Fine concavo-convex structure product, heat-reactive resist material for dry etching, mold manufacturing method and mold

Patent metadata

Field	Value
Publication number	US-9597822-B2
Application number	US-201514656091-A
Country	US
Kind code	B2
Filing date	Mar 12, 2015
Priority date	Jan 27, 2012
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

A fine concavo-convex structure product ( 10 ) is provided with an etching layer ( 11 ), and a resist layer ( 12 ) comprised of a heat-reactive resist material for dry etching provided on the etching layer ( 11 ), a concavo-convex structure associated with opening portions ( 12 a ) formed in the resist layer ( 12 ) is formed in the etching layer ( 11 ), a pattern pitch P of a fine pattern of the concavo-convex structure ranges from 1 nm to 10 μm, a pattern depth H of the fine pattern ranges from 1 nm to 10 μm, and a pattern cross-sectional shape of the fine pattern is a trapezoid, a triangle or a mixed shape thereof. The heat-reactive resist material for dry etching has, as a principal constituent element, at least one species selected from the group consisting of Cu, Nb, Sn, Mn, oxides thereof, nitrides thereof and NiBi.

First claim

The invention claimed is:

1. A method of manufacturing a mold, consisting essentially of:
providing a resist layer containing a heat-reactive resist material for dry etching on a substrate to be an etching layer;
exposing the resist layer, then developing, and forming a mask;
performing dry etching via the mask; and
removing the resist layer to manufacture a mold,
wherein said heat-reactive resist material is used to form a fine concavo-convex structure product using an etching gas, said heat-reactive resist material having, as a principal constituent element, at least one species selected from the group consisting of Cr, Fe, Co, Al, Ga, In, Hf, Pb, oxides thereof and nitrides thereof,
wherein the etching gas is fluorine-containing gas such that a ratio (F/C) of the number of fluorine atoms to the number of carbon atoms is 2.7 or less,
wherein the fine concavo-convex structure product includes the etching layer and the resist layer, containing the heat-reactive resist material for dry etching, provided on the etching layer,
wherein a concavo-convex structure associated with opening portions formed in the resist layer is formed in the etching layer, a pattern pitch P of a fine pattern of the concavo-convex structure ranges from 1 nm to 10 μm, a pattern depth H of the fine pattern ranges from 1 nm to 10 μm, and a pattern cross-sectional shape of the fine pattern is a trapezoid or triangle, and
wherein the pattern cross-sectional shape meets Equation (1) or Equation (2):
0< T 0 =B 1 <T 1 ≦10 μm  Eq. (1)

0≦ B 1 <T 0 =T 1 <10 μm  Eq. (2)

T 0 : Width of the opening portion of the resist layer before dry etching
T 1 : Width of the concave portion on the highest portion side formed in the etching layer after dry etching
B 1 : Width of the concave portion on the deepest portion side formed in the etching layer after dry etching,
wherein the heat-reactive material of the resist layer is in an amorphous state.

2. The method of manufacturing a mold according to claim 1 , wherein in the step of forming the resist layer, the resist layer is provided by a sputtering method, a vapor deposition method or a CVD method.

3. The method of manufacturing a mold according to claim 1 , wherein the substrate is in the shape of a plate.

4. The method of manufacturing a mold according to claim 1 , wherein the substrate is in the shape of a sleeve.

5. The method of manufacturing a mold according to claim 1 , wherein the substrate is quartz.

6. The method of manufacturing a mold according to claim 1 , wherein in the step of forming the mask, the resist layer is exposed with a semiconductor laser.

Assignees

• Asahi Kasei E Materials Corp
• Asaki Kasei E-Material Corp

Inventors

• Mitamura Yoshimichi

Classifications

• H10P76/4085

  characterised by the processes involved to create the masks · CPC title

• Y10T428/24612

  Composite web or sheet · CPC title

• C09K13/00

  Etching, surface-brightening or pickling compositions (for glass C03C15/00, {C03C25/66; for mortars, concrete, artificial or natural stone or ceramics C04B41/5338}; for metallic material C23F, C23G1/00, C25F1/00; {for semi-conductors H10P52/40}) · CPC title

• B81C99/0085 Primary

  using moulds and master templates, e.g. for hot-embossing · CPC title

• B29K2905/06

  Tin · CPC title