Substrate support with integrated vacuum and edge purge conduits

Patent metadata

Field	Value
Publication number	US-9633889-B2
Application number	US-201313787397-A
Country	US
Kind code	B2
Filing date	Mar 6, 2013
Priority date	Mar 6, 2013
Publication date	Apr 25, 2017
Grant date	Apr 25, 2017

Abstract

Substrate supports are provided herein, In some embodiments, a substrate support includes a first plate; a plurality of vacuum passages disposed through the first plate; a plurality of vertical passages formed partially into the first plate; a plurality of horizontal passages disposed in the first plate, each of the plurality of horizontal passages beginning proximate a perimeter of the first plate and terminating proximate one of the plurality of vertical passages such that the horizontal passages and the vertical passages are in fluid communication; a second plate coupled to the first plate at an interface; an elongate shaft having a vacuum line and an edge purge line internal to the shaft; a vacuum channel formed at the interface fluidly coupling the vacuum line to the plurality of vacuum passages; and an edge purge channel formed at the interface fluidly coupling the edge purge line to the plurality of vertical passages.

First claim

The invention claimed is:

1. A substrate support, comprising:
a first plate;
a plurality of vacuum passages disposed through the first plate;
a plurality of vertical passages formed partially into the first plate;
a plurality of horizontal passages disposed in the first plate, each of the plurality of horizontal passages beginning at a peripheral surface of the first plate and terminating proximate one of the plurality of vertical passages such that the horizontal passages and the vertical passages are in fluid communication;
a second plate coupled to the first plate at an interface;
an elongate shaft having a vacuum line and an edge purge line formed in a body of the shaft, wherein the elongate shaft is coupled to the second plate at a first end portion of the elongate shaft;
a vacuum channel formed at the interface and fluidly coupled to the vacuum line and the plurality of vacuum passages, wherein the vacuum line serves as an inlet of the vacuum channel and the plurality of vacuum passages serve as outlets of the vacuum channel; and
an edge purge channel formed at the interface and fluidly coupled to the edge purge line to distribute purge gas to the plurality of vertical passages, wherein the edge purge line serves as an inlet of the edge purge channel and the plurality of vertical passages serve as outlets of the edge purge channel,
wherein the vacuum and edge purge channels are defined by the first and second plates at the interface and are parallel to the interface.

2. The substrate support of claim 1 , wherein the first plate further comprises a first secondary horizontal passage beginning at a point on the perimeter of the first plate offset in a first direction from the beginning of a primary horizontal passage and terminating at an intersection with the primary horizontal passage such that the first secondary horizontal passage is in fluid communication with the primary horizontal passage.

3. The substrate support of claim 2 , wherein the first plate further comprises a second secondary horizontal passage beginning at a point on the perimeter of the first plate offset in a second direction, opposite the first direction, from the beginning of the primary horizontal passage and terminating at an intersection with the primary horizontal passage such that the second secondary horizontal passage is in fluid communication with the primary horizontal passage.

4. The substrate support of claim 3 , wherein the first secondary horizontal passage and second secondary horizontal passage intersect the primary horizontal passage at a substantially same distance from the beginning of the primary horizontal passage.

5. The substrate support of claim 4 , wherein a portion of the horizontal passage between the intersection of at least one of the first and second secondary horizontal passages and the perimeter of the first plate is at least partially blocked to limit or prevent fluid flow therethrough.

6. The substrate support of claim 1 , wherein the vacuum channel and the edge purge channels are arcuate.

7. The substrate support of claim 6 , wherein the vacuum channel and the edge purge channels have uniform radii of curvature of different magnitude.

8. The substrate support of claim 1 , wherein the vacuum channel comprises a plurality of discontinuous curvilinear portions, each portion in fluid communication with the vacuum line.

9. The substrate support of claim 1 , wherein the first plate, the second plate, and the shaft comprise ceramic materials.

10. The substrate support of claim 1 , further comprising:
a plate rim raised above a first surface of the first plate, the plate rim providing a sealing surface with respect to a substrate when disposed on the first plate; and
a plurality of substrate support elements raised above the first surface and disposed radially inward of the plate rim.

11. The substrate support of claim 10 , wherein the sealing surface includes a coating formed on the sealing surface.

12. The substrate support of claim 11 , wherein the coating is discontinuous.

13. The substrate support of claim 11 , wherein the coating comprises a non-metallic material.

14. The substrate support of claim 13 , wherein the coating comprises aluminum oxide.

15. The substrate support of claim 1 , wherein at least one of the vacuum passages, vertical passages, horizontal passages, vacuum line, or edge purge line include liner tubes inserted therein.

16. The substrate support of claim 1 , wherein at least one of the edge purge channel and the vacuum channel is at least partially formed in a surface of the first plate disposed adjacent to the second plate.

17. The substrate support of claim 1 , wherein at least one of the edge purge channel and the vacuum channel is at least partially formed in a surface of the second plate disposed adjacent to the first plate.

18. A substrate support, comprising:
a plate comprising:
a first surface, an opposing second surface, and a thickness bounded by the first and second surfaces;
a rim raised above the first surface, the rim including a sealing surface comprising a discontinuous coating;
a plurality of vacuum passages formed through the thickness and the first and second surfaces;
a plurality of vertical passages formed through the second surface and partially through the plate; and
a plurality of horizontal passages disposed in the thickness of the plate, each of the plurality of horizontal passages beginning at a peripheral surface of the plate, and terminating at one of the plurality of vertical passages such that the horizontal passages and the vertical passages are in fluid communication;

a second plate coupled to the plate at an interface;
an elongate shaft having a vacuum line and an edge purge line formed in a body of the shaft, wherein the elongate shaft is coupled to the second plate at a first end portion of the elongate shaft;
a vacuum channel formed at the interface and fluidly coupled to the vacuum line and the plurality of vacuum passages, wherein the vacuum line serves as an inlet of the vacuum channel and the plurality of vacuum passages serve as outlets of the vacuum channel; and
an edge purge channel formed at the interface and fluidly coupled to the edge purge line to distribute purge gas to the plurality of vertical passages, wherein the edge purge line serves as an inlet of the edge purge channel and the plurality of vertical passages serve as outlets of the edge purge channel,
wherein the vacuum and edge purge channels are defined by the plate and the second plate at the interface and are parallel to the interface.

19. The substrate support of claim 18 , wherein the discontinuous coating comprises aluminum oxide.

20. A substrate support, comprising:
a first plate comprising:
a first surface, an opposing second surface, and a thickness bounded by the first and second surfaces;
a plurality of vacuum passages formed through the thickness and the first and second surfaces;
a plurality of vertical passages formed through the second surface and partially through the first plate; and
a plurality of horizontal passages disposed in the first plate, each of the plurality of horizontal passages beginning at a peripheral surface of the first plate, and terminating near one of the plurality of vertical passages such that the horizontal passages and the vertical passages are in fluid communication;

a second plate comprising a top surface and an opposing bottom surface, wherein the top surface of the second plate is coupled to the second surface

Assignees

• Applied Materials Inc

Inventors

• Cuvalci Olkan
• Tzu Gwo-Chuan

Classifications

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H01L21/6838 Primary

  Electricity · mapped topic

• H01L21/6875

  Electricity · mapped topic