Fine concavo-convex structure product, heat-reactive resist material for dry etching, mold manufacturing method and mold
US-9623590-B2 · Apr 18, 2017 · US
US9511990B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9511990-B2 |
| Application number | US-201213983682-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 5, 2012 |
| Priority date | Feb 3, 2011 |
| Publication date | Dec 6, 2016 |
| Grant date | Dec 6, 2016 |
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A method of fabricating a micromechanical part in a single-piece made of a synthetic carbon-allotrope includes forming a substrate which includes the negative cavity for the micromechanical part to be fabricated, coating the negative cavity of the substrate with a layer of the synthetic carbon allotrope in a thickness of between 0.2 μm and 20 μm, the thickness being less than the depth of the negative cavity, removing from the substrate a larger thickness than the thickness of the deposited layer, so as to leave a limited thickness of the layer of material in the negative cavity, and removing the substrate so as to release the single-piece micromechanical part formed in the negative cavity comprising an external surface of comparable roughness to that of the substrate.
Opening claim text (preview).
The invention claimed is: 1. A method of fabricating a micromechanical part in a single-piece made of a synthetic carbon-allotrope, comprising: a) forming a substrate which includes a negative cavity for the micromechanical part to be fabricated; b) coating the substrate, including the negative cavity and a portion of the substrate surrounding the negative cavity, with a layer of the synthetic carbon allotrope in a thickness of between 0.2 μm and 20 μm, the thickness being less than the depth of the negative cavity; c) removing, after step b), from the substrate a larger thickness than the thickness of the layer of the synthetic carbon allotrope deposited by the coating such that the layer of the synthetic carbon allotrope is removed from the portion of the substrate surrounding the negative cavity, so as to leave a limited thickness of the layer of material in the negative cavity; and d) removing the substrate so as to release the single-piece micromechanical part formed in the negative cavity comprising an external surface of comparable roughness to that of the substrate. 2. The method according to claim 1 , wherein the negative cavity includes a wall forming a toothing. 3. The method according to claim 1 , wherein the synthetic carbon allotrope is in crystallised form. 4. The method according to claim 1 , wherein the synthetic carbon allotrope is in amorphous form. 5. The method according to claim 1 , wherein between step b) and step c), the method includes the following step: e) filling the cavity coated with the synthetic carbon allotrope with a second material so that, after steps c) and d), there is obtained a micromechanical part in a synthetic carbon allotrope reinforced and/or decorated with a second material. 6. The method according to claim 5 , wherein the second material includes a metal or metal alloy. 7. The method according to claim 1 , wherein between step c) and step d), the method includes the following step: f) filling the cavity coated with the synthetic carbon allotrope with a second material so that, after step d), there is obtained a micromechanical part made of a synthetic carbon allotrope reinforced and/or decorated with a second material. 8. The method according to claim 7 , wherein, in step f), the second material is formed protruding from the negative cavity in order to form an additional functional element of the micromechanical part. 9. The method according to claim 7 , wherein the second material includes a metal or metal alloy. 10. The method according to claim 1 , wherein the micromechanical part forms an exterior part, balance spring, balance, pallet lever, bridge, wheel set or escape wheel of a timepiece. 11. The method according to claim 1 , wherein, after step c), a portion of the layer of the synthetic carbon allotrope formed in the negative cavity is not joined to a portion of the layer of the synthetic carbon allotrope formed on the portion of the substrate surrounding the negative cavity.
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