and a second heating process of polymerizing the dispersing agent to have a sheet shape by heating the substrate to a second temperature higher than the first temperature after the first heating process and fixing the catalytic metal nanoparticles on a base layer by covering the catalytic metal nanoparticles with the sheet-shaped dispersing agent.

First claim

We claim:

1. A pre-treatment method for plating, the pre-treatment method comprising:
a silane coupling process of forming a silane-based coupling layer on an inner surface of a recess included in a substrate;
a titanium coupling process of forming a titanium-based coupling layer on a region in the vicinity of an opening edge of the recess included in the substrate;
a catalytic particle-containing film forming process of forming a catalytic particle-containing film on a surface of the substrate by supplying, onto the substrate, a catalytic particle solution which is prepared by dispersing catalytic metal nanoparticles and a dispersing agent in a solvent containing water;
a first heating process of removing moisture contained at least in the catalytic particle-containing film by heating the substrate to a first temperature; and
a second heating process of polymerizing the dispersing agent to have a sheet shape by heating the substrate to a second temperature higher than the first temperature after the first heating process and fixing the catalytic metal nanoparticles on the silane-based coupling layer and the titanium-based coupling layer by covering the catalytic metal nanoparticles with the sheet-shaped dispersing agent.

2. The pre-treatment method of claim 1 ,
wherein the second heating process is performed in a low oxygen atmosphere having a low oxygen concentration or in a vacuum atmosphere.

3. The pre-treatment method of claim 1 ,
wherein the first heating process is performed in a low oxygen atmosphere having a low oxygen concentration or in a vacuum atmosphere.

4. The pre-treatment method of claim 1 ,
wherein the catalytic metal nanoparticles are made of at least one material selected from the group consisting of palladium, gold, platinum and ruthenium.

5. The pre-treatment method of claim 1 ,
wherein the dispersing agent is polyvinylpyrrolidone (PVP), polyacrylic acid (PAA), polyethyleneimine (PEI), tetramethylammonium (TMA), or citric acid.

6. The pre-treatment method of claim 1 , further comprising:
a barrier film forming process of forming a barrier layer by electroless plating with the catalytic metal nanoparticles as a catalyst, after the second heating process.

Assignees

• Tokyo Electron Ltd

Inventors

• Tanaka Takashi
• Mizutani Nobutaka
• Saito Yusuke
• Iwashita Mitsuaki

Classifications

• H10W20/0245

  comprising use of blind vias during the manufacture · CPC title

• H10W20/0261

  characterised by the filling method or the material of the conductive fill · CPC title

• H10P14/46

  using a liquid · CPC title

• H10W20/0526

  by thermal treatment thereof · CPC title

• H10W20/033

  in openings in dielectrics · CPC title