System and method for controllable non-volatile metal removal

Patent metadata

Field	Value
Publication number	US-9611552-B2
Application number	US-201514657170-A
Country	US
Kind code	B2
Filing date	Mar 13, 2015
Priority date	Mar 13, 2015
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

A system and method for removing metal from a substrate in a controlled manner is disclosed. The system includes a chamber, with one or more gas inlets to allow the flow of gasses into the chamber, at least one exhaust pump, to exhaust gasses from the chamber, and a heater, capable of modifying the temperature of the chamber. In some embodiments, one or more gasses are introduced into the chamber at a first temperature. The atoms in these gasses chemically react with the metal on the surface of the substrate to form a removable compound. The gasses are then exhausted from the chamber, leaving the removable compound on the surface of the substrate. The temperature of the chamber is then elevated to a second temperature, greater than the sublimation temperature of the removable compound. This increased temperature allows the removable compound to become gaseous and be exhausted from the chamber.

First claim

What is claimed is:

1. A workpiece processing system, comprising:
a chamber comprising a gas inlet and an exhaust port;
a heating element in communication with the chamber;
a gas storage container containing at least one processing gas;
a valve disposed between the gas storage container and the gas inlet;
an exhaust pump in communication with the exhaust port; and
a controller, in communication with the valve, the exhaust pump and the heating element, wherein the controller:
actuates the valve to introduce the at least one processing gas into the chamber at a first temperature;
actuates the valve to stop a flow of the at least one processing gas into the chamber;
actuates the exhaust pump to exhaust the at least one processing gas from the chamber after a first dwell time while the temperature of the chamber is the first temperature;
actuates the heating element to raise a temperature of the chamber to a second temperature after the at least one processing gas has been exhausted; and
actuates the exhaust pump while the temperature of the chamber is the second temperature to eliminate a removable compound produced by a chemical reaction between the at least one processing gas and a metal disposed on a surface of a substrate disposed in the chamber,

and wherein the first temperature is less than a temperature at which the removable computer sublimes, and the second temperature is greater than the temperature at which the removable compound sublimes.

2. The workpiece processing system of claim 1 , wherein the at least one processing gas comprises chlorine and carbon monoxide.

3. The workpiece processing system of claim 1 , wherein the at least one processing gas comprises chlorine and further comprising a second gas storage container, and a second valve disposed between the gas storage container and the gas inlet, wherein carbon monoxide is disposed in the second storage container.

4. The workpiece processing system of claim 3 , wherein the controller:
actuates the second valve to introduce carbon monoxide into the chamber at the first temperature; and
actuates the second valve to stop a flow of carbon monoxide into the chamber, prior to actuating the heating element.

5. The workpiece processing system of claim 3 , wherein the controller:
actuates the second valve to introduce carbon monoxide into the chamber at the second temperature.

6. The workpiece processing system of claim 1 , wherein the at least one processing gas comprises chlorine and carbon monoxide, the metal comprises platinum, and wherein the removable compound comprises chlorinated platinum carbonyl (Pt(CO) 2 Cl 2 ).

Assignees

• Varian Semiconductor Equipment Ass Inc

Inventors

• Chen Tsung-Liang
• Schmiege Benjamin
• Anthis Jeffrey W
• Gilchrist Glen

Classifications

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• B05B15/00

  Details of spraying plant or spraying apparatus not otherwise provided for; Accessories · CPC title

• B05B12/02

  for controlling time, or sequence, of delivery · CPC title

• H01J37/32834

  Exhausting · CPC title