Array of carbon nanotube micro-tip structures
US-9734976-B2 · Aug 15, 2017 · US
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus
US9583299B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9583299-B2 |
| Application number | US-201414455338-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 8, 2014 |
| Priority date | Aug 9, 2013 |
| Publication date | Feb 28, 2017 |
| Grant date | Feb 28, 2017 |
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- Title
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Abstract
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There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with <210> orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron microscope, an electron beam applied analysis apparatus, an ion-electron multi-beam apparatus, a scanning probe microscope or a mask repair apparatus.
First claim
Opening claim text (preview).
What is claimed is: 1. An iridium tip comprising a pyramid structure wherein an apex portion of the pyramid structure has an apex with <210> orientation surrounded by one {100} crystal plane and two {111} crystal planes, wherein the pyramid structure includes a first layer composed of a single iridium atom constituting the apex of the pyramid structure, a second layer immediately below the first layer and composed of three iridium atoms located at vertices of a triangle, and a third layer immediately below the second layer and composed of six iridium atoms located at vertices and sides of a triangle, and wherein the crystal planes of the pyramid structure are defined by the iridium atoms of the first, second, and third layer.
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Classifications
with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title
Means for adjusting the focus · CPC title
Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece, (H01J37/3244 takes precedence; environmental cells for electron microscopes H01J2237/2003; microscopes with environmental specimen chamber H01J2237/2608) · CPC title
Details · CPC title
Cooling arrangements · CPC title
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Frequently asked questions
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- What does patent US9583299B2 cover?
- There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with <210> orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron micro…
- Who is the assignee on this patent?
- Hitachi High-Tech Science Corp
- What technology area does this patent fall under?
- Primary CPC classification H01J1/3044. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 28 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).