Resonant MEMS lorentz-force magnetometer using force-feedback and frequency-locked coil excitation

Patent metadata

Field	Value
Publication number	US-9588190-B2
Application number	US-201213729516-A
Country	US
Kind code	B2
Filing date	Dec 28, 2012
Priority date	Jul 25, 2012
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

A method includes supplying a current to at least one conductive path integral with a MEMS device to thereby exert a Lorentz force on the MEMS device in the presence of a magnetic field. The method includes determining the magnetic field based on a control value in a control loop configured to maintain a constrained range of motion of the MEMS device. The control loop may be configured to maintain the MEMS device in a stationary position. The current may have a frequency equal to a resonant frequency of the MEMS device.

First claim

What is claimed is:

1. A method comprising:
supplying a current to at least one conductive path integral with a proof mass of a microelectromechanical system (MEMS) device to thereby exert a Lorentz force on the MEMS device in the presence of a magnetic field; and
determining the magnetic field based on a control value in a control loop configured to apply a feedback force to the proof mass that opposes the Lorentz force to compensate for a displacement of the proof mass from a nominally stationary position.

2. The method, as recited in claim 1 , wherein the current has a frequency approximately equal to a resonant frequency of the MEMS device (f O _ MEMS ).

3. The method, as recited in claim 1 , wherein the control value is based on sensed displacements of the proof mass from the nominally stationary position.

4. The method, as recited in claim 1 , further comprising:
in a first mode of operating the MEMS device, generating a signal indicative of a resonant frequency of the MEMS device (f O _ MEMS ); and
in a second mode of operating the MEMS device, generating the current based on the signal,
wherein in the first mode, the proof mass is configured to resonate, and in the second mode, the MEMS device is included in the control loop.

5. The method, as recited in claim 4 , wherein in the first mode of operating the MEMS device, generating the signal comprises:
configuring the MEMS device to generate an oscillating signal; and
comparing a frequency of the oscillating signal to a frequency of a reference clock signal and generating the signal based on the comparison.

6. The method, as recited in claim 4 , wherein generating the current comprises:
adjusting a frequency of a version of a reference clock signal based on f O _ MEMS .

7. The method, as recited in claim 1 , further comprising:
applying a force to the proof mass in opposition to a difference between a frequency of the current and a resonant frequency of the MEMS device (f O _ MEMS ),
wherein the frequency of the current is approximately f O _ MEMS .

8. The method, as recited in claim 1 , wherein supplying the current comprises:
generating the current using a second MEMS device configured to self-resonate.

9. The method, as recited in claim 8 , wherein generating the current comprises:
applying a force to the second MEMS device based on a difference between a frequency of the current and a resonant frequency of the second MEMS device.

10. The method, as recited in claim 1 , further comprising:
generating the current based on a reference clock signal; and
providing an output signal indicative of the magnetic field, the output signal being based on the control value and the reference clock signal.

11. The method, as recited in claim 1 , further comprising:
generating the current based on a reference clock signal;
providing an output signal indicative of the magnetic field, the output signal being based on the displacement and the reference clock signal; and
generating the control value based on the output signal and a phase-shifted version of the reference clock signal.

12. The method, as recited in claim 1 , further comprising:
varying a frequency of the current over a range of frequencies; and
determining a magnetic field as a function of frequency based on control values in the control loop, the control values corresponding to frequency values of the range of frequencies.

13. The method, as recited in claim 1 , wherein the control loop is configured to generate the control value to apply the feedback force to the MEMS device to return the proof mass to the nominally stationary position.

14. The method, as recited in claim 1 , wherein the displacement of the proof mass is with respect to a frame of the MEMS device.

15. An apparatus comprising:
at least one conductive path integral with a proof mass of a microelectromechanical system (MEMS) device configured to exert a Lorentz force on the MEMS device in response to a current and in the presence of a magnetic field; and
a circuit configured to determine the magnetic field based on a control value in a control loop configured to apply a feedback force to the proof mass that opposes the Lorentz force to compensate for a displacement of the proof mass of the MEMS device from a nominally stationary position.

16. The apparatus, as recited in claim 15 , wherein the current has a frequency locked to a resonant frequency of the MEMS device (f O _ MEMS ).

17. The apparatus, as recited in claim 15 , further comprising:
a mixer configured to generate an output signal indicative of the magnetic field based on the control value and a periodic reference signal used to generate the current.

18. The apparatus, as recited in claim 17 , wherein the periodic reference signal has a frequency equal to a resonant frequency of the MEMS device (f O _ MEMS ).

19. The apparatus, as recited in claim 17 , further comprising:
a second mixer configured to generate the control value based on the output signal and a phase-shifted version of the periodic reference signal used to generate the current.

20. The apparatus, as recited in claim 15 , further comprising:
a reference signal generator configured to generate a periodic reference signal having a frequency equal to a resonant frequency of the MEMS device (f O _ MEMS ), wherein the current is generated using the periodic reference signal.

21. The apparatus, as recited in claim 20 , wherein the reference signal generator comprises:
a second MEMS device having approximately a same resonant frequency as the MEMS device and configured to resonate at the resonant frequency and generate the periodic reference signal having a frequency equal to the resonant frequency.

22. The apparatus, as recited in claim 15 , further comprising:
a reference signal generator configured to generate a clock signal having a reference frequency,
wherein the microelectromechanical system (MEMS) device further includes a drive actuation transducer configured to apply a required force to change the resonant frequency to the reference frequency.

23. The apparatus, as recited in claim 15 , wherein the at least one conductive path includes a conductive path formed using isolated portions of conductive material included as part of the proof mass.

24. The apparatus, as recited in claim 15 , further comprising:
the control loop configured to generate the control value to apply the feedback force to the MEMS device to return the proof mass to the nominally stationary position.

25. A method comprising:
supplying a sensing signal to a microelectromechanical system (MEMS) device;
supplying a current to at least one conductive path integral with a mass of the MEMS device to thereby exert a Lorentz force on the MEMS device in the presence of a magnetic field;
generating an output signal having a level proportional to displacement from a nominally stationary position of the mass of the MEMS device with respect to a frame of the MEMS device, the output signal being generated by the MEMS device using the sensing signal;
generating a feedback force based on the output signal, the feedback force compensating for the displacement to return the mass of the MEMS device to the nominally stationary position, the feedback force being approximately equal and opposite to the Lorentz force; and
generating a magnetic sensor output signal indicative of the magne

Assignees

• Silicon Lab Inc

Inventors

• Smith Eric B
• Wahby Riad
• Zhou Yan

Classifications

• G01R33/0286 Primary

  comprising microelectromechanical systems [MEMS] (MEMS devices in general B81B) · CPC title

• B81B3/0032

  Structures for transforming energy not provided for in groups B81B3/0021 - B81B3/0029 · CPC title