High frequency piezoelectric crystal composites, devices, and methods for manufacturing the same
US-9519269-B2 · Dec 13, 2016 · US
US9598319B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9598319-B2 |
| Application number | US-68288308-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 20, 2008 |
| Priority date | Oct 18, 2007 |
| Publication date | Mar 21, 2017 |
| Grant date | Mar 21, 2017 |
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According to the state of the art, piezoceramic multi-layer elements are sintered in air at temperatures of approximately 1100 DEG C or higher. Therefore, only a noble metal having a high melting temperature can be used as the inner electrode. Non-noble metals would oxidize. Therefore, a silver-palladium alloy having up to 40% palladium is normally used. However, such a measure is associated with high material costs. Lower melting temperatures of the inner electrode material, however, also require a ceramic material having correspondingly low sintering temperatures. The invention therefore proposes that an electrically non-conductive sintering additive added be added to the base material, and that the inner electrode comprise silver, preferably pure silver, as the main material component thereof, and an electrically non-conductive material component and/or a metal alloy or metal oxide mixture.
Opening claim text (preview).
It is claimed: 1. A method for producing a material for producing a piezoceramic multi-layer element from a piezoelectric ceramic material as a base material that sinters at temperatures below 950° C., wherein an electrically non-conductive sintering aid is added to the base material, wherein the electrically non-conductive sintering aid comprises at least one member selected from the group consisting of Na 2 O, K 2 O, P 2 O 5 , As 2 O 5 , GeO 2 and InO 2 ; or wherein the electrically non-conductive sintering aid comprises at least one trivalent oxide selected from the group consisting of Al 2 O 3 , Fe 2 O 3 , Mn 2 O 3 and Cr 2 O 3 ; and at least one pentavalent oxide selected from the group consisting of P 2 O 5 , As 2 O 5 , Sb 2 O 5 and Bi 2 O 5 . 2. The method according to claim 1 , wherein the base material is selected from the group consisting of lead zirconate titanate, barium titanate and bismuth titanate. 3. The method according to claim 1 , wherein the sintering aid is present in an amount of <5% by weight. 4. The method according to claim 1 , wherein ≦3% by weight is chosen as the concentration of an individual substance of the sintering aid. 5. The method according to claim 1 , wherein the addition of the quantity of the sintering aid is already taken into account in the recipe if it is effected during the adding of the raw materials. 6. The method according to claim 1 , wherein the addition of the quantity of the sintering aid is effected by measuring and doping to a target value in order to take into account fluctuations in the raw materials and the method of preparation. 7. The method according to claim 1 , wherein a coating is performed with a liquid containing the sintering aid. 8. The method according to claim 4 , wherein the addition of the quantity of the sintering aid is already taken into account in the recipe if it is effected during the adding of the raw materials before calcination or after calcination. 9. A method for producing a piezoceramic multi-layer element from a piezoelectric ceramic material as a base material, comprising the steps of: adding an electrically non-conductive sintering aid to the base material; grinding a calcined piezoelectric ceramic material as the base material to form a powder; preparing from the powder a castable slip to which the electrically non-conductive sintering aid in a quantity of <5% by weight; casting the castable slip to form a continuous film; drying and dividing the continuous film into film sections; printing on said film sections with a metal paste of inner electrodes, the metal paste comprises a main-material component of which consists of pure silver without any other proportion of noble metal in the form of a print layout thereof; stacking a plurality of the printed film sections to form the multi-layer element; compressing the stacked films at an elevated pressure and an elevated temperature of 900° C. or below to form a laminate; separating the laminate into forms that are predetermined by the print layout and a number of the multi-layer elements; freeing the multi-layer elements of any organic binder portions at a temperature of approximately 500° C.; and subsequently sintering at a temperature below 1000° C. to form the piezoceramic multi-layer element, wherein the electrically non-conductive sintering aid comprises at least one member selected from the group consisting of N 2 O, K 2 O, P 2 O 5 , As 2 O 5 , GeO 2 and InO 2 ; or wherein the electrically non-conductive sintering aid comprises at least one trivalent oxide selected from the group consisting of Al 2 O 3 , Fe 2 O 3 , Mn 2 O 3 and Cr 2 O 3 ; and at least one pentavalent oxide selected from the group consisting of P 2 O 5 , As 2 O 5 , Sb 2 O 5 and Bi 2 O 5 . 10. A method for producing a piezoceramic multi-layer element from a material for producing a piezoceramic multi-layer element from a piezoelectric ceramic material as a base material, comprising the steps of: adding an electrically non-conductive sintering aid to the base material; grinding a calcined piezoelectric ceramic material as the base material to form a powder; preparing from the powder a castable slip to which the electrically non-conductive sintering aid in a quantity of <5% by weight; casting the castable slip to form a continuous film; drying and dividing the continuous film into film sections; printing on said film sections with a metal paste of inner electrodes, the metal past comprising a main-material component comprising pure silver without any other proportion of noble metal in the form of a print layout thereof; stacking a plurality of the printed film sections to form the multi-layer element; and compressing the stacked films at an elevated pressure and an elevated temperature of 900° C. or below to form a laminate, wherein the electrically non-conductive sintering aid comprises at least one member selected from the group consisting of Na 2 O, K 2 O, P 2 O 5 , As 2 O 5 , GeO 2 and InO 2 ; or wherein the electrically non-conductive sintering aid comprises at least one trivalent oxide selected from the group consisting of Al 2 O 3 , Fe 2 O 3 , Mn 2 O 3 and Cr 2 O 3 ; and at least one pentavalent oxide selected from the group consisting of P 2 O 5 , As 2 O 5 , Sb 2 O 5 and Bi 2 O 5 . 11. The method according to claim 1 , wherein the electrically non-conductive sintering aid comprises at least one member selected from the group consisting of Na 2 O, K 2 O, P 2 O 5 , As 2 O 5 , GeO 2 and InO 2 . 12. The method according to claim 1 , wherein the electrically non-conductive sintering aid comprises at least one trivalent oxide selected from the group consisting of Al 2 O 3 , Fe 2 O 3 , Mn 2 O 3 and Cr 2 O 3 ; and at least one pentavalent oxide selected from the group consisting of P 2 O 5 , As 2 O 5 , Sb 2 O 5 and Bi 2 O 5 . 13. The method according to claim 9 , wherein the electrically non-conductive sintering aid comprises at least one member selected from the group consisting of Na 2 O, K 2 O, P 2 O 5 , As 2 O 5 , GeO 2 and InO 2 . 14. The method according to claim 9 , wherein the electrically non-conductive sintering aid comprises at least one trivalent oxide selected from the group consisting of Al 2 O 3 , Fe 2 O 3 , Mn 2 O 3 and Cr 2 O 3 ; and at least one pentavalent oxide selected from the group consisting of P 2 O 5 , As 2 O 5 , Sb 2 O 5 and Bi 2 O 5 . 15. The method according to claim 10 , wherein the electrically non-conductive sintering aid comprises at least one member selected from the group consisting of Na 2 O, K 2 O, P 2 O 5 , As 2 O 5 , GeO 2 and InO 2 . 16. The method according to claim 10 , wherein the electrically non-conductive sintering aid comprises at least one trivalent oxide selected from the group consisting of Al 2 O 3 , Fe 2 O 3 , Mn 2 O 3 and Cr 2 O 3 ; and at least one pentavalent oxide selected from the group consisting of P 2 O 5 , As 2 O 5 , Sb 2 O 5 and Bi 2 O 5 .
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