Replacement gate process for FinFET

Patent metadata

Field	Value
Publication number	US-9570580-B1
Application number	US-201514928704-A
Country	US
Kind code	B1
Filing date	Oct 30, 2015
Priority date	Oct 30, 2015
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

A method of forming a semiconductor device includes etching a substrate to form two first trenches separated by a fin; filling the two first trenches with an isolation layer; and depositing a dielectric layer over the fin and the isolation layer. The method further includes forming a second trench in the dielectric layer over a channel region of the semiconductor device, the second trench exposing the isolation layer. The method further includes etching the isolation layer through the second trench to expose an upper portion of the fin in the channel region of the semiconductor device, and forming a dummy gate in the second trench over the isolation layer and engaging the upper portion of the fin.

First claim

What is claimed is:

1. A method of forming a semiconductor device, the method comprising:
etching a substrate, thereby forming two first trenches separated by a fin;
filling the two first trenches with an isolation layer;
depositing a dielectric layer over the fin and the isolation layer;
forming a second trench in the dielectric layer over a channel region of the semiconductor device, the second trench exposing the isolation layer;
etching the isolation layer through the second trench, thereby exposing an upper portion of the fin in the channel region of the semiconductor device; and
forming a dummy gate in the second trench over the isolation layer and engaging the upper portion of the fin.

2. The method of claim 1 , further comprising, after the forming of the dummy gate:
removing the dielectric layer from at least source/drain (S/D) regions of the semiconductor device; and
etching the isolation layer in the S/D regions of the semiconductor device.

3. The method of claim 1 , wherein the forming of the dummy gate includes:
filling the second trench with a poly silicon layer;
recessing the poly silicon layer in the second trench such that a top surface of the poly silicon layer is below a top surface of the dielectric layer and is above a top surface of the isolation layer; and
forming a hard mask layer over the poly silicon layer in the second trench, wherein the dummy gate includes the poly silicon layer and the hard mask layer.

4. The method of claim 3 , wherein the hard mask layer comprises a nitride.

5. The method of claim 3 , wherein the forming of the hard mask layer includes:
depositing the hard mask layer in the second trench and over the dielectric layer; and
performing a chemical mechanical planarization (CMP) process to the hard mask layer to expose the dielectric layer.

6. The method of claim 3 , further comprising:
removing the dielectric layer from at least source/drain (S/D) regions of the semiconductor device;
etching the isolation layer in the S/D regions of the semiconductor device, thereby exposing the fin in the S/D regions of the semiconductor device; and
forming a gate spacer on sidewalls of the dummy gate.

7. The method of claim 1 , further comprising:
removing the dielectric layer before the forming of the dummy gate, wherein the forming of the dummy gate includes:
depositing a hard mask layer in the second trench and over the isolation layer; and
performing a CMP process to the hard mask layer to expose the isolation layer, wherein the dummy gate includes a remaining portion of the hard mask layer.

8. The method of claim 7 , wherein the hard mask layer comprises a nitride.

9. The method of claim 1 , further comprising, before the depositing of the dielectric layer:
recessing the fin, thereby forming a third trench with the isolation layer being sidewalls of the third trench; and
epitaxially growing one or more semiconductor layers in the third trench, wherein the upper portion of the fin includes the one or more semiconductor layers.

10. The method of claim 1 , further comprising:
replacing the dummy gate with a metal gate.

11. A method of forming a semiconductor device, the method comprising:
etching a substrate to form first trenches interposed by fins;
filling the first trenches with an isolation layer;
depositing a dielectric layer over the fins and the isolation layer;
etching the dielectric layer, thereby forming second trenches in the dielectric layer over channel regions of the semiconductor device, the second trenches exposing the isolation layer;
etching the isolation layer through the second trenches, thereby exposing upper portions of the fins in the channel regions of the semiconductor device;
forming dummy gates in the second trenches over the isolation layer, the dummy gates engaging the upper portions of the fins;
removing the dielectric layer; and
recessing the isolation layer in source/drain regions of the semiconductor device, while the dummy gates cover the channel regions of the semiconductor device.

12. The method of claim 11 , wherein the forming of the dummy gates includes:
filling the second trenches with a poly silicon layer;
recessing the poly silicon layer in the second trenches such that a top surface of the poly silicon layer is below a top surface of the dielectric layer and is above a top surface of the isolation layer; and
forming a hard mask layer over the poly silicon layer in the second trenches, wherein the dummy gates include the poly silicon layer and the hard mask layer.

13. The method of claim 12 , wherein the hard mask layer comprises a nitride.

14. The method of claim 12 , further comprising:
forming gate spacers on sidewalls of the dummy gates.

15. The method of claim 11 , wherein the forming of the dummy gates is performed after the removing of the dielectric layer, and wherein the forming of the dummy gates includes:
depositing a nitride layer in the second trenches and over the isolation layer; and
performing a chemical mechanical planarization (CMP) process to the nitride layer to expose the isolation layer, wherein the dummy gates include a remaining portion of the nitride layer.

16. The method of claim 11 , further comprising:
replacing the dummy gates with final gates.

17. The method of claim 11 , further comprising, before the depositing of the dielectric layer:
recessing the fins, thereby forming third trenches with the isolation layer being sidewalls of the third trenches; and
epitaxially growing one or more semiconductor layers in the third trenches, wherein the upper portions of the fins include the one or more semiconductor layers.

18. A method comprising:
forming a fin structure on a semiconductor substrate;
forming an isolation material layer around the fin structure such that the fin structure is embedded in the isolation material layer;
forming a dielectric layer over the isolation material layer and the fin structure;
removing a first portion of the dielectric layer and a first portion of the isolation material layer to expose a first portion of the fin structure;
forming a material layer on the first portion of the fin structure;
removing a second portion of dielectric layer and a second portion of the isolation material layer to expose a second portion of the fin structure;
forming a source/drain feature over the second portion of the fin structure;
removing the material layer over the first portion of the fin structure; and
after removing the material layer over the first portion of the fin structure, forming a gate dielectric layer and a gate electrode layer over the first portion of the fin structure.

19. The method of claim 18 , wherein the material layer includes a polysilicon material.

20. The method of claim 18 , further comprising forming a hard mask layer over the material layer on the first fin structure; and
removing the hard mask layer over the first portion of the fin structure after forming the source/drain feature over the second portion of the fin structure.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chiang Hung-Li
• Peng Cheng-Yi
• Wen Tsung-Yao
• Yeo Yee-Chia
• Chen Yen-Ming

Classifications

• H10P95/064

  the removal being chemical etching · CPC title

• H10W10/17

  formed using trench refilling with dielectric materials, e.g. shallow trench isolations · CPC title

• H10W10/014

  using trench refilling with dielectric materials, e.g. shallow trench isolations · CPC title

• H01L21/31055

  Electricity · mapped topic

• H01L29/6656

  Electricity · mapped topic