Method for determining the phase angle and/or the thickness of a contamination layer at an optical element and EUV lithography apparatus

Patent metadata

Field	Value
Publication number	US-9618387-B2
Application number	US-201514808637-A
Country	US
Kind code	B2
Filing date	Jul 24, 2015
Priority date	Jan 25, 2013
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

A method and associated EUV lithography apparatus for determining the phase angle at a free interface ( 17 ) of an optical element ( 13 ) provided with a multilayer coating ( 16 ) that reflects EUV radiation and/or for determining the thickness (d) of a contamination layer ( 26 ) formed on the multilayer coating ( 16 ). The multilayer coating ( 16 ) is irradiated with EUV radiation, a photocurrent (I P ) generated during the irradiation is measured, and the phase angle at the free interface ( 17 ) and/or the thickness (d) of the contamination layer ( 26 ) is determined on the basis of a predefined relationship between the phase angle and/or the thickness (d) and the measured photocurrent (I P ). The measured photocurrent (I P ) is generated from the entire wavelength and angle-of-incidence distribution of the EUV radiation impinging on the multilayer coating ( 16 ).

First claim

What is claimed is:

1. An extreme ultraviolet (EUV) lithography apparatus, comprising:
at least one optical element, having a substrate and a multilayer coating that reflects EUV radiation, and an electrical contact with the optical element, to derive a photocurrent generated in response to irradiation of the optical element with the EUV radiation,
a charge amplifier in contact with the optical element and configured to supply an output voltage in accordance with the photocurrent,
a measuring device configured to measure the photocurrent in accordance with the output voltage supplied by the charge amplifier,
a pulsed EUV light source, and
an evaluation device, configured to determine a phase angle at a free interface of the optical element and/or a thickness of a contamination layer formed on the multilayer coating in accordance with a predefined relationship between the phase angle and/or the thickness and the measured photocurrent, wherein the measured photocurrent is generated from an entire wavelength and angle-of-incidence distribution of the EUV radiation impinging on the multilayer coating.

2. The EUV lithography apparatus according to claim 1 , wherein the charge amplifier is arranged at a distance of less than 150 cm from the optical element.

3. The EUV lithography apparatus according to claim 1 , further comprising: a charge standard configured to feed a predefined number of charges to the optical element.

4. The EUV lithography apparatus according to claim 1 , further comprising: a calibration light source configured to irradiate the optical element with calibration radiation at wavelengths that are not reflected by the multilayer coating.

5. The EUV lithography apparatus according to claim 4 , wherein the calibration light source is configured to generate calibration radiation at extreme ultraviolet wavelengths of between 9 nm and 11 nm or between 14 nm and 16 nm or at ultraviolet wavelengths of between 190 nm and 450 nm.

6. The EUV lithography apparatus according to claim 1 , wherein the measuring device is configured to read out the output voltage supplied by the charge amplifier synchronously with pulses of the EUV light source.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Gerhard Michael

Classifications

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F7/70908

  Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus · CPC title

• G01B11/0616 Primary

  of coating · CPC title

• G03F7/70916

  Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps · CPC title

• G01N21/8422

  Investigating thin films, e.g. matrix isolation method · CPC title