Weak signal detection system and electron microscope equipped with same

Patent metadata

Field	Value
Publication number	US-9576769-B2
Application number	US-201414913029-A
Country	US
Kind code	B2
Filing date	Jun 13, 2014
Priority date	Aug 27, 2013
Publication date	Feb 21, 2017
Grant date	Feb 21, 2017

Abstract

This weak signal detection system has: a statistical data acquisition unit which measures the average value or distribution of an input signal in which is noise superimposed on a desired signal, calculates parameters such as the amplitude or noise dispersion of the desired signal, and outputs the calculated data obtained thereby; a nonlinear characteristic unit which outputs a signal having a nonlinear response with respect to the magnitude of the voltage or the current of the input signal; a signal detection ratio evaluation unit which determines whether the output signal from the nonlinear characteristic unit is the desired signal, calculates the detection ratio in the event that the signal is the desired signal, and outputs detection ratio data; a parameter adjustment unit which, on the basis of detection ratio data obtained by the signal detection ratio evaluation unit and calculated data obtained by the statistical data acquisition unit, adjusts a control parameter pertaining to the responsiveness of the nonlinear characteristic unit; and a signal processing unit which performs signal processing of the output signal of the nonlinear characteristic unit, and conversion to digital data or image data. In so doing, it is possible to provide a weak signal detection system having improved signal detection accuracy, and an electron microscope equipped with the system.

First claim

The invention claimed is:

1. A weak signal detection system comprising:
a statistical data acquisition unit that measures an average value or distribution of an input signal in which noise is superimposed on a desired signal, calculates amplitude of the desired signal, noise dispersion, and the like, and outputs obtained calculation data;
a nonlinear characteristic unit that outputs a signal that responds nonlinearly to amplitude of voltage or current of the input signal;
a signal detection ratio evaluation unit that determines whether an output signal from the nonlinear characteristic unit is the desired signal, calculates a detection ratio assuming the output signal is the desired signal, and outputs detection ratio data;
a parameter adjustment unit that adjusts a control parameter pertaining to responsiveness of the nonlinear characteristic unit based on the detection ratio data obtained by the signal detection ratio evaluation unit and the calculation data obtained by the statistical data acquisition unit; and
a signal processing unit that performs signal processing of the output signal from the nonlinear characteristic unit and converts the signal-processed output signal into digital data or image data.

2. The weak signal detection system according to claim 1 , wherein the nonlinear characteristic unit includes a linear amplifier circuit that linearly amplifies an input signal and a nonlinear response circuit that responds nonlinearly to the input signal, adjusts a gain of the nonlinear response circuit by the parameter adjustment unit, and adjusts a state transition level, a response speed, and output signal amplitude that respond to voltage of the input signal in the nonlinear characteristic unit.

3. The weak signal detection system according to claim 2 , wherein the nonlinear response circuit of the nonlinear characteristic unit includes:
an adding circuit that adds a plurality of input signals and outputs the added input signal;
an integral circuit that integrates the output signal from the adding circuit;
a positive feedback amplifier circuit that linearly amplifies the signal integrated by the integral circuit and outputs the linearly-amplified signal to the adding circuit;
a negative feedback amplifier circuit that linearly amplifies the signal integrated by the integral circuit and outputs the linearly-amplified signal; and
a cube circuit that outputs to the adding circuit a signal obtained by cubing the output signal from the negative feedback amplifier circuit, wherein
a gain of the positive feedback amplifier circuit and a gain of the negative feedback amplifier circuit are adjusted by the parameter adjustment unit.

4. The weak signal detection system according to claim 2 , wherein the nonlinear characteristic unit includes a variable linear amplifier circuit that can linearly amplify the input signal and adjust the gain, adjusts the gain of the variable linear amplifier circuit and the gain of the nonlinear response circuit by the parameter adjustment unit, and adjusts the state transition level that responds to the voltage of the input signal in the nonlinear characteristic unit.

5. An electron microscope comprising the weak signal detection system according to claim 1 .

Assignees

• Hitachi Ltd

Inventors

• Kanai Hisaaki
• Li Wen
• Makuuchi Masami

Classifications

• H01J37/222 Primary

  Image processing arrangements associated with the tube · CPC title

• H01J37/263

  Contrast, resolution or power of penetration · CPC title

• H01J2237/26

  Electron or ion microscopes · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title

• G01N2223/6116

  semiconductor wafer · CPC title