Wetting wave front control for reduced air entrapment during wafer entry into electroplating bath

Patent metadata

Field	Value
Publication number	US-9587322-B2
Application number	US-201514686479-A
Country	US
Kind code	B2
Filing date	Apr 14, 2015
Priority date	May 17, 2011
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

Methods described herein manage wafer entry into an electrolyte so that air entrapment due to initial impact of the wafer and/or wafer holder with the electrolyte is reduced and the wafer is moved in such a way that an electrolyte wetting wave front is maintained throughout immersion of the wafer also minimizing air entrapment.

First claim

What is claimed is:

1. A method of immersing a wafer into a plating solution, the method comprising:
(a) contacting a leading edge of the wafer, while the wafer is tilted with respect to the horizontal, with the plating solution at a first translational speed, followed by;
(b) slowing the wafer to a second translational speed while the wafer's plating surface is partially immersed in the plating solution, wherein the second translational speed is greater than zero; and then
(c) speeding the wafer to a third translational speed before the wafer's plating surface is fully immersed in the plating solution.

2. The method of claim 1 , further comprising:
(d) decelerating the wafer from the third speed to a stop; wherein the plating surface of the wafer is totally immersed in the electrolyte at the third speed or during the deceleration from the third speed to the stop.

3. The method of claim 1 , further comprising rotating the wafer.

4. The method of claim 1 , wherein the deceleration from the first translational speed to the second translational speed is continued until between about 25% and about 75% of the plating surface of the wafer is immersed in the plating solution.

5. The method of claim 1 , wherein the total time for immersion, from the time the leading edge of the wafer enters the plating solution until the wafer's plating surface is completely immersed in the plating solution, is less than 300 milliseconds.

6. The method of claim 1 , wherein the total time for immersion, from the time the leading edge of the wafer enters the plating solution until the wafer's plating surface is completely immersed in the plating solution, is less than 200 milliseconds.

7. The method of claim 1 , wherein the first translational speed is between about 120 mm/s and about 300 mm/s.

8. The method of claim 1 , wherein the first translational speed is between about 200 mm/s and about 300 mm/s.

9. The method of claim 1 , wherein the second translational speed is between about 40 mm/s and about 80 mm/s.

10. The method of claim 1 , wherein the third translational speed is between about 100 mm/s and about 140 mm/s.

11. The method of claim 1 , wherein the leading edge of the wafer is contacted with the plating solution while the wafer is tilted to a first angle with respect to the horizontal, further comprising:
(i) increasing the tilt of the wafer from the first angle to a second angle, while the wafer's plating surface is being immersed into the plating solution; and then
(ii) reducing the tilt angle of the wafer to 0 degrees.

12. The method of claim 1 , further comprising:
(i) applying photoresist to the wafer;
(ii) exposing the photoresist to light;
(iii) patterning the photoresist and transferring the pattern to the wafer; and
(iv) selectively removing the photoresist from the wafer.

13. A method of immersing a wafer into a plating solution, the method comprising:
(a) contacting a leading edge of the wafer, while the wafer is tilted to a first angle with respect to the horizontal, with the plating solution, followed by;
(b) increasing the tilt of the wafer from the first angle to a second angle, while the wafer's plating surface is being immersed into the plating solution; and then
(c) reducing the tilt angle of the wafer to 0 degrees.

14. The method of claim 13 , wherein the wafer's leading edge contacts the plating solution at a translational speed of at least about 120 mm/s.

15. The method of claim 13 , wherein the first and second tilt angles are between about 1 and 5 degrees.

16. The method of claim 13 , further comprising:
(i) applying photoresist to the wafer;
(ii) exposing the photoresist to light;
(iii) patterning the photoresist and transferring the pattern to the wafer; and
(iv) selectively removing the photoresist from the wafer.

Assignees

• Novellus Systems Inc

Inventors

• Ranjan Manish
• Ghongadi Shantinath
• Wilmot Frederick Dean
• Hill Douglas
• Buckalew Bryan L

Classifications

• H10P76/204

  of organic photoresist masks · CPC title

• H10P70/23

  during, before or after processing of insulating materials · CPC title

• H10P14/47

  Electrolytic deposition, i.e. electroplating; Electroless plating · CPC title

• H10W20/4421

  the principal metal being copper · CPC title

• H10W20/081

  by forming openings in the dielectric parts · CPC title