Two axes MEMS resonant magnetometer

Patent metadata

Field	Value
Publication number	US-9594128-B2
Application number	US-201414228090-A
Country	US
Kind code	B2
Filing date	Mar 27, 2014
Priority date	Mar 27, 2013
Publication date	Mar 14, 2017
Grant date	Mar 14, 2017

Abstract

A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the center of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.

First claim

The invention claimed is:

1. A two axes MEMS resonant magnetometer comprising:
in one plane, a freestanding rectangular frame having inner walls and four torsion springs disposed inside the frame, wherein opposing inner walls of the frame are contacted by one end of only two springs, each spring being anchored by its other end to a substrate
wherein the substrate comprises two electrically isolated power supply lines, whereby diagonally facing anchored ends of the torsion springs are electrically connected to the same power supply line, and wherein the substrate is configured for the application of an AC voltage between the two power supply lines, the AC voltage having a frequency equal to the frequency of at least one of two orthogonal modes of the MEMS magnetometer, thereby creating a current flowing between opposite biased anchored ends of the torsion springs,
wherein the substrate comprises four electrodes, each electrode being capacitively coupled to a different side of the frame thereby forming four capacitors, whereby the four electrodes are configured for differential capacitive measurement between opposite capacitors corresponding to a respective orthogonal mode, and wherein the differential capacitive measurement is adapted to be used to determine an in-plane component of a magnetic field in which the MEMS magnetometer is placed.

2. The MEMS magnetometer according to claim 1 , wherein the rectangular frame and the torsion springs are formed in a single layer of the same material.

3. The MEMS magnetometer according to claim 2 , wherein the material is a metal.

4. The MEMS magnetometer according to claim 1 , wherein the torsion springs are L-shaped springs, and the other end of each spring is anchored towards the center of the frame, to a substrate.

5. A method for designing a MEMS magnetometer according to claim 1 , comprising:
dimensioning the frame and the torsion springs to maximize the sensitivity of the differential capacitive measurement between opposite capacitors, while minimizing the sensitivity of the differential capacitive measurement between adjacent capacitors.

6. A method for operating a MEMS magnetometer, comprising:
placing the MEMS magnetometer in a magnetic field, wherein the MEMS magnetometer is a two axes MEMS resonant magnetometer comprising:
in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two springs, each spring being anchored by its other end to a substrate,
wherein the substrate comprises two electrically isolated power supply lines, and whereby diagonally facing anchored ends of the torsion springs are electrically connected to the same power supply line, and
wherein the substrate comprises four electrodes, each electrode being capacitively coupled to a different side of the frame thereby forming four capacitors, whereby the four electrodes are configured for differential capacitive measurement between opposite capacitors;

applying an AC voltage between the two power supply lines, the AC voltage having a frequency equal to the frequency of at least one of two orthogonal modes of the MEMS magnetometer, thereby creating a current flowing between opposite biased anchored ends of the torsion springs;
measuring the differential capacitance between opposite capacitors corresponding to a respective orthogonal mode; and
determining from this differential capacitance measurement an in-plane component of the magnetic field.

Assignees

• Imec
• King Abdulaziz City Sci & Tech
• King Abulaziz City For Science And Tech

Inventors

• Farghaly Mahmoud A
• Rochus Veronique
• Rottenberg Xavier
• Tilmans Hendrikus

Classifications

• G01R33/0283

  in which a current or voltage is generated due to relative movement of conductor and magnetic field · CPC title

• G01V3/087

  the earth magnetic field being modified by the objects or geological structures · CPC title

• G01V3/40

  specially adapted for measuring magnetic field characteristics of the earth · CPC title

• G06F30/17

  Mechanical parametric or variational design · CPC title

• G01R15/245

  using magneto-optical modulators, e.g. based on the Faraday or Cotton-Mouton effect · CPC title