Holding apparatus for holding substrates

Patent metadata

Field	Value
Publication number	US-9691647-B2
Application number	US-201615135882-A
Country	US
Kind code	B2
Filing date	Apr 22, 2016
Priority date	May 28, 2015
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

The present disclosure relates to a holding apparatus for holding substrates, comprising: a case, and a first support rod and a second support rod, the first support rod is provided with first support sub-rods, and the second support rod is provided with second support sub-rods, the holding apparatus further comprising: a first adjusting mechanism configured to control the first support sub-rods at a first position to move in a direction perpendicular to the first support rod, so as to adjust gaps between the first support sub-rods and the second support sub-rods at a second position corresponding to the first position, and/or a second adjusting mechanism configured to control the second support sub-rods at the second position to move in a direction perpendicular to the second support rod, so as to adjust gaps between the second support sub-rods and the first support sub-rods at the first position.

First claim

What is claimed is:

1. A holding apparatus for holding substrates, comprising: a case, and a first support rod and a second support rod which are located on two opposite sides in the case, wherein the first support rod is provided with a plurality of first support sub-rods, and the second support rod is provided with a plurality of second support sub-rods of numbers and at positions corresponding to the first support sub-rods, the first support sub-rods and the second support sub-rods are arranged opposite to each other so as to support the substrates,
wherein the holding apparatus for holding substrates further comprises a first adjusting mechanism provided on one side of the first support rod away from the second support rod and configured to control the first support sub-rods of the first support rod at a first position to move in a direction perpendicular to the first support rod, so as to adjust gaps between the first support sub-rods and the second support sub-rods of the second support rod at a second position,
wherein the first position corresponds to the second position; and
wherein the first adjusting mechanism comprises:
a first connector configured to drive the first support sub-rod at the first position to move through magnetic action;
a first moving mechanism configured to control the first connector to move in a direction parallel to the first support rod, so that a position of the first connector corresponds to that of the first support sub-rod at the first position; and
a second moving mechanism configured to control the first connector to move in a direction perpendicular to the first support rod, so as to drive the first support sub-rod connected to the first connector to move in a direction perpendicular to the first support rod.

2. The holding apparatus for holding substrates according to claim 1 , further comprising:
a second adjusting mechanism provided on one side of the second support rod away from the first support rod and configured to control the second support sub-rods of the second support rod at the second position to move in a direction perpendicular to the second support rod, so as to adjust gaps between the second support sub-rods and the first support sub-rods of the first support rod at the first position.

3. The holding apparatus for holding substrates according to claim 1 , wherein:
the first connector comprises a first bar-shaped connecting portion provided parallel to the first support rod, the first bar-shaped connecting portion is divided into a first portion having first magnetic polarity and a second portion having second magnetic polarity from one end to the other, and the first magnetic polarity and the second magnetic polarity repel each other;
one end of the first support sub-rod near the first support rod comprises a second bar-shaped connecting portion provided parallel to the first support rod, the second bar-shaped connecting portion is divided into a third portion having the second magnetic polarity and a fourth portion having the first magnetic polarity from one end to the other;
under the control of the second moving mechanism, the first support sub-rod at the first position is moved away from the second support rod, while a position of the first portion corresponds to that of the third portion, and a position of the second portion corresponds to that of the fourth portion; and
under the control of the second moving mechanism, the first support sub-rod at the first position is moved toward the second support rod, while the position of the first portion corresponds to that of the fourth portion, and the position of the second portion corresponds to that of the third portion.

4. The holding apparatus for holding substrates according to claim 3 , wherein when the first support sub-rod at the first position is moved toward or away from the second support rod, a distance between the first bar-shaped connecting portion and the second bar-shaped connecting portion is a first preset distance.

5. The holding apparatus for holding substrates according to claim 1 , wherein the first moving mechanism comprises:
a first screw rod connected to the first support rod, wherein the first screw rod is provided parallel to the first support rod, and the first connector is provided on the first screw rod; and
a first driving mechanism provided on one end of the first support rod, wherein the first driving mechanism is configured to drive the first screw rod to rotate so as to drive the first connector to move along a direction parallel to the first support rod.

6. The holding apparatus for holding substrates according to claim 5 , wherein the first driving mechanism is a servo motor, and the first screw rod is a ball screw rod.

7. The holding apparatus for holding substrates according to claim 6 , wherein the ball screw rod comprises a screw shaft provided with a spiral ball screw groove on its external surface; the first connector comprises a first bar-shaped connecting portion and a nut connected therewith, the nut has a spiral ball screw groove on its inner circumferential surface which is provided opposite to the ball screw groove of the screw shaft, the nut is sleeved onto the screw shaft, a ball track formed of the ball screw groove of the nut and the ball screw groove of the screw shaft is provided with a ball, and the ball is capable of rolling in the ball track.

8. The holding apparatus for holding substrates according to claim 5 , wherein the second moving mechanism comprises:
a second driving mechanism connected to the first screw rod, and the second driving mechanism is configured to drive the first screw rod to move along a direction perpendicular to the first support rod so as to drive the first connector to move along a direction perpendicular to the first support rod.

9. The holding apparatus for holding substrates according to claim 8 , wherein the second driving mechanism is an air cylinder.

10. The holding apparatus for holding substrates according to claim 2 , wherein the second adjusting mechanism comprises:
a second connector driving the second support sub-rod at the second position to move through magnetic action;
a third moving mechanism configured to control the second connector to move in a direction parallel to the second support rod so as to choose the second support sub-rod at the second position; and
a fourth moving mechanism configured to control the second connector to move in a direction perpendicular to the second support rod so as to drive the second support sub-rod connected to the second connector to move in a direction perpendicular to the second support rod.

11. The holding apparatus for holding substrates according to claim 10 , wherein:
the second connector comprises a third bar-shaped connecting portion provided parallel to the second support rod, the third bar-shaped connecting portion is divided into a fifth portion having third magnetic polarity and a sixth portion having fourth magnetic polarity from one end to the other, and the third magnetic polarity and the fourth magnetic polarity repel each other;
one end of the second support sub-rod near the second support rod comprises a fourth bar-shaped connecting portion provided parallel to the second support rod, the fourth bar-shaped connecting portion is divided into a seventh portion having the fourth magnetic polarity and an eighth portion having the third magnetic polarity;
under the control of the fourth moving mechanism, the second support sub-rod at the second position is moved away from the first support rod, while a position of the fifth portion corresponds to that of the seventh portion, and a position of the sixth portion corresponds to that of th

Assignees

• Boe Technology Group Co Ltd
• Hefei Boe Optoelectronics Tech

Inventors

• Wang Peng
• Zhang Jiangtao
• Xu Dongdong
• Guo Xiang

Classifications

• H10P72/127

  characterised by the substrate support · CPC title

• H10P72/17 Primary

  specially adapted for supporting large square shaped substrates · CPC title

• H01L21/6734 Primary

  Electricity · mapped topic

• H01L21/67309

  Electricity · mapped topic