Laser processing of superconductor layers

Patent metadata

Field	Value
Publication number	US-9590161-B2
Application number	US-201314092296-A
Country	US
Kind code	B2
Filing date	Nov 27, 2013
Priority date	Nov 27, 2013
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

A method of forming a superconductor includes exposing a layer disposed on a substrate to an oxygen ambient, and selectively annealing a portion of the layer to form a superconducting region within the layer.

First claim

What is claimed is:

1. A method of forming a superconductor, the method comprising
exposing a layer disposed on a substrate to an oxygen ambient; and
selectively annealing a portion of the layer using a laser beam to form a superconducting region within the layer,
wherein after the selective annealing, the superconducting region comprises superconductor material having a preferred crystallographic orientation in which the c-axis of crystallites are arranged perpendicularly to the plane of the tape in preference over other possible orientations, and
wherein a first region of the layer disposed outside the portion of the layer does not comprise a superconductor material having the preferred crystallographic orientation in which the c-axis of crystallites are arranged perpendicularly to the plane of the tape in preference over other possible orientations, the first region not being selectively annealed by the laser beam.

2. The method of claim 1 , wherein the superconducting region has higher critical current than the first region outside of the superconducting region.

3. The method of claim 2 , wherein the superconducting region and the first region have at least three elements in common.

4. The method of claim 2 , wherein the superconducting region and the first region have different crystalline orientations.

5. The method of claim 1 , wherein the selectively annealing comprises directing the laser beam to the portion of the layer from a laser source comprising a CO 2 -laser, an excimer XeCl laser, N 2 laser, Cu vapor laser, or Nd:YAG pulse laser.

6. The method of claim 5 , further comprising scanning the laser beam with respect to the substrate to define the superconductor region in the layer.

7. The method of claim 1 , further comprising:
providing the substrate as a substrate base; and
forming a buffer layer on the substrate base that is operative to generate a c-axis orientation to the portion of the layer in which the crystallites have their c-axes oriented perpendicularly to the plane of the substrate.

8. The method of claim 7 , wherein the substrate base comprises a silicon-on-insulator (SOI) substrate wherein a silicon layer of the SOI substrate comprises a thickness less than 10 micrometers.

9. The method of claim 1 , wherein before the selectively annealing the layer comprises amorphous material or randomly oriented polycrystalline superconductor crystallites.

10. The method of claim 1 , wherein the layer comprises ReBa 2 Cu 3 O 7−x where Re is a rare earth element, wherein before the selectively annealing the portion comprises a set of regions in which crystallites of the layer have their c-axes oriented parallel to a plane of the substrate.

11. The method of claim 1 , wherein the substrate comprises a set of raised features having sidewalls, and wherein the layer comprises superconductor material disposed on the sidewalls.

12. The method of claim 1 , wherein the selectively annealing comprises generating a temperature of the portion of the layer of greater than 400° C.

13. A method of forming a superconductor region in a layer disposed on a surface of a substrate, comprising:
directing a laser beam to the surface;
providing an oxygen ambient to the surface;
moving the substrate with respect to the laser beam to generate a selectively annealed region in the layer, wherein the selectively annealed region comprises superconductor material having a c-axis orientation in which the c-axes of the crystallites are aligned perpendicularly to a plane of the substrate, wherein a first region of the layer disposed outside the selectively annealed region does not comprise a superconductor material having a c-axis orientation, wherein the substrate comprises a set of raised features having sidewalls, and the selectively annealed region comprises superconductor material disposed on the sidewalls, and
and forming a metal on a portion of the layer including the superconductor material disposed on the sidewalls.

14. The method of claim 13 , wherein the layer comprises a material in a family of ReBa 2 Cu 3 O 7−x material where Re is a rare earth element and the selectively annealed region comprises a set of regions in which crystallites of the layer have their c-axes oriented parallel to a plane of the substrate before the directing the laser beam.

15. The method of claim 13 , further comprising, before the directing the laser beam:
forming on a substrate base of the substrate a buffer layer configured to generate epitaxial growth of the superconductor layer; and
depositing the superconductor layer as a poorly crystalline or amorphous layer having a thickness greater than two micrometers.

Assignees

• Varian Semiconductor Equipment Ass Inc

Inventors

• Wang Connie P
• Murphy Paul
• Sullivan Paul
• Chatterjee Sukti

Classifications

• Y10T428/24174

  including sheet or component perpendicular to plane of web or sheet · CPC title

• H01L39/2464

  Electricity · mapped topic

• H01L39/249 Primary

  Electricity · mapped topic

• H01L39/128

  Electricity · mapped topic

• H10N60/0661 Primary

  Processes performed after copper oxide formation, e.g. patterning · CPC title