Method for detecting particles on the surface of an object, wafer, and mask blank
US-11555783-B2 · Jan 17, 2023 · US
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Gerhard Michael patents
Gerhard Michael is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Gerhard Michael |
| Total patents | 15 |
| First publication | Jan 22, 2015 |
| Latest publication | Jan 17, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Optical grating and optical assembly for same
US-10578783-B2 · Mar 3, 2020 · US
Method for detecting particles on the surface of an object, wafer, and mask blank
US-2020026198-A1 · Jan 23, 2020 · US
Optical grating and optical assembly for same
US-2019137668-A1 · May 9, 2019 · US
Illumination system for microlithography
US-10088754-B2 · Oct 2, 2018 · US
Illumination system for microlithography
US-2017192361-A1 · Jul 6, 2017 · US
Method for determining the phase angle and/or the thickness of a contamination layer at an optical element and EUV lithography apparatus
US-9618387-B2 · Apr 11, 2017 · US
Illumination system for microlithography
US-9606441-B2 · Mar 28, 2017 · US
Illumination system for microlithography
US-2016161858-A1 · Jun 9, 2016 · US
Microlithographic illumination system
US-9341953-B2 · May 17, 2016 · US
Recent patents
Latest publications not already listed above.
Method for operating a projection exposure tool and control apparatus
US-9310693-B2 · Apr 12, 2016 · US
Illumination system for microlithography
US-9280060-B2 · Mar 8, 2016 · US
Method for determining the phase angle and/or the thickness of a contamination layer at an optical element and euv lithography apparatus
US-2016025554-A1 · Jan 28, 2016 · US
Optical beam deflecting element, illumination system including same, and related method
US-9025131-B2 · May 5, 2015 · US
Illumination system for microlithography
US-2015022798-A1 · Jan 22, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 15 |
| Runde Daniel | 1 |
| Doll Florian | 1 |
| Voelkel Reinhard | 1 |
| Weible Kenneth | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70191 | 9 |
| H10P76/2041 | 7 |
| G03F7/70058 | 7 |
| G03F7/70083 | 7 |
| G03F7/70075 | 7 |