Substrate loading device

Patent metadata

Field	Value
Publication number	US-9605797-B2
Application number	US-201414154980-A
Country	US
Kind code	B2
Filing date	Jan 14, 2014
Priority date	Feb 19, 2013
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

A substrate loading device including a frame part forming a loading space in which a plurality of substrates are loaded, and having an inlet surface in which the substrates are inserted, and a rear surface opposite to the inlet surface, a main support protruding from the rear surface of the frame part to support a rear side of the loaded substrates and a sub support mounted at the inlet surface of the frame part and protruding from the inlet surface to support a front and opposite side of the loaded substrates.

First claim

What is claimed is:

1. A substrate loading device, comprising:
a frame part forming a loading space in which a plurality of substrates are loaded, and having an inlet surface in which the substrates are inserted, and a rear surface opposite to the inlet surface;
a main support protruding from the rear surface of the frame part to support a rear side of the loaded substrates; and
a sub support mounted at the inlet surface of the frame part and protruding from the inlet surface to support a front and opposite side of the loaded substrates, wherein the sub support is detachably attached to the frame part, and wherein the main support is not detachable from the frame part.

2. The substrate loading device of claim 1 , the sub support comprising:
a sub support bar vertically traversing the inlet surface of the frame part; and
a plurality of front guides arranged at predetermined intervals from each other on the sub support bar to support front sides of a lower surface of the loaded substrates.

3. The substrate loading device of claim 2 , wherein the sub support further includes an upper holder and a lower holder arranged at upper and lower portions respectively of the sub support bar and mounted on the frame part, the frame part further includes an upper coupling block and a lower coupling block provided at the upper and lower portions respectively of the inlet surface to receive and couple with the upper holder and the lower holder respectively.

4. The substrate loading device of claim 3 , wherein the holders and the coupling blocks have a detachable structure.

5. The substrate loading device of claim 4 , wherein the upper coupling block includes a lifting device to lift the upper holder vertically to adjust a height of the front guides.

6. The substrate loading device of claim 5 , wherein the lifting, device includes a lifting body coupled to the upper coupling block by a screw to lift the upper holder vertically by rotation.

7. The substrate loading device of claim 6 , wherein the lifting body comprises:
a fixing body, the upper holder being insertedly fixed to the fixing body; and
a rotation body, a first end of the rotation body being independently rotatably coupled to the fixing body.

8. The substrate loading device of claim 7 , wherein the lifting device further comprises a lever bent from an second and opposite end of the rotation body to form a user's handle.

9. The substrate loading device of claim 7 , wherein the lifting device further comprises:
a driving motor to rotate the rotation body; and
a controller to control the driving motor.

10. The substrate loading device of claim 4 , wherein the lower coupling block includes an elastic member to provide elasticity to the lower holder in a vertical direction.

11. The substrate loading device of claim 1 , wherein the main support comprises:
a main support bar traversing the rear surface of the frame part; and
a plurality of rear guides arranged at predetermined intervals on the main support bar to support rear sides of a lower surface of the loaded substrates.

12. The substrate loading device of claim 1 , wherein the frame part comprises:
an upper frame arranged at an upper portion;
a lower frame arranged at a lower portion; and
right and left side frames forming the loading space together with the upper and lower frames.

13. The substrate loading device of claim 12 , wherein the frame part further includes a plurality of side guides protruding from the right and left side frames and arranged at predetermined intervals along side portions of the lower surface of the loaded substrates.

14. The substrate loading device of claim 1 , wherein the sub support comprises a first sub support spaced apart from a second sub support, each of the first and second sub supports including:
a sub support bar traversing the inlet surface of the frame part; and
a plurality of front guides arranged at predetermined intervals from each other on the sub support bar to support front sides of a lower surface of the loaded substrates, the first sub support bar being arranged on an opposite side of a center line of the substrate loading device than the second sub support bar.

15. The substrate loading device of claim 14 , the first sub support bar being arranged within a left half of the substrate loading device and the second sub support bar being arranged within a right half of the substrate loading device, wherein each of the first and second sub supports further includes an upper holder and a lower holder arranged at upper and lower portions respectively of the sub support bar and mounted on the frame part.

16. The substrate loading device of claim 1 , wherein the substrate loading device further comprises:
a plurality of front guides protruding from the inlet surface of the frame part;
a plurality of rear guides protruding from a rear surface of the frame part; and
a plurality of right and left guides protruding from right and left surfaces of the frame part, each of the front, rear, right and left guides supporting a lower surface of a front portion, rear portion and right and left portions respectively of the loaded substrates to prevent the loaded substrates from sagging upon being heated.

17. The substrate loading device of claim 1 , wherein all surfaces of the frame part other than the inlet surface is covered by a flat plate.

18. A substrate loading device, comprising:
a frame part forming a loading space in which a plurality of substrates are loaded, and having an inlet surface in which the substrates are inserted, and a rear surface opposite to the inlet surface;
a main support protruding from the rear surface of the frame pan to support a rear side of the loaded substrates; and
a sub support mounted at the inlet surface of the frame part and protruding from the inlet surface to support a front and opposite side of the loaded substrates, the sub support including a sub support bar traversing the inlet surface in a vertical direction, wherein all surfaces of the frame pan other than the inlet surface is covered by a flat plate, wherein the sub support corresponding to the inlet surface being an only portion of the substrate loading device that is detachable from the frame part, wherein the inlet surface being an only surface into which substrates can be loaded into and removed from the substrate loading device.

19. The substrate loading device of claim 18 , the vertical direction being a direction that the substrates within the substrate loading device are stacked and spaced apart from one another, wherein the sub support further comprises a plurality of front guides, each being attached to the sub support bar and being arranged at predetermined intervals from each other on the sub support bar to support front sides of a lower surface of the loaded substrates.

20. The substrate loading device of claim 19 , the main support comprises a main support bar extending parallel to the sub support bar and a plurality of rear guides attached to the main support bar to support a lower surface of the loaded substrates, the rear guides extending a greater distance than the front guides.

Assignees

• Samsung Display Co Ltd

Inventors

• Han Gyeong-Hee

Classifications

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1914

  characterised by locking systems · CPC title

• H10P72/17 Primary

  specially adapted for supporting large square shaped substrates · CPC title

• H10P72/10 Primary

  using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] · CPC title

• F16M13/00 Primary

  Other supports for positioning apparatus or articles (heads thereof F16M11/02 {; undercarriages thereof F16M11/20} ; adapted to be stuck in the ground A45F3/44 {; sockets or holders for poles or posts E04H12/22}); Means for steadying hand-held apparatus or articles {(supports for measuring instruments G01D11/30; supports for casings of remote control switching devices H01H9/025)} · CPC title