Substrate Mapping Apparatus And Method Therefor
US-2024290642-A1 · Aug 29, 2024 · US
US2016368145A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016368145-A1 |
| Application number | US-201615175875-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 7, 2016 |
| Priority date | Jun 19, 2015 |
| Publication date | Dec 22, 2016 |
| Grant date | — |
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The present disclosure provides a post position adjustment device, a cassette adjustment device and a substrate conveyance system. The post position adjustment device includes: a post-picking-and-placing unit configured to pick a post out from current positioning hole and install the post into a target positioning hole; a movement mechanism configured to move the post-picking-and-placing unit; and a movement control unit configured to control the movement mechanism to move the post-picking-and-placing unit to a source position where the post is currently located, and after the post has been picked out from the current positioning hole by the post-picking-and-placing unit, control the movement mechanism to move the post-picking-and-placing unit to a target position.
Opening claim text (preview).
What is claimed is: 1 . A post position adjustment device comprising: a post-picking-and-placing unit configured to pick a post out from a current positioning hole and install the post into a target positioning hole; a movement mechanism configured to move the post-picking-and-placing unit; and a movement control unit configured to control the movement mechanism to move the post-picking-and-placing unit to a source position where the post is currently located, and after the post has been picked out from the current positioning hole by the post-picking-and-placing unit, control the movement mechanism to move the post-picking-and-placing unit to a target position. 2 . The post position adjustment device according to claim 1 , wherein the post-picking-and-placing unit comprises: a clamping module configured to pick the post out from the current positioning hole and install the post into the target positioning hole; a clamping control module configured to, after the movement mechanism moves the post-picking-and-placing unit to the source position, generate a clamping control signal for controlling the clamping module to pick the post out from the current positioning hole; and an installation control module configured to, after the movement mechanism moves the post-picking-and-placing unit to the target position, generate an installation control signal for controlling the clamping module to install the post into the target positioning hole. 3 , The post position adjustment device according to claim 2 , wherein the movement mechanism comprises: a first guide rail parallel to a positioning bar in which the positioning hole is, a plane defined by the first guide rail and the positioning bar being perpendicular to a plane where the positioning bar is located; a second guide rail perpendicular to the plane where the positioning bar is located; and a movable bearing unit movable along the first guide rail and configured to bear the clamping module; wherein the first guide rail is movable along the second guide rail. 4 . The post position adjustment device according to claim 3 , wherein the movement control unit comprises: a first position adjustment module configured to control the movable bearing unit to move along the first guide rail; and a second position adjustment module configured to control the first guide rail to move along the second guide rail. 5 . The post position adjustment device according to claim 4 , wherein the first guide rail comprises a first guide sub-rail, the clamping module comprises a first clamping unit, the movable bearing unit comprises a first movable bearing module for controlling the first clamping unit to move along the first guide sub-rail. 6 . The post position adjustment device according to claim 5 , wherein the movement mechanism further comprises a third guide rail perpendicular to the plane where the positioning bar is located, the first guide rail is movable along the third guide rail; a first end of the first guide sub-rail is connected to the second guide rail, and a second end of the first guide sub-rail is connected to the third guide rail. 7 . The post position adjustment device according to claim 6 , wherein the first guide rail further comprises a second guide sub-rail and a third guide sub-rail, and a length of the second guide sub-rail and a length of the third guide sub-rail are each less than a length of the first guide sub-rail; the second guide sub-rail is connected to the second guide rail, and the third guide sub-rail is connected to the third guide rail; the clamping module further comprises a second clamping unit, a third clamping unit and a fourth clamping unit; and the movable bearing unit further comprises a second movable bearing module configured to control the second clamping unit to move along the first guide sub-rail, a third movable bearing module configured to control the third clamping unit to move along the second guide sub-rail, and a fourth movable bearing module configured to control the fourth clamping unit to move along the third guide sub-rail. 8 . The post position adjustment device according to claim 7 , wherein the first movable bearing module is at a left side of the second movable bearing module; in the case that the first movable bearing module moves along the first guide sub-rail to the left for a first predetermined distance, the second movable bearing module moves along the first guide sub-rail to the right for the first predetermined distance; and in the case that the first movable bearing module moves along the first guide sub-rail to the right for a second predetermined distance, the second movable bearing module moves along the first guide sub-rail to the left for the second predetermined distance; and in the case that the third movable bearing module moves along the second guide sub-rail to the left for a third predetermined distance, the fourth movable bearing module moves along the third guide sub-rail to the right for the third predetermined distance; and in the case that third movable bearing module moves along the second guide sub-rail to the right for a fourth predetermined distance, the fourth movable bearing module moves along the third guide sub-rail to the left for the fourth predetermined distance. 9 . The post position adjustment device according to claim 7 , wherein the first clamping unit, the second clamping unit, the third clamping unit and the fourth clamping unit are all clips. 10 . The post position adjustment device according to claim 7 , wherein the first movable bearing module is a first step motor, the second movable bearing module is a second step motor, the third movable bearing module is a third step motor, and the fourth movable bearing module is a fourth step motor. 11 . The post position adjustment device according to claim 10 , wherein the first position adjustment module comprises a first servo motor and a second servo motor; the first servo motor is configured to drive the first guide rail to more along the second guide rail, and the second servo motor is configured to drive the first guide rail to move along the third guide rail; the second position adjustment module comprises a third servo motor, a fourth servo motor, a fifth servo motor and a sixth servo motor; and the third servo motor is configured to control the first step motor to move along the first guide sub-rail, the fourth servo motor is configured to control the second step motor to move along the first guide sub-rail, the fifth servo motor is configured to control the third step motor to move along the second guide sub-rail, and the sixth servo motor is configured to control the fourth step motor to move along the third guide sub-rail. 12 . The post position adjustment device according to claim 1 , further comprising a post position detection unit configured to send an alarm signal to the movement control unit when detecting that the post is not placed into the target positioning hole; wherein the movement control unit is further configured to, upon the receipt of the alarm signal, control the movement mechanism to move the post-picking-and-placing unit to the target position, and the post-picking-and-placing unit is further configured to, after being moved to the target position, install the post into the target positioning hole. 13 . The post position adjustment device according to claim 12 , wherein the post position detection unit is a charge coupled device (CCD), 14 . A cassette adjustment device, comprising an adjustment control unit, a retainer movement unit and the post position adjustment device according to claim 1 ; wherein th
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