Electronic component and method for producing the electronic component

Patent metadata

Field	Value
Publication number	US-9590163-B2
Application number	US-201113976969-A
Country	US
Kind code	B2
Filing date	Nov 22, 2011
Priority date	Dec 30, 2010
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

The invention relates to an electronic component having a layer sequence, which comprises at least a first electrode ( 10 ), a second electrode ( 20 ) and an active region ( 30 ) and contains monoatomic carbon layers at least in sub-regions.

First claim

The invention claimed is:

1. An electroacoustic component having a layer sequence, the layer sequence comprising:
a first electrode;
a second electrode; and
an active region, which is electrically coupled to the first electrode and the second electrode,
wherein the layer sequence includes graphene at least in partial regions,
wherein the graphene is arranged as monolayers or as multilayers, and
wherein the active region comprises a piezoelectric layer.

2. The electroacoustic component according to claim 1 , wherein the layer sequence further comprises reflective layers.

3. The electroacoustic component according to claim 1 or 2 , wherein the first electrode or the second electrode or a reflective layer contains monoatomic carbon layers at least in partial regions.

4. The electroacoustic component according to claim 1 , wherein the first and second electrodes are arranged on one side of the piezoelectric layer or on mutually opposite sides of the piezoelectric layer.

5. The electroacoustic component according to claim 4 , wherein the first or the second electrode comprises a plurality of layers arranged one above another, at least one layer of which contains monoatomic carbon layers.

6. The electroacoustic component according to claim 5 , wherein the at least one layer of the first or second electrode which contains monoatomic carbon layers is combined with at least one layer containing a material selected from a group comprising Ti, Mo, mixtures of Ti and Mo, Ru, Pt, W, Al, Cu and mixtures of Al and Cu.

7. The electroacoustic component according to claim 2 , further comprising:
at least one first reflective layer having a high acoustic impedance;
at least one second reflective layer having a low acoustic impedance; and
a substrate, wherein the at least one first reflective layer and the at least one second reflective layer are arranged between the substrate and the first electrode.

8. The electroacoustic component according to claim 7 , wherein the at least one second reflective layer has chemically modified monoatomic carbon layers.

9. The electroacoustic component according to claim 8 , wherein the at least one second reflective layer is electrically insulating.

10. The electroacoustic component according to one of claims 7 to 9 , wherein the at least one first reflective layer contains W.

11. The electroacoustic component according to claim 7 , wherein the at least one second reflective layer is arranged between the at least one first reflective layer and the first electrode.

12. The electroacoustic component according to claim 11 , which is embodied as a surface-acoustic-wave-based component, as a bulk-acoustic-wave-based component or as a microelectro-mechanical component.

13. A method for producing an electroacoustic component according to claim 1 , wherein the graphene is applied by means of a method selected from a group comprising chemical vapor deposition, physical vapor deposition, application in solution and chemical surface reactions.

Assignees

• Schmidhammer Edgar
• Henn Gudrun
• Epcos Ag

Inventors

• Schmidhammer Edgar
• Henn Gudrun

Classifications

• H03H9/02 Primary

  Details · CPC title

• H01L41/08

  Electricity · mapped topic

• H01L41/047

  Electricity · mapped topic

• H01L41/0477

  Electricity · mapped topic

• H01L41/0478 Primary

  Electricity · mapped topic