Refractive index distribution measuring method, refractive index distribution measuring apparatus, and method for manufacturing optical element

Patent metadata

Field	Value
Publication number	US-9625350-B2
Application number	US-201414574155-A
Country	US
Kind code	B2
Filing date	Dec 17, 2014
Priority date	Dec 25, 2013
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

A refractive index distribution measuring method includes dividing light emitted from a light source into reference light and test light, causing the reference light to interfere with the test light, which test light has passed through a test object, measuring a phase difference between the reference light and the test light for each of first and second wavelengths, and measuring a wavefront aberration of the test light for each of the first and second wavelengths. The refractive index distribution measuring method further includes calculating a phase-difference difference amount, which is a difference between the phase differences for the first wavelength and the second wavelength, calculating a wavefront aberration difference amount, which is a difference between the wavefront aberrations for the first wavelength and the second wavelength, and calculating a refractive index distribution of the test object based on the phase-difference difference amount and the wavefront aberration difference amount.

First claim

What is claimed is:

1. A refractive index distribution measuring method comprising:
a phase difference measuring step of dividing light emitted from a light source into reference light and test light and causing the reference light to interfere with the test light, which test light has entered a test object and has passed through the test object, to measure a phase difference between the reference light and the test light;
a wavefront aberration measuring step of measuring a wavefront aberration of the test light; and
a calculation step of calculating a refractive index distribution of the test object based on the phase difference and the wavefront aberration,
wherein the phase difference measuring step includes measuring a first phase difference for a first wavelength and a second phase difference for a second wavelength different from the first wavelength,
wherein the wavefront aberration measuring step includes measuring a first wavefront aberration for the first wavelength and a second wavefront aberration for the second wavelength, and
wherein the calculation step includes calculating a phase-difference difference amount, which is a difference between the first phase difference and the second phase difference, calculating a wavefront aberration difference amount, which is a difference between the first wavefront aberration and the second wavefront aberration, and calculating the refractive index distribution of the test object based on the phase-difference difference amount and the wavefront aberration difference amount.

2. The refractive index distribution measuring method according to claim 1 , wherein the wavefront aberration measuring step further includes calculating the first wavefront aberration as a difference between a transmitted wavefront of the test object for the first wavelength and a transmitted wavefront for the first wavelength of a reference test object having a specific refractive index distribution, and calculating the second wavefront aberration as a difference between a transmitted wavefront of the test object for the second wavelength and a transmitted wavefront for the second wavelength of the reference test object.

3. The refractive index distribution measuring method according to claim 1 , wherein the phase difference measuring step further includes measuring the first phase difference for the first wavelength and the second phase difference for the second wavelength with the test object arranged in a first medium having a first refractive index, and measuring the first phase difference for the first wavelength and the second phase difference for the second wavelength with the test object arranged in a second medium having a second refractive index different from the first refractive index,
wherein the wavefront aberration measuring step further includes measuring the first wavefront aberration for the first wavelength and the second wavefront aberration for the second wavelength with the test object arranged in the first medium, and measuring the first wavefront aberration for the first wavelength and the second wavefront aberration for the second wavelength with the test object arranged in the second medium, and
wherein the calculation step further includes calculating a first phase-difference difference amount, which is a difference between the first phase difference and the second phase difference measured with the test object arranged in the first medium, calculating a second phase-difference difference amount, which is a difference between the first phase difference and the second phase difference measured with the test object arranged in the second medium, calculating a first wavefront aberration difference amount, which is a difference between the first wavefront aberration and the second wavefront aberration measured with the test object arranged in the first medium, calculating a second wavefront aberration difference amount, which is a difference between the first wavefront aberration and the second wavefront aberration measured with the test object arranged in the second medium, and calculating the refractive index distribution of the test object with a shape component of the test object removed based on the first phase-difference difference amount, the second phase-difference difference amount, the first wavefront aberration difference amount, and the second wavefront aberration difference amount.

4. The refractive index distribution measuring method according to claim 1 , wherein the calculation step further includes calculating the refractive index distribution of the test object based on a known shape of the test object, the phase-difference difference amount, and the wavefront aberration difference amount.

5. The refractive index distribution measuring method according to claim 1 , further comprising a step of measuring a waveform dependency of the phase difference between the reference light and the test light with a medium having a group refractive index equal to a group refractive index of the test object for a specific wavelength arranged on optical paths of the reference light and the test light, and calculating the first wavelength and the second wavelength to make the first phase difference and the second phase difference equal to each other based on the waveform dependency of the phase difference between the reference light and the test light.

6. The refractive index distribution measuring method according to claim 1 , further comprising configuring a test unit by arranging a first reference lens, a shape and a refractive index of which are known, and a second reference lens, a shape and a refractive index of which are known, in such a way as to sandwich the test object between the first reference lens and the second reference lens,
wherein the phase difference measuring step further includes measuring the first phase difference for the first wavelength and the second phase difference for the second wavelength by causing the reference light and the test light, which has passed through the test unit, to interfere with each other,
wherein the wavefront aberration measuring step further includes measuring the first wavefront aberration for the first wavelength and the second wavefront aberration for the second wavelength of the test light having passed through the test unit, and
wherein the calculation step further includes calculating the phase-difference difference amount, which is a difference between the first phase difference and the second phase difference, calculating the wavefront aberration difference amount, which is a difference between the first wavefront aberration and the second wavefront aberration, and calculating the refractive index distribution of the test object based on the shape and the refractive index of the first reference lens, the shape and the refractive index of the second reference lens, the phase-difference difference amount, and the wavefront aberration difference amount.

7. The refractive index distribution measuring method according to claim 6 , wherein the phase difference measuring step further includes measuring the first phase difference for the first wavelength and the second phase difference for the second wavelength with a first medium having a first refractive index arranged between the first and second reference lenses and the test object, and measuring the first phase difference for the first wavelength and the second phase difference for the second wavelength with a second medium having a second refractive index different from the first refractive index arranged between the first and second reference lenses and the test object,
wherein the wavefront aberration measuring step further includes measuring the first wavefront aberration for the first wavelength and the second wavefront aberrati

Assignees

• Canon Kk

Inventors

• Sugimoto Tomohiro

Classifications

• G01M11/0271 Primary

  by using interferometric methods · CPC title

• G01M11/0285

  by measuring material or chromatic transmission properties (G01M11/0292 takes precedence) · CPC title