Method for manufacturing acoustic wave device

Patent metadata

Field	Value
Publication number	US-9584088-B2
Application number	US-201213644040-A
Country	US
Kind code	B2
Filing date	Oct 3, 2012
Priority date	Mar 16, 2011
Publication date	Feb 28, 2017
Grant date	Feb 28, 2017

Abstract

A method for manufacturing an acoustic wave device with an excellent frequency-temperature profile is performed such that the acoustic wave device produced includes a piezoelectric substrate, an IDT electrode located on the piezoelectric substrate, and a dielectric film mainly including Si and O and arranged on the piezoelectric substrate to cover the IDT electrode. The dielectric film is formed by sputtering in a sputtering gas containing H 2 O.

First claim

What is claimed is:

1. A method for manufacturing a surface acoustic wave device comprising:
forming the surface acoustic wave device to include a piezoelectric substrate that has a negative temperature coefficient of frequency, an IDT electrode located on the piezoelectric substrate, and a dielectric film that has a positive temperature coefficient of frequency, mainly includes Si and O, and is arranged on the piezoelectric substrate to cover the IDT electrode; and
forming the dielectric film by sputtering in a sputtering gas containing H 2 O and having an H 2 O partial pressure in a range of about 1% to about 6%, inclusive.

2. The method for manufacturing an acoustic wave device according to claim 1 , wherein the dielectric film includes hydrogen atoms and hydroxy groups.

3. The method for manufacturing an acoustic wave device according to claim 1 , wherein the dielectric film is made of a silicon oxide including a hydrogen atom and a hydroxy group.

4. The method for manufacturing an acoustic wave device according to claim 1 , wherein the acoustic wave device is one of a surface acoustic wave device, a boundary acoustic wave device, a one-port surface acoustic wave resonator, a surface acoustic wave filter, and a surface acoustic wave branching filter.

5. The method for manufacturing an acoustic wave device according to claim 1 , wherein the piezoelectric substrate is made of one of LiNbO 3 , LiTaO 3 , potassium niobate, quartz, langasite, zinc oxide, lead zirconate titanate, and lithium tetraborate.

6. The method for manufacturing an acoustic wave device according to claim 1 , wherein the piezoelectric substrate is a 127°-rotated Y-cut X-propagation LiNbO 3 substrate.

7. The method for manufacturing an acoustic wave device according to claim 1 , wherein the IDT electrode is formed to emit acoustic waves with a wavelength of about 1.9 μm and has a metallization ratio of about 0.5.

8. The method for manufacturing an acoustic wave device according to claim 1 , further comprising the step of forming leads and pads on the piezoelectric substrate such that the IDT electrode is connected to the pads via the leads.

9. The method for manufacturing an acoustic wave device according to claim 8 , wherein the IDT electrode, the leads, and the pads are each made of a metal including one of Au, Cu, Ag, W, Ta, Pt, Ni, Mo, Al, Ti, Cr, Pd, Co, Mn, or alloys containing more than one of the metals.

10. The method for manufacturing an acoustic wave device according to claim 1 , wherein the IDT electrode includes at least two electroconductive films.

11. The method for manufacturing an acoustic wave device according to claim 1 , wherein the IDT electrode is a laminate including a NiCr layer, a Pt layer, a first Ti layer, an Al—Cu alloy layer, and a second Ti layer stacked in this order from a side of the piezoelectric substrate.

12. The method for manufacturing an acoustic wave device according to claim 1 , wherein the IDT electrode is formed by one of vapor deposition and sputtering.

13. The method for manufacturing an acoustic wave device according to claim 1 , wherein the dielectric film is formed so as to leave exposed busbars, leads and pads, and to cover only electrode fingers of the IDT electrode and remaining areas of the piezoelectric substrate.

14. The method for manufacturing an acoustic wave device according to claim 1 , further comprising a step of flattening the dielectric film by using a sacrificial layer.

15. The method for manufacturing an acoustic wave device according to claim 14 , further comprising the step of forming an overcoat over the dielectric film, after the step of flattening.

16. The method for manufacturing an acoustic wave device according to claim 15 , wherein the overcoat is made of at least one of a silicon oxide, a silicon nitride, a silicon oxynitride, SiC, Ta 2 O 5 , TiO 2 , TiN, Al 2 O 3 , and TeO 2 .

17. The method for manufacturing an acoustic wave device according to claim 15 , wherein the step of forming the overcoat includes performing one of vapor deposition, sputtering, and chemical vapor deposition, to form the overcoat.

18. The method for manufacturing an acoustic wave device according to claim 1 , wherein the sputtering is bias sputtering and uses a sputtering gas mixture including Ar and O 2 containing vaporized H 2 O.

19. The method for manufacturing an acoustic wave device according to claim 1 , wherein in the sputtering, liquid H 2 O is vaporized into a gas using a vaporizer, H 2 O gas is added to an Ar—O 2 gas mixture until an H 2 O partial pressure of about 6%, while a flow rate of the gas is controlled with a mass flow controller, and the obtained gas mixture is introduced into a film-formation chamber.

Assignees

• Murata Manufacturing Co

Inventors

• Kikuchi Taku
• Takahashi Hideaki

Classifications

• H03H9/02559

  of lithium niobate or lithium-tantalate substrates · CPC title

• H03H9/02574

  of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate · CPC title

• C23C14/34

  Sputtering · CPC title

• C23C14/3428

  using liquid targets · CPC title

• C23C14/0042

  Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements · CPC title