Pixelated capacitance controlled ESC
US-9472410-B2 · Oct 18, 2016 · US
Sample holder
US9589826B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9589826-B2 |
| Application number | US-201414770045-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 24, 2014 |
| Priority date | Feb 25, 2013 |
| Publication date | Mar 7, 2017 |
| Grant date | Mar 7, 2017 |
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- Title
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- Abstract
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- Assignees and inventors
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- First independent claim
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Abstract
Official abstract text for this publication.
A sample holder includes a substrate composed of ceramics, having a sample holding surface provided in an upper face thereof; a supporting member composed of metal, an upper face of the supporting member covering a lower face of the substrate; and a joining layer composed of indium or an indium alloy, the substrate and the supporting member being joined to each other via the joining layer. The joining layer has a layer region in at least one of a joining surface to the substrate and a joining surface to the supporting member, a content percentage of indium oxides of the layer region being higher than that of an intermediate region in a thickness direction of the joining layer.
First claim
Opening claim text (preview).
The invention claimed is: 1. A sample holder, comprising: a substrate composed of ceramics, having a sample holding surface provided in an upper face thereof; a supporting member composed of metal, an upper face of the supporting member covering a lower face of the substrate; and a joining layer composed of indium or an indium alloy, the substrate and the supporting member being joined to each other via the joining layer, the joining layer having a layer region in at least one of a joining surface to the substrate and a joining surface to the supporting member, a content percentage of indium oxides of the layer region being higher than that of an intermediate region in a thickness direction of the joining layer. 2. The sample holder according to claim 1 , wherein in the joining layer, the layer region is located in the joining surface to the substrate and the joining surface to the supporting member. 3. The sample holder according to claim 1 , wherein in the layer region, a portion composed of the indium oxides and a portion composed of the indium or the indium alloy are mixed within the joining surface to the substrate. 4. The sample holder according to claim 1 , wherein in the layer region, a portion composed of the indium oxides and a portion composed of the indium or the indium alloy are mixed within the joining surface to the supporting member. 5. The sample holder according to claim 1 , wherein an interface between the intermediate region and the layer region is an uneven surface. 6. The sample holder according to claim 1 , wherein a covering layer containing one or more of metals having a higher standard redox potential E O than indium is provided in at least one of the lower face of the substrate and the upper face of the supporting member. 7. The sample holder according to claim 6 , wherein the covering layer contains at least one of nickel, copper, and silver-copper -titanium. 8. The sample holder according to claim 1 , wherein the substrate includes an electrode for electrostatic adsorption located in an inside thereof. 9. The sample holder according to claim 1 , wherein the substrate includes a heat-generating resistor located in an inside thereof. 10. The sample holder according to claim 1 , wherein the supporting member includes a liquid passage located in an inside thereof.
Assignees
Inventors
Classifications
mainly by convection · CPC title
using electrostatic chucks · CPC title
- H10P72/7616Primary
characterised by a coating, a hardness or a material · CPC title
whereby the interlayer is not continuous, e.g. not the whole surface of the smallest substrate is covered by the interlayer · CPC title
Oxidic interlayers · CPC title
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Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US9589826B2 cover?
- A sample holder includes a substrate composed of ceramics, having a sample holding surface provided in an upper face thereof; a supporting member composed of metal, an upper face of the supporting member covering a lower face of the substrate; and a joining layer composed of indium or an indium alloy, the substrate and the supporting member being joined to each other via the joining layer. The …
- Who is the assignee on this patent?
- Kyocera Corp
- What technology area does this patent fall under?
- Primary CPC classification H10P72/7616. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 07 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).