Charged particle-beam device

Patent metadata

Field	Value
Publication number	US-9653256-B2
Application number	US-201415035265-A
Country	US
Kind code	B2
Filing date	Nov 5, 2014
Priority date	Nov 11, 2013
Publication date	May 16, 2017
Grant date	May 16, 2017

Abstract

Provided is a charged-particle-beam device capable of simultaneously cancelling out a plurality of aberrations caused by non-uniform distribution of the opening angle and energy of a charged particle beam. The charged-particle-beam device is provided with an aberration generation lens for generating an aberration due to the charged particle beam passing off-axis, and a corrective lens for causing the trajectory of the charged particle beam to converge on the main surface of an objective lens irrespective of the energy of the charged particle beam. The main surface of the corrective lens is disposed at a crossover position at which a plurality of charged particle beams having differing opening angles converge after passing through the aberration generation lens.

First claim

The invention claimed is:

1. A charged-particle-beam device comprising:
a charged-particle-beam source for discharging charged-particle beams;
an objective lens for focusing the charged-particle beams on a specimen;
an aberration generation lens arranged between the objective lens and the charged-particle-beam source and directed for generating an aberration when the charged-particle beams pass off the axis; and
a correction lens for focusing trajectories of the charged-particle beams on a principal plane of the objective lens irrespective of energy of the charged-particle beams,
wherein the principal plane of the correction lens is arranged at a crossover position where the trajectories of the charged-particle beams with different opening angles pass through the aberration generation lens and then focus.

2. The charged-particle-beam device according to claim 1 ,
wherein the principal plane of the correction lens is arranged to overlap on an object plane of the objective lens.

3. The charged-particle-beam device according to claim 1 ,
wherein the aberration generation lens is configured to generate an aberration for cancelling an aberration generated on the objective lens.

4. The charged-particle-beam device according to claim 1 ,
wherein the correction lens comprises a deflector arranged to overlap on the principal plane of the correction lens and directed for deflecting trajectories of the charged-particle beams.

5. The charged-particle-beam device according to claim 1 , comprising:
a deflector for adjusting trajectories of the charged-particle beams such that the charged-particle beams pass through a center of the correction lens irrespective of a tilt angle of the charged-particle beams.

6. The charged-particle-beam device according to claim 1 , comprising:
an aberration adjustment lens for adjusting an aberration generated by the aberration generation lens
wherein the aberration generation lens and the aberration adjustment lens are configured such that a combined aberration generated by combining an aberration generated by the aberration generation lens and an aberration generated by the aberration adjustment lens cancels an aberration generated by the objective lens.

7. The charged-particle-beam device according to claim 6 , comprising:
an optical element control unit for controlling a spherical aberration coefficient of the objective lens, a chromatic aberration coefficient of the objective lens, an intensity of the aberration generation lens, and an intensity of the aberration adjustment lens,
wherein the optical element control unit controls the intensity of the aberration generation lens and the intensity of the aberration adjustment lens so that the aberration generation lens changes a position where the charged-particle beams focus, thereby adjusting the combined aberration to cancel an aberration generated by the objective lens depending on a change in the spherical aberration coefficient of the objective lens and the chromatic aberration coefficient of the objective lens.

8. The charged-particle-beam device according to claim 1 , comprising:
a deflector for deflecting the charged-particle beams depending on a tilt angle of the charged-particle beams and passing the charged-particle beams through a center of the aberration adjustment lens.

9. The charged-particle-beam device according to claim 6 , comprising:
a deflector for deflecting the charged-particle beams and passing the charged-particle beams off the axis of the aberration adjustment lens.

10. The charged-particle-beam device according to claim 1 , comprising:
a deflector for tilting the charged-particle beams arranged in the field of the objective lens.

11. The charged-particle-beam device according to claim 1 , comprising:
a trajectory focus lens arranged between the correction lens and the aberration generation lens and directed for generating an aberration when the charged-particle beams pass off the axis; and
a second correction lens for focusing the trajectories of the charged-particle beams on the principal plane of the trajectory focus lens irrespective of energy of the charged-particle beams,
wherein the principal plane of the trajectory focus lens is arranged at a crossover position where the charged-particle beams with different energy pass through the second correction lens and then focus.

12. The charged-particle-beam device according to claim 11 ,
wherein the trajectory focus lens comprises a deflector for deflecting the charged-particle beams with different opening angles on the principal plane of the correction lens, and a deflector for deflecting the charged-particle beams with different energy on the principal plane of the trajectory focus lens.

Assignees

• Hitachi High Tech Corp

Inventors

• Ikegami Akira
• Dohi Hideto
• Kazumi Hideyuki
• Ose Yoichi
• Suzuki Naomasa
• Enyama Momoyo
• Nishi Ryuji
• Takaoka Akio

Classifications

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2611

  Stereoscopic measurements and/or imaging · CPC title

• H01J37/147

  Arrangements for directing or deflecting the discharge along a desired path ({H01J37/045 take precedence;} lenses H01J37/10) · CPC title

• H01J3/12

  Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses (H01J3/02, H01J3/04 take precedence) · CPC title

• H01J37/14

  magnetic · CPC title