Cleaning device, method of manufacturing the same and substrate cleaning apparatus

Patent metadata

Field	Value
Publication number	US-9643216-B2
Application number	US-201514944551-A
Country	US
Kind code	B2
Filing date	Nov 18, 2015
Priority date	Nov 20, 2014
Publication date	May 9, 2017
Grant date	May 9, 2017

Abstract

A cleaning device, according to one embodiment, for cleaning a substrate by being rotated, includes: a cleaning member configured to clean a substrate; and a sleeve configured to be provided along a circumference of the cleaning member, a lower part of the sleeve being divided into a plurality of chucking claws each of which holds a portion of a side face of the cleaning member, wherein at inside of each of the plurality of chucking claws, a plurality of protrusions are provided substantially parallel to a rotation direction of the cleaning member, an end of each of the plurality of protrusions is configured to contact the side face of the cleaning member.

First claim

The invention claimed is:

1. A cleaning device for cleaning a substrate by being rotated, the cleaning device comprising:
a cleaning member configured to clean a substrate; and
a sleeve configured to be provided along a circumference of the cleaning member, a lower part of the sleeve being divided into a plurality of chucking claws each of which holds a portion of a side face of the cleaning member,
wherein at inside of each of the plurality of chucking claws, a plurality of protrusions are provided substantially parallel to a rotation direction of the cleaning member, an end of each of the plurality of protrusions is configured to contact the side face of the cleaning member.

2. The cleaning device of claim 1 , wherein
the plurality of protrusions are fixedly attached to the cleaning member, and
the side face of the cleaning member is swelling into a gap between the plurality of protrusions.

3. The cleaning device of claim 2 further comprising a ring member configured to fit at an outer circumference of the sleeve,
wherein the plurality of protrusions are fixedly attached to the cleaning member by the ring member fitting at the outer circumference of the sleeve.

4. The cleaning device of claim 1 , wherein the plurality of protrusions are configured to transfer driving force in the rotation direction to the cleaning member when the sleeve is rotationally-driven.

5. The cleaning device of claim 1 , wherein at an inside face of each of the plurality of chucking claws, an additional protrusion is provided extending in a direction perpendicular to the rotation direction of the cleaning member at a position different from a position where the plurality of protrusions are provided, an end of the additional protrusion contacting the side face of the cleaning member.

6. The cleaning device of claim 1 further comprises a positioning mechanism configured to position the cleaning member at a center of the sleeve.

7. The cleaning device of claim 1 , wherein a recess is provided on a substantial center of a top face of the cleaning member, and
the cleaning device further comprises a holding core fixed to the sleeve, a convex portion being provided on a substantial center of a face of the holding core facing the top face of the cleaning member, the convex portion engaging with the recess.

8. The cleaning device of claim 7 , wherein
the top face of the cleaning member is arranged so that there exists a gap between the top face of the cleaning member and the face of the holding core facing the top face,
the cleaning member has elasticity, and
a height of the convex portion of the holding core is larger than a sum of a width of the gap and a depth of the recess in a status where the convex portion does not engage with the recess.

9. The cleaning device of claim 8 , wherein a groove is provided on a face of the convex portion contacting a bottom face of the recess.

10. The cleaning device of claim 8 , wherein
the cleaning member comprises a lower column portion and an upper column portion, a radius of the upper column portion is smaller than a radius of the lower column portion,
a bottom face of the lower column portion is a cleaning face,
a top face of the lower column portion contacts a bottom face of the sleeve,
a side face of the upper column portion is hold by the chucking claws, and
the recess is provided on a top face of the upper column portion.

11. The cleaning device of claim 7 , wherein at least a portion of a cross section of the recess has a straight line.

12. A substrate cleaning apparatus comprising:
a substrate holding and rotating mechanism configured to hold and rotate a substrate;
the cleaning device of claim 1 configured to clean the substrate; and
a cleaning device mounting mechanism on which the cleaning device is mounted and configured to rotate the cleaning device on the substrate.

13. A method for manufacturing a cleaning device, the method comprising:
inserting a holding core into an opening on an upper part of a sleeve, a convex portion being provided on a substantial center of a bottom face of the holding core;
inserting a cleaning member into an opening on a lower part of the sleeve divided into a plurality of chucking claws, a recess being provided on a substantial center of a top face of the cleaning member, to make the convex portion engage with the recess; and
fitting a ring member at an outer circumference of the sleeve to bite a plurality of protrusions provided substantially parallel to a rotation direction of the cleaning member at inside of each of the plurality of chucking claws into the cleaning member.

Assignees

• Ebara Corp

Inventors

• Ishibashi Tomoatsu

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0412

  using mainly scrubbing means, e.g. brushes · CPC title